DE60312110D1 - Hartstoffschicht und damit beschichtetes Werkzeug - Google Patents

Hartstoffschicht und damit beschichtetes Werkzeug

Info

Publication number
DE60312110D1
DE60312110D1 DE60312110T DE60312110T DE60312110D1 DE 60312110 D1 DE60312110 D1 DE 60312110D1 DE 60312110 T DE60312110 T DE 60312110T DE 60312110 T DE60312110 T DE 60312110T DE 60312110 D1 DE60312110 D1 DE 60312110D1
Authority
DE
Germany
Prior art keywords
gamma
beta
alpha
hard film
material layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60312110T
Other languages
English (en)
Other versions
DE60312110T2 (de
Inventor
Takeshi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32234002&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60312110(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP2002334434A external-priority patent/JP3669700B2/ja
Priority claimed from JP2002340796A external-priority patent/JP3640310B2/ja
Priority claimed from JP2003360269A external-priority patent/JP2005126736A/ja
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Application granted granted Critical
Publication of DE60312110D1 publication Critical patent/DE60312110D1/de
Publication of DE60312110T2 publication Critical patent/DE60312110T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676Oxynitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31Surface property or characteristic of web, sheet or block

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Gloves (AREA)
  • Chemical Vapour Deposition (AREA)
DE60312110T 2002-11-19 2003-11-17 Hartstoffschicht und damit beschichtetes Werkzeug Expired - Lifetime DE60312110T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2002334434 2002-11-19
JP2002334434A JP3669700B2 (ja) 2002-11-19 2002-11-19 硬質皮膜
JP2002340796 2002-11-25
JP2002340796A JP3640310B2 (ja) 2002-11-25 2002-11-25 硬質皮膜
JP2003360269 2003-10-21
JP2003360269A JP2005126736A (ja) 2003-10-21 2003-10-21 硬質皮膜

Publications (2)

Publication Number Publication Date
DE60312110D1 true DE60312110D1 (de) 2007-04-12
DE60312110T2 DE60312110T2 (de) 2007-10-11

Family

ID=32234002

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312110T Expired - Lifetime DE60312110T2 (de) 2002-11-19 2003-11-17 Hartstoffschicht und damit beschichtetes Werkzeug

Country Status (8)

Country Link
US (2) US7166155B2 (de)
EP (1) EP1422311B1 (de)
CN (1) CN1304626C (de)
AT (1) ATE355395T1 (de)
DE (1) DE60312110T2 (de)
DK (1) DK1422311T3 (de)
ES (1) ES2279050T3 (de)
PT (1) PT1422311E (de)

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US7226670B2 (en) 2003-04-28 2007-06-05 Oc Oerlikon Balzers Ag Work piece with a hard film of AlCr-containing material, and process for its production
US8668926B1 (en) 2003-09-15 2014-03-11 Shaker A. Mousa Nanoparticle and polymer formulations for thyroid hormone analogs, antagonists, and formulations thereof
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US9198887B2 (en) 2003-09-15 2015-12-01 Nanopharmaceuticals Llc Thyroid hormone analogs and methods of use
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EP2514552A4 (de) * 2009-12-17 2017-04-05 Sumitomo Electric Industries, Ltd. Beschichtetes drehwerkzeug
EP2531633B1 (de) * 2010-02-04 2017-11-22 Oerlikon Surface Solutions AG, Pfäffikon Schneidewerkzeuge mit mehrschichtigen al-cr-b-n-/ti-al-n-beschichtungen
WO2012018063A1 (ja) * 2010-08-04 2012-02-09 株式会社タンガロイ 被覆工具
EP2761050B1 (de) 2011-09-30 2021-08-25 CemeCon AG Beschichtung von substraten mittels hipims
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JP6015423B2 (ja) * 2012-12-21 2016-10-26 三菱マテリアル株式会社 サーミスタ用金属窒化物材料及びその製造方法並びにフィルム型サーミスタセンサ
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Also Published As

Publication number Publication date
DE60312110T2 (de) 2007-10-11
PT1422311E (pt) 2007-03-30
US7435487B2 (en) 2008-10-14
US20070087224A1 (en) 2007-04-19
ATE355395T1 (de) 2006-03-15
DK1422311T3 (da) 2007-06-11
CN1504589A (zh) 2004-06-16
US7166155B2 (en) 2007-01-23
EP1422311A3 (de) 2004-08-25
CN1304626C (zh) 2007-03-14
EP1422311B1 (de) 2007-02-28
US20040137281A1 (en) 2004-07-15
ES2279050T3 (es) 2007-08-16
EP1422311A2 (de) 2004-05-26

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8363 Opposition against the patent