DE60323435D1 - Elektronisches Bauelement mit einer elektrisch leitenden Verbindung aus Karbon-Nanoröhren und Verfahren zu seiner Herstellung - Google Patents

Elektronisches Bauelement mit einer elektrisch leitenden Verbindung aus Karbon-Nanoröhren und Verfahren zu seiner Herstellung

Info

Publication number
DE60323435D1
DE60323435D1 DE60323435T DE60323435T DE60323435D1 DE 60323435 D1 DE60323435 D1 DE 60323435D1 DE 60323435 T DE60323435 T DE 60323435T DE 60323435 T DE60323435 T DE 60323435T DE 60323435 D1 DE60323435 D1 DE 60323435D1
Authority
DE
Germany
Prior art keywords
production
electronic component
electrically conductive
carbon nanotubes
conductive compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60323435T
Other languages
English (en)
Inventor
Miho Watanabe
Hiroyuki Watanabe
Chikara Manabe
Masaaki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Application granted granted Critical
Publication of DE60323435D1 publication Critical patent/DE60323435D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • H01B1/24—Conductive material dispersed in non-conductive organic material the conductive material comprising carbon-silicon compounds, carbon or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M2004/022—Electrodes made of one single microscopic fiber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/663—Selection of materials containing carbon or carbonaceous materials as conductive part, e.g. graphite, carbon fibres
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49004—Electrical device making including measuring or testing of device or component part

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Micromachines (AREA)
  • Fuses (AREA)
DE60323435T 2002-09-04 2003-02-25 Elektronisches Bauelement mit einer elektrisch leitenden Verbindung aus Karbon-Nanoröhren und Verfahren zu seiner Herstellung Expired - Lifetime DE60323435D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002258885A JP4547852B2 (ja) 2002-09-04 2002-09-04 電気部品の製造方法

Publications (1)

Publication Number Publication Date
DE60323435D1 true DE60323435D1 (de) 2008-10-23

Family

ID=31884713

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60323435T Expired - Lifetime DE60323435D1 (de) 2002-09-04 2003-02-25 Elektronisches Bauelement mit einer elektrisch leitenden Verbindung aus Karbon-Nanoröhren und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (2) US7065857B2 (de)
EP (1) EP1398297B1 (de)
JP (1) JP4547852B2 (de)
CN (1) CN100559549C (de)
DE (1) DE60323435D1 (de)

Families Citing this family (109)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6723299B1 (en) * 2001-05-17 2004-04-20 Zyvex Corporation System and method for manipulating nanotubes
US7563711B1 (en) 2001-07-25 2009-07-21 Nantero, Inc. Method of forming a carbon nanotube-based contact to semiconductor
US6706402B2 (en) 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US7259410B2 (en) 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
US6919592B2 (en) 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
US6924538B2 (en) * 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US7566478B2 (en) * 2001-07-25 2009-07-28 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7956525B2 (en) 2003-05-16 2011-06-07 Nanomix, Inc. Flexible nanostructure electronic devices
US7335395B2 (en) * 2002-04-23 2008-02-26 Nantero, Inc. Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
JP4547852B2 (ja) * 2002-09-04 2010-09-22 富士ゼロックス株式会社 電気部品の製造方法
FI115534B (fi) * 2002-10-15 2005-05-31 Outokumpu Oy Menetelmä metallien talteenottamiseksi kloridiliuotuksen ja uuton avulla
US7560136B2 (en) * 2003-01-13 2009-07-14 Nantero, Inc. Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7858185B2 (en) 2003-09-08 2010-12-28 Nantero, Inc. High purity nanotube fabrics and films
US8937575B2 (en) 2009-07-31 2015-01-20 Nantero Inc. Microstrip antenna elements and arrays comprising a shaped nanotube fabric layer and integrated two terminal nanotube select devices
US9574290B2 (en) 2003-01-13 2017-02-21 Nantero Inc. Methods for arranging nanotube elements within nanotube fabrics and films
CA2512387A1 (en) * 2003-01-13 2004-08-05 Nantero, Inc. Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US6918284B2 (en) 2003-03-24 2005-07-19 The United States Of America As Represented By The Secretary Of The Navy Interconnected networks of single-walled carbon nanotubes
US7294877B2 (en) 2003-03-28 2007-11-13 Nantero, Inc. Nanotube-on-gate FET structures and applications
EP1631812A4 (de) * 2003-05-14 2010-12-01 Nantero Inc Sensorplattform mit einem horizontal ausgerichteten nanoröhrchenelement
US6982903B2 (en) * 2003-06-09 2006-01-03 Nantero, Inc. Field effect devices having a source controlled via a nanotube switching element
CA2535634A1 (en) 2003-08-13 2005-05-26 Nantero, Inc Nanotube-based switching elements with multiple controls and circuits made from same
US7504051B2 (en) * 2003-09-08 2009-03-17 Nantero, Inc. Applicator liquid for use in electronic manufacturing processes
US7416993B2 (en) 2003-09-08 2008-08-26 Nantero, Inc. Patterned nanowire articles on a substrate and methods of making the same
US7375369B2 (en) 2003-09-08 2008-05-20 Nantero, Inc. Spin-coatable liquid for formation of high purity nanotube films
US7528437B2 (en) * 2004-02-11 2009-05-05 Nantero, Inc. EEPROMS using carbon nanotubes for cell storage
US7556746B2 (en) 2004-06-03 2009-07-07 Nantero, Inc. Method of making an applicator liquid for electronics fabrication process
US7658869B2 (en) * 2004-06-03 2010-02-09 Nantero, Inc. Applicator liquid containing ethyl lactate for preparation of nanotube films
US7709880B2 (en) 2004-06-09 2010-05-04 Nantero, Inc. Field effect devices having a gate controlled via a nanotube switching element
US7652342B2 (en) 2004-06-18 2010-01-26 Nantero, Inc. Nanotube-based transfer devices and related circuits
US7164744B2 (en) 2004-06-18 2007-01-16 Nantero, Inc. Nanotube-based logic driver circuits
US7161403B2 (en) 2004-06-18 2007-01-09 Nantero, Inc. Storage elements using nanotube switching elements
JP2006008861A (ja) * 2004-06-25 2006-01-12 Fuji Xerox Co Ltd 電気部品用塗料、および塗布膜の形成方法
WO2006121461A2 (en) 2004-09-16 2006-11-16 Nantero, Inc. Light emitters using nanotubes and methods of making same
EP1792320A4 (de) 2004-09-21 2010-08-04 Nantero Inc Widerstandselemente mit kohlenstoffnanoröhren
US20100147657A1 (en) * 2004-11-02 2010-06-17 Nantero, Inc. Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches
CA2586120A1 (en) 2004-11-02 2006-12-28 Nantero, Inc. Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches
EP1825038B1 (de) * 2004-12-16 2012-09-12 Nantero, Inc. Wässrige kohlenstoffnanoröhrchenapplikatorflüssigkeiten und verfahren zur herstellung von applikatorflüssigkeiten daraus
JP4752283B2 (ja) * 2005-02-24 2011-08-17 富士ゼロックス株式会社 カーボンナノチューブを用いた太陽電池
US9287356B2 (en) * 2005-05-09 2016-03-15 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US8941094B2 (en) 2010-09-02 2015-01-27 Nantero Inc. Methods for adjusting the conductivity range of a nanotube fabric layer
US20060276056A1 (en) * 2005-04-05 2006-12-07 Nantero, Inc. Nanotube articles with adjustable electrical conductivity and methods of making the same
US7781862B2 (en) 2005-05-09 2010-08-24 Nantero, Inc. Two-terminal nanotube devices and systems and methods of making same
US7782650B2 (en) 2005-05-09 2010-08-24 Nantero, Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US9911743B2 (en) 2005-05-09 2018-03-06 Nantero, Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US9196615B2 (en) 2005-05-09 2015-11-24 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US8513768B2 (en) 2005-05-09 2013-08-20 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US8183665B2 (en) 2005-11-15 2012-05-22 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US8217490B2 (en) 2005-05-09 2012-07-10 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US7835170B2 (en) 2005-05-09 2010-11-16 Nantero, Inc. Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks
US8013363B2 (en) 2005-05-09 2011-09-06 Nantero, Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US7479654B2 (en) * 2005-05-09 2009-01-20 Nantero, Inc. Memory arrays using nanotube articles with reprogrammable resistance
US7598127B2 (en) 2005-05-12 2009-10-06 Nantero, Inc. Nanotube fuse structure
TWI264271B (en) * 2005-05-13 2006-10-11 Delta Electronics Inc Heat sink
JP4566064B2 (ja) * 2005-05-16 2010-10-20 独立行政法人産業技術総合研究所 竹型カーボンナノチューブを用いたバイオセンサ
US7915122B2 (en) 2005-06-08 2011-03-29 Nantero, Inc. Self-aligned cell integration scheme
US8033501B2 (en) * 2005-06-10 2011-10-11 The Boeing Company Method and apparatus for attaching electrically powered seat track cover to through hole seat track design
KR100748408B1 (ko) * 2005-06-28 2007-08-10 한국화학연구원 압타머를 이용한 탄소 나노튜브 트랜지스터 바이오센서 및이것을 이용한 타겟물질 검출 방법
US7538040B2 (en) * 2005-06-30 2009-05-26 Nantero, Inc. Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers
EP2860153B1 (de) 2005-07-28 2018-05-16 Nanocomp Technologies, Inc. Vorrichtung und Verfahren zur Herstellung und Sammlung von Nanofaservlies
CA2621397A1 (en) 2005-09-06 2007-03-15 Nantero, Inc. Method and system of using nanotube fabrics as joule heating elements for memories and other applications
US7927992B2 (en) 2005-09-06 2011-04-19 Nantero, Inc. Carbon nanotubes for the selective transfer of heat from electronics
CA2621103C (en) 2005-09-06 2015-11-03 Nantero, Inc. Nanotube fabric-based sensor systems and methods of making same
KR20080078879A (ko) 2005-12-19 2008-08-28 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 탄소 나노튜브의 생성
US8264137B2 (en) * 2006-01-03 2012-09-11 Samsung Electronics Co., Ltd. Curing binder material for carbon nanotube electron emission cathodes
WO2008016344A1 (en) * 2006-07-31 2008-02-07 Vanderbilt University Thermionic emitting metal intercalated graphitic nanofibers
EP2054716B1 (de) * 2006-08-07 2014-02-26 SNU R&DB Foundation Nanostruktursensoren
JP5410974B2 (ja) * 2006-08-08 2014-02-05 ナンテロ，インク． 不揮発性ナノチューブダイオード及び不揮発性ナノチューブブロック、並びにそれらを用いるシステム及びその製造方法
TWI328984B (en) * 2006-08-29 2010-08-11 Ind Tech Res Inst Substrate structures and fabrication methods thereof
CN101192494B (zh) * 2006-11-24 2010-09-29 清华大学 电子发射元件的制备方法
US20080238882A1 (en) * 2007-02-21 2008-10-02 Ramesh Sivarajan Symmetric touch screen system with carbon nanotube-based transparent conductive electrode pairs
WO2008112764A1 (en) 2007-03-12 2008-09-18 Nantero, Inc. Electromagnetic and thermal sensors using carbon nanotubes and methods of making same
WO2009005908A2 (en) 2007-05-22 2009-01-08 Nantero, Inc. Triodes using nanofabric articles and methods of making the same
EP2469657A1 (de) 2007-08-07 2012-06-27 Nanocomp Technologies, Inc. Elektrisch und thermisch leitende nichtmetallische Adapter auf Nanostrukturbasis
JP5968621B2 (ja) * 2008-05-07 2016-08-10 ナノコンプ テクノロジーズ インコーポレイテッド ナノ構造体ベースの加熱装置およびその使用方法
WO2009155267A1 (en) * 2008-06-20 2009-12-23 Mysticmd, Inc. Anode, cathode, grid and current collector material for reduced weight battery and process for production thereof
WO2009155359A1 (en) 2008-06-20 2009-12-23 Nantero, Inc. Nram arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same
KR101071325B1 (ko) * 2008-08-05 2011-10-07 재단법인서울대학교산학협력재단 정렬된 나노구조물을 구비한 회로 기판 및 그 제조 방법
US9263126B1 (en) 2010-09-01 2016-02-16 Nantero Inc. Method for dynamically accessing and programming resistive change element arrays
US7915637B2 (en) 2008-11-19 2011-03-29 Nantero, Inc. Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same
US8128993B2 (en) 2009-07-31 2012-03-06 Nantero Inc. Anisotropic nanotube fabric layers and films and methods of forming same
US8574673B2 (en) 2009-07-31 2013-11-05 Nantero Inc. Anisotropic nanotube fabric layers and films and methods of forming same
US20110034008A1 (en) * 2009-08-07 2011-02-10 Nantero, Inc. Method for forming a textured surface on a semiconductor substrate using a nanofabric layer
US8350360B1 (en) 2009-08-28 2013-01-08 Lockheed Martin Corporation Four-terminal carbon nanotube capacitors
US8895950B2 (en) 2009-10-23 2014-11-25 Nantero Inc. Methods for passivating a carbonic nanolayer
US8351239B2 (en) 2009-10-23 2013-01-08 Nantero Inc. Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array
WO2011050331A2 (en) * 2009-10-23 2011-04-28 Nantero, Inc. Method for passivating a carbonic nanolayer
US8222704B2 (en) 2009-12-31 2012-07-17 Nantero, Inc. Compact electrical switching devices with nanotube elements, and methods of making same
US8405189B1 (en) * 2010-02-08 2013-03-26 Lockheed Martin Corporation Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors
US9617151B2 (en) 2010-02-12 2017-04-11 Nantero Inc. Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films
US20110203632A1 (en) * 2010-02-22 2011-08-25 Rahul Sen Photovoltaic devices using semiconducting nanotube layers
CN102917977A (zh) 2010-03-30 2013-02-06 南泰若股份有限公司 用于在网络、织物和膜中对纳米元件进行排列的方法
US10661304B2 (en) 2010-03-30 2020-05-26 Nantero, Inc. Microfluidic control surfaces using ordered nanotube fabrics
CN102519504A (zh) * 2011-12-19 2012-06-27 浙江大学 导电高分子复合纳米纤维声表面波型湿度传感器及其制备方法
EP2837005A4 (de) 2012-04-09 2015-12-09 Nanocomp Technologies Inc Nanoröhrenmaterial mit leitfähigen ablagerungen zur erhöhung der leitfähigkeit
KR101441964B1 (ko) 2012-12-06 2014-09-24 서울대학교산학협력단 센서 시스템
US9650732B2 (en) 2013-05-01 2017-05-16 Nantero Inc. Low defect nanotube application solutions and fabrics and methods for making same
JP6014906B2 (ja) * 2013-05-10 2016-10-26 ヤマハ株式会社 歪みセンサ
EP3010853B1 (de) 2013-06-17 2023-02-22 Nanocomp Technologies, Inc. Exfolierende dispergiermittel für nanoröhrchen, bündel und fasern
US10654718B2 (en) 2013-09-20 2020-05-19 Nantero, Inc. Scalable nanotube fabrics and methods for making same
US9299430B1 (en) 2015-01-22 2016-03-29 Nantero Inc. Methods for reading and programming 1-R resistive change element arrays
US11434581B2 (en) 2015-02-03 2022-09-06 Nanocomp Technologies, Inc. Carbon nanotube structures and methods for production thereof
US9941001B2 (en) 2016-06-07 2018-04-10 Nantero, Inc. Circuits for determining the resistive states of resistive change elements
US9934848B2 (en) 2016-06-07 2018-04-03 Nantero, Inc. Methods for determining the resistive states of resistive change elements
US10581082B2 (en) 2016-11-15 2020-03-03 Nanocomp Technologies, Inc. Systems and methods for making structures defined by CNT pulp networks
US11279836B2 (en) 2017-01-09 2022-03-22 Nanocomp Technologies, Inc. Intumescent nanostructured materials and methods of manufacturing same
CN108963078B (zh) * 2017-05-17 2020-03-17 清华大学 光电转换装置
JP7002517B2 (ja) * 2019-11-15 2022-01-20 花王株式会社 半導体型単層カーボンナノチューブ分散液の製造方法
JP6900453B2 (ja) * 2019-11-15 2021-07-07 花王株式会社 半導体型単層カーボンナノチューブ分散液の製造方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146836A (en) * 1976-06-01 1977-12-06 Seiko Instr & Electronics Silver peroxide battery
JPS55156370A (en) * 1979-05-25 1980-12-05 Hitachi Ltd Manufacture of semiconductor device
US5346683A (en) * 1993-03-26 1994-09-13 Gas Research Institute Uncapped and thinned carbon nanotubes and process
JP2526408B2 (ja) * 1994-01-28 1996-08-21 工業技術院長 カ―ボンナノチュ―ブの連続製造方法及び装置
WO1997019208A1 (en) * 1995-11-22 1997-05-29 Northwestern University Method of encapsulating a material in a carbon nanotube
US6057637A (en) * 1996-09-13 2000-05-02 The Regents Of The University Of California Field emission electron source
ATE240906T1 (de) * 1998-04-09 2003-06-15 Horcom Ltd Zusammensetzung enthaltend nanoröhren und eine organische verbindung
TW410478B (en) * 1998-05-29 2000-11-01 Lucent Technologies Inc Thin-film transistor monolithically integrated with an organic light-emitting diode
US6630772B1 (en) * 1998-09-21 2003-10-07 Agere Systems Inc. Device comprising carbon nanotube field emitter structure and process for forming device
US6250984B1 (en) * 1999-01-25 2001-06-26 Agere Systems Guardian Corp. Article comprising enhanced nanotube emitter structure and process for fabricating article
EP1061554A1 (de) * 1999-06-15 2000-12-20 Iljin Nanotech Co., Ltd. Weisslichtquelle mit Kohlenstoffnanoröhren und Verfahren zur Herstellung
US6648711B1 (en) * 1999-06-16 2003-11-18 Iljin Nanotech Co., Ltd. Field emitter having carbon nanotube film, method of fabricating the same, and field emission display device using the field emitter
US6325909B1 (en) * 1999-09-24 2001-12-04 The Governing Council Of The University Of Toronto Method of growth of branched carbon nanotubes and devices produced from the branched nanotubes
US6914372B1 (en) * 1999-10-12 2005-07-05 Matsushita Electric Industrial Co., Ltd. Electron-emitting element and electron source, field emission image display device, and fluorescent lamp utilizing the same and methods of fabricating the same
EP1134303B1 (de) * 2000-03-13 2010-06-09 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Dünnfilms
JP2001348215A (ja) * 2000-05-31 2001-12-18 Fuji Xerox Co Ltd カーボンナノチューブおよび／またはフラーレンの製造方法、並びにその製造装置
KR100360476B1 (ko) * 2000-06-27 2002-11-08 삼성전자 주식회사 탄소나노튜브를 이용한 나노 크기 수직 트랜지스터 및 그제조방법
KR100404187B1 (ko) * 2000-07-08 2003-11-01 엘지전자 주식회사 카본 나노 튜브 또는 카본 나노 화이바를 이용한 인덕터
JP3859199B2 (ja) * 2000-07-18 2006-12-20 エルジー エレクトロニクス インコーポレイティド カーボンナノチューブの水平成長方法及びこれを利用した電界効果トランジスタ
JP3863721B2 (ja) * 2000-12-07 2006-12-27 喜萬 中山 ナノチューブカートリッジの製造方法
JP4038363B2 (ja) * 2000-12-25 2008-01-23 日本特殊陶業株式会社 配線基板
US6920680B2 (en) * 2001-08-28 2005-07-26 Motorola, Inc. Method of making vacuum microelectronic device
US20030189202A1 (en) * 2002-04-05 2003-10-09 Jun Li Nanowire devices and methods of fabrication
JP4547852B2 (ja) * 2002-09-04 2010-09-22 富士ゼロックス株式会社 電気部品の製造方法
US7135728B2 (en) * 2002-09-30 2006-11-14 Nanosys, Inc. Large-area nanoenabled macroelectronic substrates and uses therefor

Also Published As

Publication number Publication date
EP1398297B1 (de) 2008-09-10
EP1398297A2 (de) 2004-03-17
US20070040488A1 (en) 2007-02-22
CN1480981A (zh) 2004-03-10
JP4547852B2 (ja) 2010-09-22
JP2004090208A (ja) 2004-03-25
US7915539B2 (en) 2011-03-29
US20040041154A1 (en) 2004-03-04
US7065857B2 (en) 2006-06-27
CN100559549C (zh) 2009-11-11
EP1398297A3 (de) 2006-01-11

Similar Documents

Publication Publication Date Title
DE60323435D1 (de) Elektronisches Bauelement mit einer elektrisch leitenden Verbindung aus Karbon-Nanoröhren und Verfahren zu seiner Herstellung
DE602005015548D1 (de) Verfahren zur herstellung einer elektrisch leitfähigen verbindung vom mayenit-typ
GB2427756B (en) Carbon nanotube-based electronic devices made by electrolytic deposition and applications thereof
DE60335074D1 (de) Kondensator und Verfahren zu dessen Herstellung, und Leiterplatte mit einem eingebauten Kondensator und Verfahren zu deren Herstellung
DE60318482D1 (de) Elektrolytkondensatorvorrichtung mit hoher Energiedichte und Verfahren zur Herstellung einer verbesserten Anode aus Ventilmetall
GB2424771C (en) Electrical connector terminal and method of producing same
DE50313661D1 (de) Sonde mit Metallelektrode und Verfahren zur Herstellung einer solchen Elektrode
DE60336933D1 (de) Verfahren zur herstellung einer vorrichtung aus kohlenstoff-nanoröhren
EP1609771A4 (de) Elektroden-stufen-differenz-ausgleichende druckpaste und produktionsverfahren für elektronische bauteile
GB2400530B (en) Method of enabling an application program running on an electronic device to provide media manipulation capabilities
DE60144546D1 (de) Saphirsubstrat, elektronisches Bauelement und Verfahren zu dessen Herstellung
FI20031201A0 (fi) Menetelmä elektroniikkamoduulin valmistamiseksi ja elektroniikkamoduuli
GB0617031D0 (en) Method and system of electrically connecting multiple printed circuit boards
DE10315897B4 (de) Verfahren und Verwendung einer Vorrichtung zur Trennung von metallischen und halbleitenden Kohlenstoff-Nanoröhren
EP1524335A4 (de) Kupferelektrolytlösung, die eine aminverbindung mit speziellem gerüst und eine organische schwefelverbindung enthält, und damit hergestelltes elektrolytkupferblech
FI20030293A0 (fi) Menetelmä elektroniikkamoduulin valmistamiseksi ja elektroniikkamoduuli
TWI368231B (en) Conductive paste, and method for producing printed wiring board by using the same
DE10295883T1 (de) Mit einem isolierenden Bauteil ausgestatteter Kern und Verfahren zur Herstellung desselben
DE69820273D1 (de) Faser-harz verbundkörper zur elektromagnetischen abschirmung, welcher einen elektrisch leitfähigen kontaktstreifen enthält und verfahren seiner herstellung
WO2006080005A3 (en) Electronic device and a method of its fabrication
ATE494637T1 (de) Piezoaktor mit mehrschicht-verkapselung und verfahren zu seiner herstellung
DE60038758D1 (de) Leitende Elektrode aus Iridium und Barrierestruktur und Verfahren zur Herstellung
DE502004009020D1 (de) Integrierte schaltung mit einem organischen halbleiter und verfahren zur herstellung einer integrierten schaltung
DE602004003445D1 (de) Elektrische Verbindungsanordnung und Verfahren zur Herstellung
DE60216825D1 (de) Verfahren zum herstellen einer im wesentlichen transparenten elektrisch leitenden schichtanordnung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8370 Indication related to discontinuation of the patent is to be deleted