DE69010873T2 - Von externen Störungen weniger beeinflusste Verschiebungssensorschaltung. - Google Patents

Von externen Störungen weniger beeinflusste Verschiebungssensorschaltung.

Info

Publication number
DE69010873T2
DE69010873T2 DE69010873T DE69010873T DE69010873T2 DE 69010873 T2 DE69010873 T2 DE 69010873T2 DE 69010873 T DE69010873 T DE 69010873T DE 69010873 T DE69010873 T DE 69010873T DE 69010873 T2 DE69010873 T2 DE 69010873T2
Authority
DE
Germany
Prior art keywords
displacement sensor
sensor circuit
less affected
external interference
circuit less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69010873T
Other languages
English (en)
Other versions
DE69010873D1 (de
Inventor
Yuji Shirao
Hiroyuki Chino
Toshiharu Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69010873D1 publication Critical patent/DE69010873D1/de
Publication of DE69010873T2 publication Critical patent/DE69010873T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69010873T 1989-12-29 1990-12-21 Von externen Störungen weniger beeinflusste Verschiebungssensorschaltung. Expired - Fee Related DE69010873T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1342771A JPH0797009B2 (ja) 1989-12-29 1989-12-29 インダクタンス形変位センサ

Publications (2)

Publication Number Publication Date
DE69010873D1 DE69010873D1 (de) 1994-08-25
DE69010873T2 true DE69010873T2 (de) 1995-03-09

Family

ID=18356372

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69010873T Expired - Fee Related DE69010873T2 (de) 1989-12-29 1990-12-21 Von externen Störungen weniger beeinflusste Verschiebungssensorschaltung.

Country Status (5)

Country Link
US (1) US5107210A (de)
EP (1) EP0435233B1 (de)
JP (1) JPH0797009B2 (de)
KR (1) KR0165892B1 (de)
DE (1) DE69010873T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013113073A1 (de) * 2013-11-26 2015-05-28 Addi-Data Gmbh Induktiver Messtaster und Verfahren zum Betreiben eines induktiven Messtasters

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5367255A (en) * 1991-12-02 1994-11-22 Mts System Corp Magnetostrictive position transducer with band passed mode converter output for rejecting mechanical noise
DE4243624A1 (en) * 1991-12-27 1993-07-01 Ntn Toyo Bearing Co Ltd Revolution rate detector, esp. for vehicle bearings, - contains pulse transducer ring with sensor contg. coil, high frequency voltage source and detector
US5359238A (en) * 1992-08-04 1994-10-25 Ford Motor Company Analog to digital interface circuit with internal resistance compensation and integrity verification
JP2739539B2 (ja) * 1993-02-05 1998-04-15 セイコー精機株式会社 軸の撓み量検出装置
US5329416A (en) * 1993-07-06 1994-07-12 Alliedsignal Inc. Active broadband magnetic flux rate feedback sensing arrangement
US5394290A (en) * 1993-07-06 1995-02-28 Alliedsignal Inc. Active tuned magnetic flux rate feedback sensing arrangement
DE19511436A1 (de) * 1995-03-29 1996-10-02 Oelsch Fernsteuergeraete Steuersignalgeber zur Erzeugung mehrerer Steuersignale mittels eines einzigen Steuerhebels
JP3701115B2 (ja) * 1998-02-12 2005-09-28 株式会社荏原製作所 磁気軸受制御装置
JP3901897B2 (ja) 1999-08-25 2007-04-04 株式会社荏原製作所 磁気軸受装置
JP3888427B2 (ja) * 2001-10-30 2007-03-07 学校法人日本大学 変位センサ
KR20040035975A (ko) * 2002-10-14 2004-04-30 주식회사 한국이미지 물체감지용 써치코일
JP4690110B2 (ja) 2004-05-24 2011-06-01 株式会社ミツトヨ 差動トランスの信号処理装置及び信号処理方法
US7256575B2 (en) * 2004-06-01 2007-08-14 Tektronix, Inc. Wide bandwidth attenuator input circuit for a measurement probe
US7784565B2 (en) * 2008-09-17 2010-08-31 National Oilwell Varco, L.P. Top drive systems with main shaft deflecting sensing
JP6770300B2 (ja) * 2015-09-29 2020-10-14 株式会社ミツトヨ 計測機器用の信号処理回路
CN106091909A (zh) * 2016-08-02 2016-11-09 无锡研奥电子科技有限公司 一种电感式位移传感器电路
CN113167564B (zh) * 2018-12-11 2023-06-27 日商乐华股份有限公司 静电电容传感器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1107953B (de) * 1958-02-19 1961-05-31 Ferranti Ltd Electrical & Gene Elektromagnetischer Wandler
US3488581A (en) * 1967-10-03 1970-01-06 Reliance Electric & Eng Co Surface interruption calibrated non-contact transducer system
US3715659A (en) * 1970-03-25 1973-02-06 Reliance Electric Co Inductive non-contact vibration analyzer which is independent of standoff distance
US4321602A (en) * 1980-07-07 1982-03-23 Rca Corporation Frequency-tracking filter, as for use in FM-CW radar
JPS57186102A (en) * 1981-05-11 1982-11-16 Mitsubishi Electric Corp Detector for rotational angle
JPS58124955A (ja) * 1982-01-22 1983-07-25 Aisin Seiki Co Ltd 回転信号発生装置
US4678992A (en) * 1983-07-12 1987-07-07 Hi-Tech Systems, Corp. Electronic metal detector
US4654589A (en) * 1983-09-30 1987-03-31 The Boeing Company Apparatus and method for identifying a reference location for a work piece
JPS62173005A (ja) * 1986-01-24 1987-07-29 Kobe Steel Ltd 錫を含有するアルミニウム合金板材の製造方法
JPS63171318A (ja) * 1987-01-09 1988-07-15 Fuji Electric Co Ltd 回転検出装置
IT209873Z2 (it) * 1987-01-16 1988-11-04 Itt Ind Riunite Srl Dispositivo circuitale per il rilevamento dell'assetto di veicoli.
FR2630541B1 (fr) * 1988-04-22 1993-01-22 Mecanique Magnetique Sa Capteur inductif pour palier magnetique radial

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013113073A1 (de) * 2013-11-26 2015-05-28 Addi-Data Gmbh Induktiver Messtaster und Verfahren zum Betreiben eines induktiven Messtasters
US10024693B2 (en) 2013-11-26 2018-07-17 Addi-Data Gmbh Inductive measuring probe and method for operating an inductive measuring probe

Also Published As

Publication number Publication date
KR910012669A (ko) 1991-08-08
JPH03202702A (ja) 1991-09-04
US5107210A (en) 1992-04-21
DE69010873D1 (de) 1994-08-25
JPH0797009B2 (ja) 1995-10-18
EP0435233A1 (de) 1991-07-03
KR0165892B1 (ko) 1999-03-30
EP0435233B1 (de) 1994-07-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee