DE69012704D1 - Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung. - Google Patents
Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung.Info
- Publication number
- DE69012704D1 DE69012704D1 DE69012704T DE69012704T DE69012704D1 DE 69012704 D1 DE69012704 D1 DE 69012704D1 DE 69012704 T DE69012704 T DE 69012704T DE 69012704 T DE69012704 T DE 69012704T DE 69012704 D1 DE69012704 D1 DE 69012704D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- semiconductor waveguide
- tapered semiconductor
- tapered
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
- H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
- H01S5/1014—Tapered waveguide, e.g. spotsize converter
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/389,087 US4932032A (en) | 1989-08-03 | 1989-08-03 | Tapered semiconductor waveguides |
US07/389,074 US4944838A (en) | 1989-08-03 | 1989-08-03 | Method of making tapered semiconductor waveguides |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69012704D1 true DE69012704D1 (de) | 1994-10-27 |
DE69012704T2 DE69012704T2 (de) | 1995-01-12 |
Family
ID=27012543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69012704T Expired - Lifetime DE69012704T2 (de) | 1989-08-03 | 1990-07-25 | Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0411816B1 (de) |
JP (1) | JP2634687B2 (de) |
KR (1) | KR930010131B1 (de) |
CA (1) | CA2020246C (de) |
DE (1) | DE69012704T2 (de) |
DK (1) | DK0411816T3 (de) |
HK (1) | HK193995A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19538232A1 (de) * | 1995-10-13 | 1997-04-17 | Siemens Ag | Optoelektronisches Bauelement mit kodirektionaler Modenkopplung |
DE19606537A1 (de) * | 1996-02-22 | 1997-08-28 | Bosch Gmbh Robert | Verfahren zur Herstellung einer Masterstruktur |
KR100886069B1 (ko) * | 2004-08-23 | 2009-02-26 | 몰렉스 인코포레이티드 | 광섬유와 평면 집적 도파관 간의 광 결합 효율 증대를 위한시스템 및 테이퍼형 도파관 및 그 제조 방법 |
JP2011164376A (ja) * | 2010-02-10 | 2011-08-25 | Mitsubishi Electric Corp | スポットサイズ変換導波路 |
WO2016195701A1 (en) * | 2015-06-05 | 2016-12-08 | Iulian Basarab Petrescu-Prahova | Emitter semiconductor laser type of device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3978426A (en) * | 1975-03-11 | 1976-08-31 | Bell Telephone Laboratories, Incorporated | Heterostructure devices including tapered optical couplers |
US4546480A (en) * | 1983-08-19 | 1985-10-08 | Xerox Corporation | Injection lasers with quantum size effect transparent waveguiding |
-
1990
- 1990-06-29 CA CA002020246A patent/CA2020246C/en not_active Expired - Fee Related
- 1990-07-25 DE DE69012704T patent/DE69012704T2/de not_active Expired - Lifetime
- 1990-07-25 DK DK90308134.7T patent/DK0411816T3/da active
- 1990-07-25 EP EP90308134A patent/EP0411816B1/de not_active Expired - Lifetime
- 1990-07-31 KR KR1019900011690A patent/KR930010131B1/ko not_active IP Right Cessation
- 1990-08-02 JP JP2204060A patent/JP2634687B2/ja not_active Expired - Lifetime
-
1995
- 1995-12-28 HK HK193995A patent/HK193995A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0411816A2 (de) | 1991-02-06 |
EP0411816B1 (de) | 1994-09-21 |
DK0411816T3 (da) | 1994-10-17 |
HK193995A (en) | 1996-01-05 |
KR930010131B1 (ko) | 1993-10-14 |
DE69012704T2 (de) | 1995-01-12 |
JPH0369904A (ja) | 1991-03-26 |
CA2020246C (en) | 1994-02-01 |
CA2020246A1 (en) | 1991-02-04 |
JP2634687B2 (ja) | 1997-07-30 |
KR910005501A (ko) | 1991-03-30 |
EP0411816A3 (en) | 1991-11-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3889364D1 (de) | Optischer Wellenleiter und Verfahren zu seiner Herstellung. | |
DE59001092D1 (de) | Polypropylenwachs und verfahren zu seiner herstellung. | |
DE69013416D1 (de) | Wundverband und Verfahren zu seiner Herstellung. | |
DE69009934D1 (de) | Keramischer Filter und Verfahren zu seiner Herstellung. | |
DE3888885D1 (de) | Halbleiteranordnung und verfahren zur herstellung. | |
DE3784207D1 (de) | Kunststoff-objekttraeger fuer mikroskope und verfahren zu seiner herstellung. | |
DE69008327D1 (de) | Kieselsäureteilchen und Verfahren zu ihrer Herstellung. | |
DE3751243D1 (de) | Opto-elektronisches Bauelement und Verfahren zu seiner Herstellung. | |
DE3853602D1 (de) | Modifiziertes Polysilazan und Verfahren zu seiner Herstellung. | |
DE69005032D1 (de) | Optohalbleitervorrichtung und Verfahren zu ihrer Herstellung. | |
DE3852426D1 (de) | Gemischter Supraleiter und Verfahren zu seiner Herstellung. | |
DE3579367D1 (de) | Halbleiterphotodetektor und verfahren zu seiner herstellung. | |
DE69031415D1 (de) | Halbleiterlaser-Elemente und Verfahren zu ihrer Herstellung | |
DE69032447D1 (de) | Thermistor und Verfahren zu seiner Herstellung | |
DE69017348D1 (de) | Thyristor und Verfahren zu dessen Herstellung. | |
DE69022016D1 (de) | Fluoriniertes copolymer und verfahren zu seiner herstellung. | |
DE3852150D1 (de) | Polysilazan und Verfahren zu dessen Herstellung. | |
DE3884069D1 (de) | Polysilazan und Verfahren zu dessen Herstellung. | |
DE68914321D1 (de) | Lichtabschwächer und Verfahren zu seiner Herstellung. | |
DE69012520D1 (de) | Halbleiterheterostruktur und Verfahren zu ihrer Herstellung. | |
DE69011162D1 (de) | Siloxanharze und Verfahren zu ihrer Herstellung. | |
DE69113403D1 (de) | Optischer Koppler und Verfahren zu seiner Herstellung. | |
DE69005447D1 (de) | Babywindel und verfahren zur herstellung. | |
DE69011809D1 (de) | Halbleiteranordnung und Verfahren zu ihrer Herstellung. | |
DE59007537D1 (de) | Kondensator und Verfahren zu seiner Herstellung. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN |
|
8364 | No opposition during term of opposition |