DE60315217D1 - Drehantriebsvorrichtung - Google Patents

Drehantriebsvorrichtung

Info

Publication number
DE60315217D1
DE60315217D1 DE60315217T DE60315217T DE60315217D1 DE 60315217 D1 DE60315217 D1 DE 60315217D1 DE 60315217 T DE60315217 T DE 60315217T DE 60315217 T DE60315217 T DE 60315217T DE 60315217 D1 DE60315217 D1 DE 60315217D1
Authority
DE
Germany
Prior art keywords
drive device
rotary drive
rotary
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60315217T
Other languages
English (en)
Other versions
DE60315217T2 (de
Inventor
Masatoshi Moteki
Tadahiro Mizutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE60315217D1 publication Critical patent/DE60315217D1/de
Publication of DE60315217T2 publication Critical patent/DE60315217T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H02N2/123—Mechanical transmission means, e.g. for gearing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
DE60315217T 2002-06-14 2003-06-13 Drehantriebsvorrichtung Expired - Lifetime DE60315217T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2002174963 2002-06-14
JP2002174963 2002-06-14
JP2002277968 2002-09-24
JP2002277968 2002-09-24
JP2003096220A JP2004166479A (ja) 2002-06-14 2003-03-31 回転型駆動装置およびこれを備えた装置
JP2003096220 2003-03-31

Publications (2)

Publication Number Publication Date
DE60315217D1 true DE60315217D1 (de) 2007-09-13
DE60315217T2 DE60315217T2 (de) 2008-05-08

Family

ID=29587479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60315217T Expired - Lifetime DE60315217T2 (de) 2002-06-14 2003-06-13 Drehantriebsvorrichtung

Country Status (7)

Country Link
US (2) US7116037B2 (de)
EP (2) EP1855376A3 (de)
JP (1) JP2004166479A (de)
CN (2) CN101087110B (de)
DE (1) DE60315217T2 (de)
DK (1) DK1372256T3 (de)
HK (1) HK1060803A1 (de)

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US6909223B2 (en) * 2002-03-11 2005-06-21 Seiko Epson Corporation Rotation/displacement converting actuator
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CN1981427B (zh) * 2004-07-07 2011-06-01 精工爱普生株式会社 压电致动器和钟表
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JP4572341B2 (ja) * 2006-02-03 2010-11-04 セイコーエプソン株式会社 液体噴射装置および記録装置
JP2007221865A (ja) * 2006-02-14 2007-08-30 Seiko Epson Corp 圧電振動体、圧電振動体の固有振動数調整方法、圧電アクチュエータ、および電子機器
JP2007223134A (ja) * 2006-02-22 2007-09-06 Seiko Epson Corp 液体噴射装置および記録装置
US8915158B2 (en) * 2006-06-02 2014-12-23 MicroZeus, LLC Methods and systems for micro transmissions
US8884474B2 (en) * 2006-06-02 2014-11-11 MicroZeus, LLC Method of fabricating a micro machine
US8134276B2 (en) * 2006-06-02 2012-03-13 MicroZeus, LLC Methods and systems for positioning micro elements
US9156674B2 (en) * 2006-06-02 2015-10-13 MicroZeus, LLC Micro transport machine and methods for using same
US8282284B2 (en) * 2006-06-02 2012-10-09 MicroZeus, LLC Methods and systems for micro bearings
WO2007143623A2 (en) 2006-06-02 2007-12-13 Stalford Harold L Methods and systems for micro machines
US8159107B2 (en) * 2006-06-02 2012-04-17 Microzeus Llc Micro rotary machine and methods for using same
US7929382B2 (en) * 2007-02-14 2011-04-19 Seiko Epson Corporation Piezoelectric transducer, piezoelectric actuator, and portable device
US8297149B2 (en) * 2007-02-28 2012-10-30 Konica Minolta Opto, Inc. Friction drive actuator
JP2008301673A (ja) * 2007-06-04 2008-12-11 Konica Minolta Opto Inc 摩擦駆動アクチュエータおよびそれを用いるハードディスク装置
JP2008306826A (ja) * 2007-06-07 2008-12-18 Seiko Epson Corp 圧電アクチュエータ及びその駆動方法
JP4981547B2 (ja) * 2007-06-28 2012-07-25 オリンパスイメージング株式会社 駆動装置および撮像装置
US20090072664A1 (en) * 2007-09-14 2009-03-19 Kazuaki Nagata Driving apparatus
BRPI0818922B1 (pt) * 2007-11-02 2020-09-29 Nippon Steel Corporation Laminador para uma chapa ou uma folha e seu método de controle
US20090121586A1 (en) * 2007-11-13 2009-05-14 Multimetrixs, Llc. Apparatus for transforming inverse piezoelectric effect into rotary motion and method of manufacturing aforementioned apparatus
JP4405590B2 (ja) * 2007-12-07 2010-01-27 パナソニック株式会社 駆動装置
JP2009254198A (ja) * 2008-04-10 2009-10-29 Sharp Corp 超音波モータおよび超音波振動子
US8122973B2 (en) * 2008-05-21 2012-02-28 Stalford Harold L Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
JP5298699B2 (ja) 2008-08-20 2013-09-25 セイコーエプソン株式会社 制御ユニット、チューブユニット、マイクロポンプ
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JP5282508B2 (ja) 2008-09-29 2013-09-04 セイコーエプソン株式会社 制御ユニット、チューブユニット、マイクロポンプ
JP5195368B2 (ja) 2008-12-05 2013-05-08 セイコーエプソン株式会社 チューブユニット、制御ユニット、マイクロポンプ
CN102292908A (zh) * 2008-12-17 2011-12-21 发现技术国际股份有限公司 有高力矩的压电电机
US8183744B2 (en) * 2008-12-19 2012-05-22 Discovery Technology International, Inc. Piezoelectric motor
JP5382320B2 (ja) * 2009-03-26 2014-01-08 セイコーエプソン株式会社 圧電モーター、液体噴射装置及び時計
JP2010233339A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーター、液体噴射装置及び時計
JP5421005B2 (ja) * 2009-07-09 2014-02-19 ファインマシーンカタオカ株式会社 ワーク洗浄装置
WO2011028780A2 (en) * 2009-09-01 2011-03-10 Discovery Technology International, Lllp Piezoelectric rotary motor with high rotation speed and bi- directional operation
JP5473702B2 (ja) * 2010-03-23 2014-04-16 キヤノン株式会社 振動型駆動装置
US9143059B2 (en) 2010-07-26 2015-09-22 Canon Kabushiki Kaisha Vibration wave motor
JP5909624B2 (ja) * 2010-08-04 2016-04-27 パナソニックＩｐマネジメント株式会社 駆動装置
JP2012080606A (ja) * 2010-09-30 2012-04-19 Nikon Corp 駆動装置、レンズ鏡筒及びカメラ
JP5257434B2 (ja) * 2010-09-30 2013-08-07 株式会社ニコン 駆動装置、レンズ鏡筒及びカメラ
JP5776270B2 (ja) 2011-03-29 2015-09-09 セイコーエプソン株式会社 圧電アクチュエーター、モーター、ロボットハンドおよびロボット
JP5929138B2 (ja) * 2011-12-06 2016-06-01 セイコーエプソン株式会社 圧電モーターおよびロボット
JP6008077B2 (ja) * 2011-12-06 2016-10-19 セイコーエプソン株式会社 アクチュエータ―、ロボット、電子部品搬送装置及び電子部品検査装置
EP2680334A1 (de) * 2012-06-28 2014-01-01 Leica Geosystems AG Piezo-Antrieb mit drehgelenkgelagertem Piezooszillator
JP6025446B2 (ja) * 2012-08-10 2016-11-16 キヤノン株式会社 振動型アクチュエータ、撮像装置および、振動型アクチュエータを備えた装置
WO2015125359A1 (ja) 2014-02-18 2015-08-27 シャープ株式会社 摩擦駆動アクチュエータ
WO2015125358A1 (ja) 2014-02-18 2015-08-27 シャープ株式会社 医療装置
JP6387686B2 (ja) * 2014-05-29 2018-09-12 セイコーエプソン株式会社 圧電アクチュエーター
KR20160014453A (ko) * 2014-07-29 2016-02-11 삼성전기주식회사 진동발생장치
JP6543951B2 (ja) * 2015-02-18 2019-07-17 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
CN107615638A (zh) * 2015-05-21 2018-01-19 夏普株式会社 超声波致动器
US10688528B2 (en) * 2016-09-14 2020-06-23 Nidec Seimitsu Corporation Vibration motor
JP2019213255A (ja) 2018-05-31 2019-12-12 セイコーエプソン株式会社 回転直動変換装置
US11482658B1 (en) 2018-06-06 2022-10-25 Government Of The United States As Represented By The Secretary Of The Air Force Piezoelectric rotary optical mount
JP7287048B2 (ja) * 2019-03-27 2023-06-06 セイコーエプソン株式会社 ロボット
JP7314713B2 (ja) * 2019-08-21 2023-07-26 セイコーエプソン株式会社 圧電駆動装置およびロボット
CN111441233B (zh) * 2020-03-08 2021-06-11 武汉理工大学 电压驱动的桥梁结构摩擦耗能装置

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Also Published As

Publication number Publication date
DE60315217T2 (de) 2008-05-08
US20060250048A1 (en) 2006-11-09
US7378777B2 (en) 2008-05-27
CN101087110A (zh) 2007-12-12
CN100336294C (zh) 2007-09-05
US20040027032A1 (en) 2004-02-12
JP2004166479A (ja) 2004-06-10
CN101087110B (zh) 2011-02-02
EP1372256A3 (de) 2005-02-16
DK1372256T3 (da) 2007-12-03
US7116037B2 (en) 2006-10-03
EP1855376A2 (de) 2007-11-14
HK1060803A1 (en) 2004-08-20
EP1372256A2 (de) 2003-12-17
CN1469538A (zh) 2004-01-21
EP1372256B1 (de) 2007-08-01
EP1855376A3 (de) 2008-07-23

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