DE68906657T2 - Schleifmittelzusammensetzung fuer siliciumwafer. - Google Patents
Schleifmittelzusammensetzung fuer siliciumwafer.Info
- Publication number
- DE68906657T2 DE68906657T2 DE1989606657 DE68906657T DE68906657T2 DE 68906657 T2 DE68906657 T2 DE 68906657T2 DE 1989606657 DE1989606657 DE 1989606657 DE 68906657 T DE68906657 T DE 68906657T DE 68906657 T2 DE68906657 T2 DE 68906657T2
- Authority
- DE
- Germany
- Prior art keywords
- silicon wafer
- abrasive composition
- abrasive
- composition
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13545188 | 1988-06-03 | ||
JP6988189 | 1989-03-22 | ||
PCT/JP1989/000558 WO1989012082A1 (en) | 1988-06-03 | 1989-06-02 | Abrasive composition for silicon wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68906657D1 DE68906657D1 (de) | 1993-06-24 |
DE68906657T2 true DE68906657T2 (de) | 1993-09-02 |
Family
ID=27300167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1989606657 Expired - Lifetime DE68906657T2 (de) | 1988-06-03 | 1989-06-02 | Schleifmittelzusammensetzung fuer siliciumwafer. |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE68906657T2 (de) |
-
1989
- 1989-06-02 DE DE1989606657 patent/DE68906657T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE68906657D1 (de) | 1993-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: E.I. DU PONT DE NEMOURS & CO., WILMINGTON, DEL., U |