DE60310302D1 - Schutzrohr für Thermoelement - Google Patents

Schutzrohr für Thermoelement

Info

Publication number
DE60310302D1
DE60310302D1 DE60310302T DE60310302T DE60310302D1 DE 60310302 D1 DE60310302 D1 DE 60310302D1 DE 60310302 T DE60310302 T DE 60310302T DE 60310302 T DE60310302 T DE 60310302T DE 60310302 D1 DE60310302 D1 DE 60310302D1
Authority
DE
Germany
Prior art keywords
thermocouple
protective tube
protective
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60310302T
Other languages
English (en)
Other versions
DE60310302T2 (de
Inventor
Takuma Kushihashi
Akira Satoh
Kazuhiro Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE60310302D1 publication Critical patent/DE60310302D1/de
Application granted granted Critical
Publication of DE60310302T2 publication Critical patent/DE60310302T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G01K1/12—Protective devices, e.g. casings for preventing damage due to heat overloading
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G01K1/10—Protective devices, e.g. casings for preventing chemical attack

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Chemical Vapour Deposition (AREA)
DE60310302T 2002-05-22 2003-05-21 Schutzrohr für Thermoelement Expired - Lifetime DE60310302T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002147892A JP2003344169A (ja) 2002-05-22 2002-05-22 熱電対保護管
JP2002147892 2002-05-22

Publications (2)

Publication Number Publication Date
DE60310302D1 true DE60310302D1 (de) 2007-01-25
DE60310302T2 DE60310302T2 (de) 2007-05-31

Family

ID=29397856

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60310302T Expired - Lifetime DE60310302T2 (de) 2002-05-22 2003-05-21 Schutzrohr für Thermoelement

Country Status (4)

Country Link
US (1) US20030217767A1 (de)
EP (1) EP1365219B1 (de)
JP (1) JP2003344169A (de)
DE (1) DE60310302T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050088159A (ko) * 2003-01-17 2005-09-01 제너럴 일렉트릭 캄파니 웨이퍼 처리 장치
JPWO2006003798A1 (ja) * 2004-07-01 2008-04-17 株式会社アルバック 基板温度測定装置及び処理装置
CN100453987C (zh) * 2004-07-29 2009-01-21 日本贺利氏电测骑士公司 耐热性保护管及其制造方法
EP1677087A1 (de) * 2004-12-21 2006-07-05 Vesuvius Crucible Company Thermoelementeinheit und Verfahren zu deren Verwendung
DE102007032694A1 (de) 2007-07-13 2009-01-22 Kutzner, Dieter, Dipl.-Ing. Schutzhülle für ein Temperaturmesselement
DE102008029227B4 (de) * 2008-06-19 2012-11-22 Temperaturmeßtechnik Geraberg GmbH Oberflächenstrukturierter Temperaturfühler und Verfahren zur Herstellung
US20100028225A1 (en) * 2008-07-31 2010-02-04 Stephen Edward Gatz Capillary protective cover
CN101894904B (zh) * 2010-07-15 2011-12-28 电子科技大学 一种金属基薄膜热电偶及其生产方法
US8690423B2 (en) 2010-09-07 2014-04-08 Stoneridge, Inc. Temperature sensor
DE102011008179B4 (de) * 2011-01-10 2012-11-29 Paul Rüster & Co. GmbH Temperaturfühler
KR101916238B1 (ko) * 2011-06-28 2019-01-30 엘지이노텍 주식회사 진공 열처리 장치
DE102015001911A1 (de) 2015-02-16 2016-08-18 Wika Alexander Wiegand Se & Co. Kg Gepanzertes Messchutzrohr für den Einsatz in agrressiven Medien
CN105960033B (zh) * 2016-07-12 2022-12-23 北京中兴实强陶瓷轴承有限公司 一种加热器
DE102017100267A1 (de) 2017-01-09 2018-07-12 Endress + Hauser Wetzer Gmbh + Co. Kg Thermometer
CN107606937B (zh) * 2017-09-07 2023-05-09 广东欧莱高新材料股份有限公司 一种带密封式热电偶的高温气氛烧结炉
JP7474600B2 (ja) 2020-02-17 2024-04-25 東京応化工業株式会社 基板加熱装置および基板処理システム
CN113008399A (zh) * 2021-01-26 2021-06-22 松诺盟科技有限公司 高温耐腐蚀热电偶及其加工方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4430518A (en) * 1981-11-30 1984-02-07 Denki Kagaku Kogyo Kabushiki Kaisha Protecting tube for thermocouple
DE68927182T2 (de) * 1989-11-22 1997-01-30 Nippon Steel Corp Thermoelementähnliche temperaturfühler und verfahren zur temperaturmessung flüssigen stahles
JP3638345B2 (ja) * 1995-08-22 2005-04-13 信越化学工業株式会社 熱分解窒化硼素容器
US5772324A (en) * 1995-10-02 1998-06-30 Midwest Instrument Co., Inc. Protective tube for molten metal immersible thermocouple
US5850072A (en) * 1997-02-18 1998-12-15 Eckert; C. Edward Electric heater assembly
KR19990066851A (ko) * 1998-01-12 1999-08-16 카와무라 히데오 금속용탕 온도측정용 열전대
JP4416146B2 (ja) * 2000-11-16 2010-02-17 いすゞ自動車株式会社 熱電対

Also Published As

Publication number Publication date
EP1365219A3 (de) 2004-02-25
JP2003344169A (ja) 2003-12-03
US20030217767A1 (en) 2003-11-27
EP1365219B1 (de) 2006-12-13
DE60310302T2 (de) 2007-05-31
EP1365219A2 (de) 2003-11-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition