DE69017642D1 - Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren. - Google Patents

Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren.

Info

Publication number
DE69017642D1
DE69017642D1 DE69017642T DE69017642T DE69017642D1 DE 69017642 D1 DE69017642 D1 DE 69017642D1 DE 69017642 T DE69017642 T DE 69017642T DE 69017642 T DE69017642 T DE 69017642T DE 69017642 D1 DE69017642 D1 DE 69017642D1
Authority
DE
Germany
Prior art keywords
production
single crystals
crystals according
czochralski process
czochralski
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69017642T
Other languages
English (en)
Other versions
DE69017642T2 (de
Inventor
Koji Mizuishi
Michiaki Oda
Yasushi Nakamura
Seiichiro Ohtsuka
Atsushi Shiozawa
Fumio Yamada
Masahiro Mashimo
Tooru Ohara
Eizi Namiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP33327789A external-priority patent/JPH06102591B2/ja
Priority claimed from JP2202873A external-priority patent/JP2540656B2/ja
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69017642D1 publication Critical patent/DE69017642D1/de
Application granted granted Critical
Publication of DE69017642T2 publication Critical patent/DE69017642T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/917—Magnetic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/106—Seed pulling including sealing means details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
DE69017642T 1989-12-22 1990-12-19 Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren. Expired - Fee Related DE69017642T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP33327789A JPH06102591B2 (ja) 1989-12-22 1989-12-22 単結晶引上装置
JP2202873A JP2540656B2 (ja) 1990-07-31 1990-07-31 単結晶の巻上げ装置

Publications (2)

Publication Number Publication Date
DE69017642D1 true DE69017642D1 (de) 1995-04-13
DE69017642T2 DE69017642T2 (de) 1995-07-06

Family

ID=26513615

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69017642T Expired - Fee Related DE69017642T2 (de) 1989-12-22 1990-12-19 Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren.

Country Status (3)

Country Link
US (1) US5106593A (de)
EP (1) EP0437775B1 (de)
DE (1) DE69017642T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5766348A (en) * 1993-08-31 1998-06-16 Leybold Aktiengesellschaft Rotating head for crystal pulling systems for carrying out the czochralski process
DE4329283C2 (de) * 1993-08-31 1997-02-13 Leybold Ag Drehkopf für Kristallziehanlagen für die Durchführung des Czochralski-Prozesses
JP3606623B2 (ja) * 1995-01-10 2005-01-05 コマツ電子金属株式会社 半導体単結晶製造装置
US5582642A (en) * 1995-06-20 1996-12-10 Memc Electronic Materials, Inc. Apparatus and method for adjusting the position of a pull wire of a crystal pulling machine
JP3478021B2 (ja) * 1996-09-18 2003-12-10 信越半導体株式会社 結晶保持装置
US6059876A (en) * 1997-02-06 2000-05-09 William H. Robinson Method and apparatus for growing crystals
US5935328A (en) * 1997-11-25 1999-08-10 Memc Electronic Materials, Inc. Apparatus for use in crystal pulling
US5986748A (en) * 1998-08-21 1999-11-16 Seh America Inc Dual beam alignment device and method
WO2000022201A1 (en) * 1998-10-14 2000-04-20 Memc Electronic Materials, Inc. Method and apparatus for accurately pulling a crystal
DE19932026B4 (de) * 1999-07-09 2008-09-11 Crystal Growing Systems Gmbh Einrichtung zum Züchten von Kristallen mittels des Czochralski-Verfahrens, bei dem die Kristalle während des Züchtungsprozesses sowohl aus der Schmelze gezogen als auch um eine Achse gedreht werden
CN1396965A (zh) 2000-02-01 2003-02-12 Memc电子材料有限公司 用于控制硅晶体生长使生长速率和直径的偏差减至最小的方法
DE10007265B4 (de) * 2000-02-17 2009-10-22 Crystal Growing Systems Gmbh Kristallziehanlage
GB0307039D0 (en) * 2003-03-26 2003-04-30 Rolls Royce Plc A compressor blade
JP4362760B2 (ja) * 2003-10-14 2009-11-11 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体単結晶製造装置
DE102004011901A1 (de) 2004-03-11 2005-12-01 Crystal Growing Systems Gmbh Seildrehkopf für eine Kristallziehanlage
US8347740B2 (en) * 2009-03-31 2013-01-08 Memc Electronic Materials, Inc. Systems for weighing a pulled object having a changing weight
KR101069840B1 (ko) * 2009-04-06 2011-10-04 삼성중공업 주식회사 윈치 및 이를 포함하는 자율이동장치
US11506288B2 (en) * 2017-07-18 2022-11-22 Eagle Industry Co., Ltd. Shaft seal device
US11255024B2 (en) * 2019-06-18 2022-02-22 Linton Crystal Technologies Corp. Seed lifting and rotating system for use in crystal growth
CN111230163B (zh) * 2020-04-14 2020-09-15 江苏星晨高速电机有限公司 一种自动卡紧的两端车削夹具装置
CN112410875A (zh) * 2020-11-18 2021-02-26 阳光能源（青海）有限公司 一种单晶硅制造用单晶炉及其安装固定方法
US11891721B2 (en) * 2020-12-09 2024-02-06 Linton Kayex Technology Co., Ltd Spool-balanced seed lift

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3607112A (en) * 1969-03-24 1971-09-21 Tyco Laboratories Inc Endless belt seed crystal gripping and pulling means
US4118197A (en) * 1977-01-24 1978-10-03 Mobil Tyco Solar Energy Corp. Cartridge and furnace for crystal growth
US4371502A (en) * 1980-02-08 1983-02-01 Ferrofluidics Corporation Crystal growing furnace pulling head
NL8102566A (nl) * 1980-06-14 1982-01-04 Leybold Heraeus Gmbh & Co Kg Inrichting voor het door middel van een opwikkelbaar trekorgaan uit een kroes trekken van een enkel kristal.
US4352785A (en) * 1982-01-04 1982-10-05 Western Electric Co., Inc. Crystal grower with torque supportive collapsible pulling mechanism
JPS6447914A (en) * 1987-08-18 1989-02-22 Shinetsu Handotai Kk Apparatus for measuring crystal-rod lifting load
DE3733562A1 (de) * 1987-10-03 1989-04-20 Leybold Ag Vorrichtung zum ziehen eines einkristalls aus einem tiegel mittels eines aufwickelbaren ziehorgans
JPH0296389A (ja) * 1988-10-03 1990-04-09 Furukawa Electric Co Ltd:The 両面プリント回路基板

Also Published As

Publication number Publication date
EP0437775B1 (de) 1995-03-08
EP0437775A1 (de) 1991-07-24
US5106593A (en) 1992-04-21
DE69017642T2 (de) 1995-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee