DE68906657T2 - Schleifmittelzusammensetzung fuer siliciumwafer. - Google Patents

Schleifmittelzusammensetzung fuer siliciumwafer.

Info

Publication number
DE68906657T2
DE68906657T2 DE1989606657 DE68906657T DE68906657T2 DE 68906657 T2 DE68906657 T2 DE 68906657T2 DE 1989606657 DE1989606657 DE 1989606657 DE 68906657 T DE68906657 T DE 68906657T DE 68906657 T2 DE68906657 T2 DE 68906657T2
Authority
DE
Germany
Prior art keywords
silicon wafer
abrasive composition
abrasive
composition
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1989606657
Other languages
English (en)
Other versions
DE68906657D1 (de
Inventor
Shigeo C O Mitsubishi M Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
Monsanto Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Japan Ltd filed Critical Monsanto Japan Ltd
Priority claimed from PCT/JP1989/000558 external-priority patent/WO1989012082A1/ja
Application granted granted Critical
Publication of DE68906657D1 publication Critical patent/DE68906657D1/de
Publication of DE68906657T2 publication Critical patent/DE68906657T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE1989606657 1988-06-03 1989-06-02 Schleifmittelzusammensetzung fuer siliciumwafer. Expired - Lifetime DE68906657T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP13545188 1988-06-03
JP6988189 1989-03-22
PCT/JP1989/000558 WO1989012082A1 (en) 1988-06-03 1989-06-02 Abrasive composition for silicon wafer

Publications (2)

Publication Number Publication Date
DE68906657D1 DE68906657D1 (de) 1993-06-24
DE68906657T2 true DE68906657T2 (de) 1993-09-02

Family

ID=27300167

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989606657 Expired - Lifetime DE68906657T2 (de) 1988-06-03 1989-06-02 Schleifmittelzusammensetzung fuer siliciumwafer.

Country Status (1)

Country Link
DE (1) DE68906657T2 (de)

Also Published As

Publication number Publication date
DE68906657D1 (de) 1993-06-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: E.I. DU PONT DE NEMOURS & CO., WILMINGTON, DEL., U