DE69019339T2 - Verfahren zum herstellen von siliciumkarbid. - Google Patents

Verfahren zum herstellen von siliciumkarbid.

Info

Publication number
DE69019339T2
DE69019339T2 DE69019339T DE69019339T DE69019339T2 DE 69019339 T2 DE69019339 T2 DE 69019339T2 DE 69019339 T DE69019339 T DE 69019339T DE 69019339 T DE69019339 T DE 69019339T DE 69019339 T2 DE69019339 T2 DE 69019339T2
Authority
DE
Germany
Prior art keywords
chamber
cooling
wall
transport member
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69019339T
Other languages
English (en)
Other versions
DE69019339D1 (de
Inventor
Alan Weimer
William Moore
William Rafaniello
Raymond P Roach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Borchers Americas Inc
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Application granted granted Critical
Publication of DE69019339D1 publication Critical patent/DE69019339D1/de
Publication of DE69019339T2 publication Critical patent/DE69019339T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/0095—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes in which two different types of particles react with each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/08—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with moving particles
    • B01J8/12—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with moving particles moved by gravity in a downward flow
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/97—Preparation from SiO or SiO2
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity
DE69019339T 1989-01-11 1990-01-11 Verfahren zum herstellen von siliciumkarbid. Expired - Fee Related DE69019339T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/US1989/000114 WO1990008104A1 (en) 1989-01-11 1989-01-11 Process for preparing silicon carbide
PCT/US1990/000276 WO1990008105A1 (en) 1989-01-11 1990-01-11 Process for preparing silicon carbide

Publications (2)

Publication Number Publication Date
DE69019339D1 DE69019339D1 (de) 1995-06-14
DE69019339T2 true DE69019339T2 (de) 1995-09-14

Family

ID=22214776

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69019339T Expired - Fee Related DE69019339T2 (de) 1989-01-11 1990-01-11 Verfahren zum herstellen von siliciumkarbid.

Country Status (11)

Country Link
EP (1) EP0453516B1 (de)
JP (1) JP2841862B2 (de)
KR (1) KR910700198A (de)
AT (1) ATE122322T1 (de)
AU (1) AU632795B2 (de)
BR (1) BR9007006A (de)
CA (1) CA2045526C (de)
DE (1) DE69019339T2 (de)
FI (1) FI913353A0 (de)
NO (1) NO912715D0 (de)
WO (2) WO1990008104A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021131748B3 (de) 2021-12-02 2023-02-23 Nippon Kornmeyer Carbon Group Gmbh Verfahren zum Herstellen von hochreinem Siliziumkarbid-Pulver
DE102021128398A1 (de) 2021-10-30 2023-05-04 The Yellow SiC Holding GmbH Siliziumkarbidhaltiges Material, Präkursor-Zusammensetzung und deren Herstellungsverfahren

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5380688A (en) * 1993-08-09 1995-01-10 The Dow Chemical Company Method for making submicrometer carbides, submicrometer solid solution carbides, and the material resulting therefrom
KR100766748B1 (ko) * 2006-06-15 2007-10-12 주식회사 에코프로 구형의 탄소/실리카 나노복합체를 지지체로 하는촉매복합체의 제조방법
JP6184732B2 (ja) * 2013-04-26 2017-08-23 株式会社トクヤマ 炭化珪素顆粒及びその製造方法
JP6261384B2 (ja) * 2014-03-03 2018-01-17 太平洋セメント株式会社 炭化珪素の製造方法
CN114149007B (zh) * 2020-09-04 2023-06-30 中国科学院过程工程研究所 一种碳化硅的制备方法
RU206768U1 (ru) * 2021-07-27 2021-09-28 Федеральное государственное бюджетное учреждение науки Федеральный исследовательский центр «Коми научный центр Уральского отделения Российской академии наук» Реактор для получения композитных углерод-карбидокремниевых волокон со структурой "сердцевина-оболочка"

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1084235A (en) * 1976-05-24 1980-08-26 Ryo Enomoto PROCESS AND AN APPARATUS FOR PRODUCING SILICON CARBIDE CONSISTING MAINLY OF .beta.-TYPE CRYSTAL
JPS55113609A (en) * 1979-02-21 1980-09-02 Ibiden Co Ltd Manufacturing apparatus for beta crystallbase silicon carbide
JPS5684310A (en) * 1979-12-14 1981-07-09 Hiroshige Suzuki Manufacture of betaatype silicon carbide
US4529575A (en) * 1982-08-27 1985-07-16 Ibiden Kabushiki Kaisha Process for producing ultrafine silicon carbide powder

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021128398A1 (de) 2021-10-30 2023-05-04 The Yellow SiC Holding GmbH Siliziumkarbidhaltiges Material, Präkursor-Zusammensetzung und deren Herstellungsverfahren
DE102021131748B3 (de) 2021-12-02 2023-02-23 Nippon Kornmeyer Carbon Group Gmbh Verfahren zum Herstellen von hochreinem Siliziumkarbid-Pulver
WO2023099329A1 (de) 2021-12-02 2023-06-08 Nippon Kornmeyer Carbon Group Gmbh Verfahren zum herstellen von hochreinem siliziumkarbid-pulver

Also Published As

Publication number Publication date
JPH08506312A (ja) 1996-07-09
NO912715L (no) 1991-07-10
EP0453516A1 (de) 1991-10-30
KR910700198A (ko) 1991-03-14
ATE122322T1 (de) 1995-05-15
AU5088390A (en) 1990-08-13
BR9007006A (pt) 1991-10-22
CA2045526C (en) 2001-03-27
DE69019339D1 (de) 1995-06-14
NO912715D0 (no) 1991-07-10
AU632795B2 (en) 1993-01-14
JP2841862B2 (ja) 1998-12-24
CA2045526A1 (en) 1990-07-12
WO1990008105A1 (en) 1990-07-26
WO1990008104A1 (en) 1990-07-26
FI913353A0 (fi) 1991-07-10
EP0453516B1 (de) 1995-05-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: OMG AMERICAS, INC., CLEVELAND, OHIO, US

8339 Ceased/non-payment of the annual fee