DE60316033D1 - Gerät zur resonanzkontrolle eines piezo-elektrischen bauteils mit phasensensitiver detektion - Google Patents

Gerät zur resonanzkontrolle eines piezo-elektrischen bauteils mit phasensensitiver detektion

Info

Publication number
DE60316033D1
DE60316033D1 DE60316033T DE60316033T DE60316033D1 DE 60316033 D1 DE60316033 D1 DE 60316033D1 DE 60316033 T DE60316033 T DE 60316033T DE 60316033 T DE60316033 T DE 60316033T DE 60316033 D1 DE60316033 D1 DE 60316033D1
Authority
DE
Germany
Prior art keywords
electrical component
sensitive detection
phase sensitive
piezo electrical
resonating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60316033T
Other languages
English (en)
Other versions
DE60316033T2 (de
Inventor
Kesatoshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE60316033D1 publication Critical patent/DE60316033D1/de
Application granted granted Critical
Publication of DE60316033T2 publication Critical patent/DE60316033T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • H02N2/008Means for controlling vibration frequency or phase, e.g. for resonance tracking
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
DE60316033T 2003-01-10 2003-12-25 Gerät zur resonanzkontrolle eines piezo-elektrischen bauteils mit phasensensitiver detektion Expired - Lifetime DE60316033T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003005037A JP4385602B2 (ja) 2003-01-10 2003-01-10 共振制御装置
JP2003005037 2003-01-10
PCT/JP2003/016822 WO2004064171A1 (en) 2003-01-10 2003-12-25 A resonance control apparatus for a piezoelectrical device based on phase sensitive detection

Publications (2)

Publication Number Publication Date
DE60316033D1 true DE60316033D1 (de) 2007-10-11
DE60316033T2 DE60316033T2 (de) 2008-05-21

Family

ID=32708996

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316033T Expired - Lifetime DE60316033T2 (de) 2003-01-10 2003-12-25 Gerät zur resonanzkontrolle eines piezo-elektrischen bauteils mit phasensensitiver detektion

Country Status (6)

Country Link
US (1) US7368850B2 (de)
EP (1) EP1581972B1 (de)
JP (1) JP4385602B2 (de)
CN (1) CN100452468C (de)
DE (1) DE60316033T2 (de)
WO (1) WO2004064171A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006102976A (ja) * 2004-09-30 2006-04-20 Fuji Photo Film Co Ltd 液体吐出ヘッド、液体吐出装置及び画像形成装置
JP2008306826A (ja) 2007-06-07 2008-12-18 Seiko Epson Corp 圧電アクチュエータ及びその駆動方法
US8450905B2 (en) * 2009-07-23 2013-05-28 New Scale Technologies Methods for controlling velocity of at least partially resonant actuators systems and systems thereof
JP5558079B2 (ja) * 2009-11-06 2014-07-23 株式会社東芝 磁気共鳴画像診断装置
JP5804949B2 (ja) * 2009-11-10 2015-11-04 株式会社日立メディコ 超音波診断装置
US8593227B2 (en) * 2011-08-05 2013-11-26 Qualcomm Incorporated System and method of controlling gain of an oscillator
CN102778228B (zh) * 2012-08-20 2015-03-25 重庆邮电大学 一种自由梁振动角速率传感器
JP5803987B2 (ja) * 2013-06-20 2015-11-04 株式会社デンソー 負荷駆動制御装置
JP6632235B2 (ja) * 2015-07-14 2020-01-22 キヤノン株式会社 振動体の駆動装置、およびそれを用いた振動型アクチュエータ、撮像装置
JP6579893B2 (ja) 2015-09-30 2019-09-25 キヤノン株式会社 振動型アクチュエータの制御装置と制御方法、駆動装置、撮像装置及び自動ステージ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4965532A (en) 1988-06-17 1990-10-23 Olympus Optical Co., Ltd. Circuit for driving ultrasonic transducer
JPH03243183A (ja) 1990-02-21 1991-10-30 Seiko Instr Inc 超音波モータ装置
EP0654889B1 (de) * 1990-02-14 1999-05-06 Nikon Corporation Antriebsvorrichtung für einen Ultraschallwellenmotor
JP2996483B2 (ja) 1990-04-05 1999-12-27 キヤノン株式会社 振動型モータ
US5563478A (en) * 1992-08-18 1996-10-08 Nikon Corporation Drive control device for an ultrasonic motor
JPH06164376A (ja) * 1992-11-16 1994-06-10 Sharp Corp Pll回路
KR0138220B1 (ko) * 1994-12-30 1998-05-15 김주용 위상동기루프회로의 클럭지연보상 및 듀티제어 장치
JP3123922B2 (ja) * 1996-05-13 2001-01-15 日本電気株式会社 90゜移相器
JPH10319933A (ja) * 1997-05-21 1998-12-04 Sony Corp ドットクロック発生回路
JP2000175069A (ja) * 1998-12-10 2000-06-23 Matsushita Electric Ind Co Ltd 歪み補正回路
US6339368B1 (en) 2000-03-31 2002-01-15 Zilog, Inc. Circuit for automatically driving mechanical device at its resonance frequency

Also Published As

Publication number Publication date
JP4385602B2 (ja) 2009-12-16
EP1581972B1 (de) 2007-08-29
US20060071723A1 (en) 2006-04-06
JP2004222377A (ja) 2004-08-05
US7368850B2 (en) 2008-05-06
EP1581972A1 (de) 2005-10-05
WO2004064171A1 (en) 2004-07-29
CN100452468C (zh) 2009-01-14
CN1735977A (zh) 2006-02-15
DE60316033T2 (de) 2008-05-21

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