DE60303695D1 - Verfahren zur Herstellung eines Gassensors - Google Patents

Verfahren zur Herstellung eines Gassensors

Info

Publication number
DE60303695D1
DE60303695D1 DE60303695T DE60303695T DE60303695D1 DE 60303695 D1 DE60303695 D1 DE 60303695D1 DE 60303695 T DE60303695 T DE 60303695T DE 60303695 T DE60303695 T DE 60303695T DE 60303695 D1 DE60303695 D1 DE 60303695D1
Authority
DE
Germany
Prior art keywords
producing
gas sensor
sensor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60303695T
Other languages
English (en)
Other versions
DE60303695T2 (de
Inventor
Masashi Totokawa
Yorishige Matsuba
Yoshihisa Misawa
Hideyuki Gotoh
Katsuhisa Osako
Masaaki Oda
Norimichi Saito
Toshihiro Suzuki
Noriyuki Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harima Chemical Inc
Denso Corp
Ulvac Inc
Original Assignee
Harima Chemical Inc
Denso Corp
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harima Chemical Inc, Denso Corp, Ulvac Inc filed Critical Harima Chemical Inc
Application granted granted Critical
Publication of DE60303695D1 publication Critical patent/DE60303695D1/de
Publication of DE60303695T2 publication Critical patent/DE60303695T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE60303695T 2002-03-15 2003-03-13 Verfahren zur Herstellung eines Gassensors Expired - Lifetime DE60303695T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002072343 2002-03-15
JP2002072343A JP3711953B2 (ja) 2002-03-15 2002-03-15 ガスセンサ用センシング膜の製造方法

Publications (2)

Publication Number Publication Date
DE60303695D1 true DE60303695D1 (de) 2006-04-27
DE60303695T2 DE60303695T2 (de) 2006-11-09

Family

ID=28035164

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60303695T Expired - Lifetime DE60303695T2 (de) 2002-03-15 2003-03-13 Verfahren zur Herstellung eines Gassensors

Country Status (4)

Country Link
US (1) US7070829B2 (de)
EP (1) EP1353176B1 (de)
JP (1) JP3711953B2 (de)
DE (1) DE60303695T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4110961B2 (ja) * 2002-12-24 2008-07-02 株式会社デンソー ガスセンサ用ガス感応膜の製造方法
TWI237112B (en) * 2003-09-03 2005-08-01 Hon Hai Prec Ind Co Ltd Gas sensor
JP2005300470A (ja) * 2004-04-15 2005-10-27 Denso Corp 積層型ガスセンサ素子の製造方法
KR100735031B1 (ko) 2004-12-22 2007-07-03 한국전자통신연구원 화학 센서
JP2007017426A (ja) * 2005-06-06 2007-01-25 National Institute Of Advanced Industrial & Technology 大気中の一酸化炭素や炭化水素の濃度を検出するガスセンサ
DE102006045532B4 (de) * 2006-09-21 2008-08-21 Siemens Ag Verfahren zum Herstellen eines chemoaktiven Sensors und Sensor mit einer chemoaktiven Nutzschicht
KR100946701B1 (ko) * 2007-12-10 2010-03-12 한국전자통신연구원 나노 결정 복합 산화물 박막, 이를 구비한 환경 가스 센서및 환경 가스 센서의 제조방법
JP4454673B2 (ja) * 2008-08-01 2010-04-21 株式会社新川 金属ナノインクとその製造方法並びにその金属ナノインクを用いるダイボンディング方法及びダイボンディング装置
EP3602025A4 (de) * 2017-03-31 2020-12-16 Innoscentia AB Sensormaterialien, verfahren zur herstellung von funktionsvorrichtungen und anwendungen davon
US11754555B2 (en) * 2018-06-14 2023-09-12 Tanaka Kikinzoku Kogyo K.K. Pad for immunochromatographic device and immunochromatographic device, immunochromatographic kit and immunochromatographic detection method using pad
DE102020127483A1 (de) 2020-10-19 2022-04-21 Turck Duotec GmbH Gassensor

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397888A (en) * 1981-01-14 1983-08-09 Westinghouse Electric Corp. Thick film sensor for hydrogen and carbon monoxide
CA1208424A (en) * 1983-02-03 1986-07-29 Sai Sakai Gas sensor
US5427740A (en) * 1991-04-05 1995-06-27 British Gas Plc Tin oxide gas sensors
GB9306594D0 (en) * 1993-03-30 1993-05-26 Univ Keele Sensor
JP3171745B2 (ja) * 1994-03-18 2001-06-04 新コスモス電機株式会社 基板型半導体式ガスセンサ及びガス検出器
JPH07318524A (ja) 1994-05-30 1995-12-08 Matsushita Seiko Co Ltd 複合ガスセンサ
JPH08145933A (ja) * 1994-11-17 1996-06-07 Nok Corp ガスセンサ素子およびその製造法
US6537498B1 (en) * 1995-03-27 2003-03-25 California Institute Of Technology Colloidal particles used in sensing arrays
DE19515820A1 (de) 1995-04-29 1996-10-31 Inst Neue Mat Gemein Gmbh Verfahren zur Herstellung schwach agglomerierter nanoskaliger Teilchen
US6139816A (en) 1997-06-09 2000-10-31 Merck Kanto Advanced Chemical Ltd Process for the preparation of ultra-fine powders of metal oxides
EP0947245B1 (de) * 1998-02-05 2004-04-07 Motorola Semiconducteurs S.A. Verfahren zur Herstellung von Metallenthaltenden Kolloidalen und Verfahren zur Herstellung von Metalloxyden enthaltenden empfindlichen Schichten für chemisches Sensorgerät
US6134946A (en) * 1998-04-29 2000-10-24 Case Western Reserve University Nano-crystalline porous tin oxide film for carbon monoxide sensing
JP3679609B2 (ja) 1998-05-28 2005-08-03 日本特殊陶業株式会社 ガスセンサ及びその製造方法
JP3577544B2 (ja) * 2000-09-18 2004-10-13 三重県 ガスセンサおよび金属酸化物薄層表面状態制御方法。
JP3942816B2 (ja) * 2000-10-25 2007-07-11 ハリマ化成株式会社 金属間のロウ付け接合方法

Also Published As

Publication number Publication date
US20030180446A1 (en) 2003-09-25
JP3711953B2 (ja) 2005-11-02
US7070829B2 (en) 2006-07-04
EP1353176B1 (de) 2006-03-01
EP1353176A3 (de) 2004-03-10
DE60303695T2 (de) 2006-11-09
EP1353176A2 (de) 2003-10-15
JP2003270184A (ja) 2003-09-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition