DE69012704T2 - Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung. - Google Patents

Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung.

Info

Publication number
DE69012704T2
DE69012704T2 DE69012704T DE69012704T DE69012704T2 DE 69012704 T2 DE69012704 T2 DE 69012704T2 DE 69012704 T DE69012704 T DE 69012704T DE 69012704 T DE69012704 T DE 69012704T DE 69012704 T2 DE69012704 T2 DE 69012704T2
Authority
DE
Germany
Prior art keywords
manufacture
semiconductor waveguide
tapered semiconductor
tapered
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69012704T
Other languages
English (en)
Other versions
DE69012704D1 (de
Inventor
Thomas L Koch
Uziel Koren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/389,074 external-priority patent/US4944838A/en
Priority claimed from US07/389,087 external-priority patent/US4932032A/en
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Application granted granted Critical
Publication of DE69012704D1 publication Critical patent/DE69012704D1/de
Publication of DE69012704T2 publication Critical patent/DE69012704T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
    • H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H01L21/30612—Etching of AIIIBV compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
    • H01S5/1014—Tapered waveguide, e.g. spotsize converter

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Optical Integrated Circuits (AREA)
DE69012704T 1989-08-03 1990-07-25 Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung. Expired - Lifetime DE69012704T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/389,074 US4944838A (en) 1989-08-03 1989-08-03 Method of making tapered semiconductor waveguides
US07/389,087 US4932032A (en) 1989-08-03 1989-08-03 Tapered semiconductor waveguides

Publications (2)

Publication Number Publication Date
DE69012704D1 DE69012704D1 (de) 1994-10-27
DE69012704T2 true DE69012704T2 (de) 1995-01-12

Family

ID=27012543

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69012704T Expired - Lifetime DE69012704T2 (de) 1989-08-03 1990-07-25 Spitz zulaufender Halbleiterwellenleiter und Verfahren zu seiner Herstellung.

Country Status (7)

Country Link
EP (1) EP0411816B1 (de)
JP (1) JP2634687B2 (de)
KR (1) KR930010131B1 (de)
CA (1) CA2020246C (de)
DE (1) DE69012704T2 (de)
DK (1) DK0411816T3 (de)
HK (1) HK193995A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19538232A1 (de) * 1995-10-13 1997-04-17 Siemens Ag Optoelektronisches Bauelement mit kodirektionaler Modenkopplung
DE19606537A1 (de) * 1996-02-22 1997-08-28 Bosch Gmbh Robert Verfahren zur Herstellung einer Masterstruktur
CN1922519B (zh) * 2004-08-23 2010-12-01 莫莱克斯公司 用于改善光纤和集成平面波导管之间的光耦合效率的系统和锥形波导管及其制造方法
JP2011164376A (ja) * 2010-02-10 2011-08-25 Mitsubishi Electric Corp スポットサイズ変換導波路
WO2016195701A1 (en) * 2015-06-05 2016-12-08 Iulian Basarab Petrescu-Prahova Emitter semiconductor laser type of device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978426A (en) * 1975-03-11 1976-08-31 Bell Telephone Laboratories, Incorporated Heterostructure devices including tapered optical couplers
US4546480A (en) * 1983-08-19 1985-10-08 Xerox Corporation Injection lasers with quantum size effect transparent waveguiding

Also Published As

Publication number Publication date
CA2020246C (en) 1994-02-01
DK0411816T3 (da) 1994-10-17
CA2020246A1 (en) 1991-02-04
KR930010131B1 (ko) 1993-10-14
EP0411816B1 (de) 1994-09-21
JPH0369904A (ja) 1991-03-26
EP0411816A3 (en) 1991-11-06
KR910005501A (ko) 1991-03-30
EP0411816A2 (de) 1991-02-06
HK193995A (en) 1996-01-05
JP2634687B2 (ja) 1997-07-30
DE69012704D1 (de) 1994-10-27

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN

8364 No opposition during term of opposition