DE68929206D1 - Lithographisches Verfahren zur Herstellung einer Vorrichtung - Google Patents
Lithographisches Verfahren zur Herstellung einer VorrichtungInfo
- Publication number
- DE68929206D1 DE68929206D1 DE68929206T DE68929206T DE68929206D1 DE 68929206 D1 DE68929206 D1 DE 68929206D1 DE 68929206 T DE68929206 T DE 68929206T DE 68929206 T DE68929206 T DE 68929206T DE 68929206 D1 DE68929206 D1 DE 68929206D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- lithographic process
- lithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16036888A | 1988-02-25 | 1988-02-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68929206D1 true DE68929206D1 (de) | 2000-06-15 |
DE68929206T2 DE68929206T2 (de) | 2000-09-28 |
Family
ID=22576593
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1989622922 Expired - Fee Related DE68922922T2 (de) | 1988-02-25 | 1989-02-17 | Strahlungsempfindliche Materialien und damit hergestellte Artikel. |
DE1989629206 Expired - Fee Related DE68929206T2 (de) | 1988-02-25 | 1989-02-17 | Lithographisches Verfahren zur Herstellung einer Vorrichtung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1989622922 Expired - Fee Related DE68922922T2 (de) | 1988-02-25 | 1989-02-17 | Strahlungsempfindliche Materialien und damit hergestellte Artikel. |
Country Status (4)
Country | Link |
---|---|
EP (2) | EP0330386B1 (de) |
JP (1) | JP2540199B2 (de) |
CA (1) | CA1334351C (de) |
DE (2) | DE68922922T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69125634T2 (de) * | 1990-01-30 | 1998-01-02 | Wako Pure Chem Ind Ltd | Chemisch verstärktes Photolack-Material |
US5066566A (en) * | 1990-07-31 | 1991-11-19 | At&T Bell Laboratories | Resist materials |
EP0476840B1 (de) * | 1990-08-30 | 1997-06-18 | AT&T Corp. | Verfahren zur Herstellung einer Vorrichtung |
DE4112973A1 (de) * | 1991-04-20 | 1992-10-22 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und damit hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
DE4112967A1 (de) * | 1991-04-20 | 1992-10-22 | Hoechst Ag | Substituierte 1-sulfonyloxy-2-pyridone, verfahren zu ihrer herstellung und ihre verwendung |
JPH04336378A (ja) * | 1991-05-14 | 1992-11-24 | Nec Corp | 情報処理装置 |
JP2662141B2 (ja) * | 1991-05-20 | 1997-10-08 | エイ・ティ・アンド・ティ・コーポレーション | デバイスの製造方法 |
JPH04359906A (ja) * | 1991-06-07 | 1992-12-14 | Shin Etsu Chem Co Ltd | ポリ(パラ−t−ブトキシカルボニルオキシスチレン)及びその製造方法 |
EP0524759A1 (de) * | 1991-07-23 | 1993-01-27 | AT&T Corp. | Verfahren zur Herstellung einer Vorrichtung |
DE4136213A1 (de) * | 1991-11-02 | 1993-05-06 | Basf Ag, 6700 Ludwigshafen, De | Positiv arbeitendes strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
TW211080B (de) * | 1991-12-12 | 1993-08-11 | American Telephone & Telegraph | |
KR100341563B1 (ko) * | 1992-03-23 | 2002-10-25 | 제이에스알 가부시끼가이샤 | 레지스트도포조성물 |
DE4302681A1 (de) * | 1993-02-01 | 1994-08-04 | Hoechst Ag | Sulfonsäureester, damit hergestellte strahlungsempfindliche Gemische und deren Verwendung |
US6159665A (en) * | 1993-06-17 | 2000-12-12 | Lucent Technologies Inc. | Processes using photosensitive materials including a nitro benzyl ester photoacid generator |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3884696A (en) * | 1974-03-05 | 1975-05-20 | Bell Telephone Labor Inc | Positive photoresist comprising polysulfones formed by reacting vinyl aromatic hydrocarbons with sulfur dioxide |
JPS54151824A (en) * | 1978-05-22 | 1979-11-29 | Tokyo Ouka Kougiyou Kk | Photosensitive composition |
US4551416A (en) * | 1981-05-22 | 1985-11-05 | At&T Bell Laboratories | Process for preparing semiconductors using photosensitive bodies |
US4400461A (en) * | 1981-05-22 | 1983-08-23 | Bell Telephone Laboratories, Incorporated | Process of making semiconductor devices using photosensitive bodies |
US4504372A (en) * | 1982-03-12 | 1985-03-12 | Ciba-Geigy Corporation | Acid-curable composition containing a masked curing catalyst, and a process for its preparation |
US4491628A (en) * | 1982-08-23 | 1985-01-01 | International Business Machines Corporation | Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone |
JPS59180541A (ja) * | 1983-03-31 | 1984-10-13 | Fujitsu Ltd | ポジ型レジスト組成物 |
JPS60189741A (ja) * | 1984-03-12 | 1985-09-27 | Toshiba Corp | ポジ型レジスト材料 |
JPS613141A (ja) * | 1984-06-15 | 1986-01-09 | Toshiba Corp | 感光性組成物 |
JPS63241542A (ja) * | 1987-03-28 | 1988-10-06 | Nippon Telegr & Teleph Corp <Ntt> | レジスト組成物 |
JP2623309B2 (ja) * | 1988-02-22 | 1997-06-25 | ユーシービー ソシエテ アノニム | レジストパターンを得る方法 |
-
1989
- 1989-01-19 JP JP1008772A patent/JP2540199B2/ja not_active Expired - Lifetime
- 1989-02-17 DE DE1989622922 patent/DE68922922T2/de not_active Expired - Fee Related
- 1989-02-17 DE DE1989629206 patent/DE68929206T2/de not_active Expired - Fee Related
- 1989-02-17 EP EP19890301556 patent/EP0330386B1/de not_active Expired - Lifetime
- 1989-02-17 EP EP93118622A patent/EP0585980B1/de not_active Expired - Lifetime
- 1989-02-22 CA CA 591764 patent/CA1334351C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0585980A3 (en) | 1997-04-23 |
DE68922922T2 (de) | 1996-05-02 |
JP2540199B2 (ja) | 1996-10-02 |
DE68922922D1 (de) | 1995-07-13 |
EP0330386A2 (de) | 1989-08-30 |
EP0330386B1 (de) | 1995-06-07 |
EP0585980B1 (de) | 2000-05-10 |
EP0585980A2 (de) | 1994-03-09 |
EP0330386A3 (en) | 1990-10-31 |
DE68929206T2 (de) | 2000-09-28 |
JPH026958A (ja) | 1990-01-11 |
CA1334351C (en) | 1995-02-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |