DE68909084D1 - Hochempfindlicher Resist für das mittlere und tiefe UV. - Google Patents

Hochempfindlicher Resist für das mittlere und tiefe UV.

Info

Publication number
DE68909084D1
DE68909084D1 DE89302865T DE68909084T DE68909084D1 DE 68909084 D1 DE68909084 D1 DE 68909084D1 DE 89302865 T DE89302865 T DE 89302865T DE 68909084 T DE68909084 T DE 68909084T DE 68909084 D1 DE68909084 D1 DE 68909084D1
Authority
DE
Germany
Prior art keywords
deep
medium
highly sensitive
sensitive resist
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89302865T
Other languages
English (en)
Other versions
DE68909084T2 (de
Inventor
Richard Michael Lazarus
Edward Joseph Reardon
Sunit Suresh Dixit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Performance Materials Corp
Original Assignee
Morton International LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Morton International LLC filed Critical Morton International LLC
Application granted granted Critical
Publication of DE68909084D1 publication Critical patent/DE68909084D1/de
Publication of DE68909084T2 publication Critical patent/DE68909084T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
DE89302865T 1988-03-31 1989-03-22 Hochempfindlicher Resist für das mittlere und tiefe UV. Expired - Fee Related DE68909084T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17570688A 1988-03-31 1988-03-31
US22908888A 1988-08-05 1988-08-05

Publications (2)

Publication Number Publication Date
DE68909084D1 true DE68909084D1 (de) 1993-10-21
DE68909084T2 DE68909084T2 (de) 1994-01-13

Family

ID=26871494

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89302865T Expired - Fee Related DE68909084T2 (de) 1988-03-31 1989-03-22 Hochempfindlicher Resist für das mittlere und tiefe UV.

Country Status (8)

Country Link
EP (1) EP0336605B1 (de)
JP (1) JPH0778627B2 (de)
KR (1) KR940001550B1 (de)
AU (1) AU3127689A (de)
DE (1) DE68909084T2 (de)
DK (1) DK155289A (de)
IL (1) IL89632A (de)
NO (1) NO891062L (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02110462A (ja) * 1988-06-21 1990-04-23 Mitsubishi Kasei Corp ポジ型フォトレジスト
JPH04328747A (ja) * 1991-03-27 1992-11-17 Internatl Business Mach Corp <Ibm> 均一にコートされたフォトレジスト組成物
KR100341563B1 (ko) * 1992-03-23 2002-10-25 제이에스알 가부시끼가이샤 레지스트도포조성물
DE4209343A1 (de) * 1992-03-23 1993-09-30 Hoechst Ag 1,2-Naphthochinon-2-diazid-sulfonsäureester, damit hergestelltes strahlungsempfindliches Gemisch und strahlungsempfindliches Aufzeichnungsmaterial
US5612164A (en) * 1995-02-09 1997-03-18 Hoechst Celanese Corporation Positive photoresist composition comprising a mixed ester of trishydroxyphenyl ethane and a mixed ester of trihydroxybenzophenone
KR100363273B1 (ko) * 2000-07-29 2002-12-05 주식회사 동진쎄미켐 액정표시장치 회로용 포토레지스트 조성물
KR101324645B1 (ko) * 2006-05-08 2013-11-01 주식회사 동진쎄미켐 포토레지스트 조성물
JP2017088675A (ja) * 2015-11-05 2017-05-25 Dic株式会社 ノボラック型フェノール性水酸基含有樹脂及びレジスト材料

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3274354D1 (en) * 1981-06-22 1987-01-08 Hunt Chem Corp Philip A Novolak resin and a positive photoresist composition containing the same
JPS5817112A (ja) * 1981-06-22 1983-02-01 フイリツプ・エイ・ハント・ケミカル・コ−ポレイシヨン ポジ型ノボラツクホトレジスト組成物及びその調製物
DE3220816A1 (de) * 1982-06-03 1983-12-08 Merck Patent Gmbh, 6100 Darmstadt Lichtempfindliche komponenten fuer positiv arbeitende fotoresistmaterialien
JPH0658529B2 (ja) * 1983-08-17 1994-08-03 三菱化成株式会社 ポジ型クレゾ−ルノボラツクフオトレジスト組成物
JPS61141441A (ja) * 1984-12-14 1986-06-28 Tokyo Ohka Kogyo Co Ltd ポジ型ホトレジスト組成物
US4626492A (en) * 1985-06-04 1986-12-02 Olin Hunt Specialty Products, Inc. Positive-working o-quinone diazide photoresist composition containing a dye and a trihydroxybenzophenone compound
JPS62123444A (ja) * 1985-08-07 1987-06-04 Japan Synthetic Rubber Co Ltd ポジ型感放射線性樹脂組成物
JPS63184745A (ja) * 1987-01-27 1988-07-30 Sumitomo Chem Co Ltd ポジ型フオトレジスト組成物

Also Published As

Publication number Publication date
KR900003680A (ko) 1990-03-26
AU3127689A (en) 1989-10-05
KR940001550B1 (ko) 1994-02-24
IL89632A (en) 1993-01-31
EP0336605A3 (en) 1990-07-25
DE68909084T2 (de) 1994-01-13
JPH0778627B2 (ja) 1995-08-23
EP0336605B1 (de) 1993-09-15
NO891062L (no) 1989-10-02
EP0336605A2 (de) 1989-10-11
IL89632A0 (en) 1989-09-10
NO891062D0 (no) 1989-03-13
DK155289A (da) 1989-10-01
DK155289D0 (da) 1989-03-30
JPH0210348A (ja) 1990-01-16

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Legal Events

Date Code Title Description
8380 Miscellaneous part iii

Free format text: DER PATENTINHABER LAUTET RICHTIG: HOECHST CELANESE CORP., SHORT HILLS, N.J., US

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CLARIANT FINANCE (BVI) LTD., ROAD TOWN, TORTOLA, V

8328 Change in the person/name/address of the agent

Free format text: SPOTT WEINMILLER & PARTNER, 80336 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: AZ ELECTRONIC MATERIALS USA CORP. (N.D.GES.D. STAA

8328 Change in the person/name/address of the agent

Representative=s name: PATENTANWAELTE ISENBRUCK BOESL HOERSCHLER WICHMANN HU

8339 Ceased/non-payment of the annual fee