DE68912677D1 - Elektronischer Sensor. - Google Patents

Elektronischer Sensor.

Info

Publication number
DE68912677D1
DE68912677D1 DE89307862T DE68912677T DE68912677D1 DE 68912677 D1 DE68912677 D1 DE 68912677D1 DE 89307862 T DE89307862 T DE 89307862T DE 68912677 T DE68912677 T DE 68912677T DE 68912677 D1 DE68912677 D1 DE 68912677D1
Authority
DE
Germany
Prior art keywords
electronic sensor
electronic
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89307862T
Other languages
English (en)
Other versions
DE68912677T2 (de
Inventor
Barbara Lynn Jones
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Beers Industrial Diamond Division Pty Ltd
Original Assignee
De Beers Industrial Diamond Division Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Beers Industrial Diamond Division Pty Ltd filed Critical De Beers Industrial Diamond Division Pty Ltd
Application granted granted Critical
Publication of DE68912677D1 publication Critical patent/DE68912677D1/de
Publication of DE68912677T2 publication Critical patent/DE68912677T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/879—Material
DE68912677T 1988-08-03 1989-08-02 Elektronischer Sensor. Expired - Fee Related DE68912677T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888818445A GB8818445D0 (en) 1988-08-03 1988-08-03 Stm probe

Publications (2)

Publication Number Publication Date
DE68912677D1 true DE68912677D1 (de) 1994-03-10
DE68912677T2 DE68912677T2 (de) 1994-05-19

Family

ID=10641548

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68912677T Expired - Fee Related DE68912677T2 (de) 1988-08-03 1989-08-02 Elektronischer Sensor.

Country Status (6)

Country Link
US (1) US4943720A (de)
EP (1) EP0354020B1 (de)
JP (1) JPH02186203A (de)
DE (1) DE68912677T2 (de)
GB (1) GB8818445D0 (de)
ZA (1) ZA895860B (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2814256B2 (ja) * 1989-01-31 1998-10-22 セイコーインスツルメンツ株式会社 電気化学測定トンネル電流同時測定装置およびトンネル探針
EP0437275B1 (de) * 1990-01-11 1997-08-27 Canon Kabushiki Kaisha Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet
GB9009675D0 (en) * 1990-04-30 1990-06-20 De Beers Ind Diamond Probes
US5134364A (en) * 1990-06-19 1992-07-28 Prime Computer, Inc. Elastomeric test probe
US5585734A (en) * 1990-07-09 1996-12-17 Interuniversitair Micro Elektronica Centrum Vzw Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope
JP2501945B2 (ja) * 1990-08-28 1996-05-29 三菱電機株式会社 原子間力顕微鏡のカンチレバ―及びその製造方法
US5164595A (en) * 1990-09-10 1992-11-17 North Carolina State University Scanning tunneling microscope tips
US5171992A (en) * 1990-10-31 1992-12-15 International Business Machines Corporation Nanometer scale probe for an atomic force microscope, and method for making same
NL9101169A (nl) * 1991-07-05 1993-02-01 Drukker Int Bv Elektronische tastnaald en werkwijze voor het vervaardigen ervan.
US5283501A (en) * 1991-07-18 1994-02-01 Motorola, Inc. Electron device employing a low/negative electron affinity electron source
JP2917674B2 (ja) * 1992-06-03 1999-07-12 松下電器産業株式会社 走査トンネル顕微鏡用探針およびその製造方法
US5619092A (en) * 1993-02-01 1997-04-08 Motorola Enhanced electron emitter
US5383354A (en) * 1993-12-27 1995-01-24 Motorola, Inc. Process for measuring surface topography using atomic force microscopy
NL9401390A (nl) * 1994-08-29 1996-04-01 K U Leuven Research & Dev Vzw Werkwijze en inrichting voor het meten van de ladingsdragerverdeling in een halfgeleiderelement.
US5723981A (en) * 1994-08-29 1998-03-03 Imec Vzw Method for measuring the electrical potential in a semiconductor element
US6091248A (en) * 1994-08-29 2000-07-18 Imec Vzw Method for measuring the electrical potential in a semiconductor element
US5763879A (en) * 1996-09-16 1998-06-09 Pacific Western Systems Diamond probe tip
DE19718478C2 (de) * 1997-04-30 2003-05-28 Allice Mestechnik Gmbh Hochimpedanzsonde mit extrem kleiner Eingangskapazität
US5936243A (en) * 1997-06-09 1999-08-10 Ian Hardcastle Conductive micro-probe and memory device
DE19752202C1 (de) * 1997-11-25 1999-04-15 Hans Dr Hofsaes Herstellungsverfahren für eine mikromechanische Vorrichtung
US6020747A (en) * 1998-01-26 2000-02-01 Bahns; John T. Electrical contact probe
DE19825404C2 (de) * 1998-06-06 2001-09-13 Bernd Irmer Rastersondenmikroskop mit Sondeneinrichtung, Sondeneinrichtung sowie Verfahren zum Herstellen einer Sondeneinrichtung
US20030078499A1 (en) * 1999-08-12 2003-04-24 Eppstein Jonathan A. Microporation of tissue for delivery of bioactive agents
US6974452B1 (en) 2000-01-12 2005-12-13 Clinicon Corporation Cutting and cauterizing surgical tools
DE10003836C2 (de) * 2000-01-28 2002-04-25 Fraunhofer Ges Forschung Indentor und Verwendung desselben
DE10201491C1 (de) * 2002-01-16 2003-08-28 Gfd Ges Fuer Diamantprodukte M Meßspitzensystem und Verfahren zu dessen Herstellung
JP2008128650A (ja) * 2006-11-16 2008-06-05 Kyushu Institute Of Technology プローブカード用接触子及びその製造方法
US8701211B2 (en) * 2009-08-26 2014-04-15 Advanced Diamond Technologies, Inc. Method to reduce wedge effects in molded trigonal tips
US9880198B2 (en) * 2013-02-11 2018-01-30 Lenovo Enterprise Solutions (Singapore) Pte. Ltd. High bandwidth signal probe tip
CN105092324B (zh) * 2014-05-07 2018-03-20 中芯国际集成电路制造(上海)有限公司 一种FinFET鳍片掺杂浓度分布的测量方法和测量样品制备方法
WO2018022154A2 (en) * 2016-04-25 2018-02-01 Stc. Unm Rugged, single crystal wide-band-gap-material-scanning-tunneling microscopy/lithography tips

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (ja) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk 炭素膜及び／又は炭素粒子の製造方法
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
JPS62167294A (ja) * 1986-01-21 1987-07-23 Showa Denko Kk 気相法によるダイヤモンド薄膜の製造法

Also Published As

Publication number Publication date
GB8818445D0 (en) 1988-09-07
ZA895860B (en) 1990-05-30
JPH02186203A (ja) 1990-07-20
DE68912677T2 (de) 1994-05-19
EP0354020A2 (de) 1990-02-07
EP0354020A3 (en) 1990-05-30
US4943720A (en) 1990-07-24
EP0354020B1 (de) 1994-01-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee