DE69023522T2 - Elektrostatische Haltevorrichtung. - Google Patents

Elektrostatische Haltevorrichtung.

Info

Publication number
DE69023522T2
DE69023522T2 DE1990623522 DE69023522T DE69023522T2 DE 69023522 T2 DE69023522 T2 DE 69023522T2 DE 1990623522 DE1990623522 DE 1990623522 DE 69023522 T DE69023522 T DE 69023522T DE 69023522 T2 DE69023522 T2 DE 69023522T2
Authority
DE
Germany
Prior art keywords
electrostatic chuck
chuck
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1990623522
Other languages
English (en)
Other versions
DE69023522D1 (de
Inventor
Masaaki Ogihara
Michio Aoyama
Tsumoru Fujii
Yuji Ikegami
Joji Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4493089A external-priority patent/JP2646729B2/ja
Priority claimed from JP1061902A external-priority patent/JP2621464B2/ja
Priority claimed from JP28991389A external-priority patent/JP2816578B2/ja
Priority claimed from JP30075289A external-priority patent/JP2814622B2/ja
Priority claimed from JP30941989A external-priority patent/JP2867500B2/ja
Application filed by IHI Corp filed Critical IHI Corp
Publication of DE69023522D1 publication Critical patent/DE69023522D1/de
Application granted granted Critical
Publication of DE69023522T2 publication Critical patent/DE69023522T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
DE1990623522 1989-02-23 1990-02-22 Elektrostatische Haltevorrichtung. Expired - Lifetime DE69023522T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP4493089A JP2646729B2 (ja) 1989-02-23 1989-02-23 静電浮遊装置
JP1061902A JP2621464B2 (ja) 1989-03-14 1989-03-14 静電浮遊炉
JP28991389A JP2816578B2 (ja) 1989-11-09 1989-11-09 静電浮遊装置
JP30075289A JP2814622B2 (ja) 1989-11-21 1989-11-21 静電浮遊装置
JP30941989A JP2867500B2 (ja) 1989-11-30 1989-11-30 静電浮遊炉

Publications (2)

Publication Number Publication Date
DE69023522D1 DE69023522D1 (de) 1995-12-21
DE69023522T2 true DE69023522T2 (de) 1996-08-01

Family

ID=27522436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990623522 Expired - Lifetime DE69023522T2 (de) 1989-02-23 1990-02-22 Elektrostatische Haltevorrichtung.

Country Status (2)

Country Link
EP (1) EP0384751B1 (de)
DE (1) DE69023522T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013203555B3 (de) * 2013-03-01 2014-07-03 Deutsches Zentrum für Luft- und Raumfahrt e.V. Elektrostatischer Levitator sowie Messsystem mit einem elektrostatischen Levitator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4521854A (en) * 1982-10-29 1985-06-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Closed loop electrostatic levitation system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013203555B3 (de) * 2013-03-01 2014-07-03 Deutsches Zentrum für Luft- und Raumfahrt e.V. Elektrostatischer Levitator sowie Messsystem mit einem elektrostatischen Levitator

Also Published As

Publication number Publication date
EP0384751A2 (de) 1990-08-29
DE69023522D1 (de) 1995-12-21
EP0384751A3 (de) 1991-07-17
EP0384751B1 (de) 1995-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition