DE60142483D1 - Verfahren zur herstellung eines drucksensors - Google Patents

Verfahren zur herstellung eines drucksensors

Info

Publication number
DE60142483D1
DE60142483D1 DE60142483T DE60142483T DE60142483D1 DE 60142483 D1 DE60142483 D1 DE 60142483D1 DE 60142483 T DE60142483 T DE 60142483T DE 60142483 T DE60142483 T DE 60142483T DE 60142483 D1 DE60142483 D1 DE 60142483D1
Authority
DE
Germany
Prior art keywords
producing
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60142483T
Other languages
English (en)
Inventor
Takashi Masuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Application granted granted Critical
Publication of DE60142483D1 publication Critical patent/DE60142483D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE60142483T 2000-09-29 2001-10-01 Verfahren zur herstellung eines drucksensors Expired - Lifetime DE60142483D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000298160A JP4091241B2 (ja) 2000-09-29 2000-09-29 圧力センサおよび圧力センサの製造方法
PCT/JP2001/008646 WO2002027803A1 (fr) 2000-09-29 2001-10-01 Capteur de pression et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE60142483D1 true DE60142483D1 (de) 2010-08-12

Family

ID=18780160

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60142483T Expired - Lifetime DE60142483D1 (de) 2000-09-29 2001-10-01 Verfahren zur herstellung eines drucksensors

Country Status (6)

Country Link
US (1) US6904808B2 (de)
EP (1) EP1329960B1 (de)
JP (1) JP4091241B2 (de)
CN (1) CN1208843C (de)
DE (1) DE60142483D1 (de)
WO (1) WO2002027803A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3920551B2 (ja) * 2000-09-29 2007-05-30 株式会社山武 接合方法
JP3925341B2 (ja) * 2002-07-30 2007-06-06 豊田合成株式会社 結晶成長基板及び半導体発光素子の製造方法
JP4014006B2 (ja) * 2004-06-17 2007-11-28 株式会社山武 圧力センサ
JP4548771B2 (ja) * 2004-06-25 2010-09-22 株式会社山武 容量式圧力センサの製造方法
US7089790B2 (en) 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with laminated membrane
US6968744B1 (en) 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
US7093494B2 (en) 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7143652B2 (en) 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7194901B2 (en) 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
CN1764328B (zh) * 2004-10-18 2010-12-15 财团法人工业技术研究院 动态压力感测装置
WO2006042357A1 (en) * 2004-10-18 2006-04-27 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7240560B2 (en) 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US7845546B2 (en) * 2007-04-07 2010-12-07 Inficon Gmbh Method for producing a vacuum measuring cell of the membrane type
US8397508B2 (en) * 2007-11-05 2013-03-19 The Regents Of The University Of Colorado Metal ferrite spinel energy storage devices and methods for making and using same
CN101252151B (zh) * 2008-03-21 2010-09-29 韦文生 一种纳米硅异质结压敏二极管及纳米硅异质结压力传感器
EP2229967B1 (de) 2009-03-17 2020-04-15 F.Hoffmann-La Roche Ag Kanülenanordnung und ambulantes Infusionssystem mit Drucksensor aus koplanaren Schichtstapeln
KR101257608B1 (ko) 2009-03-30 2013-04-29 아즈빌주식회사 정전 용량형 압력 센서
US8141429B2 (en) * 2010-07-30 2012-03-27 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors and methods of making the same
JP5969351B2 (ja) * 2012-10-16 2016-08-17 京セラ株式会社 圧力センサ用部品
EP2920668B1 (de) * 2012-11-14 2021-11-03 GTAT Corporation Mobile elektronische vorrichtung mit ultradünner saphirabdeckplatte
JP2014126504A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
CN103148977B (zh) * 2013-02-27 2016-01-20 东南大学 基于柔性基板的具有自封装功能的无源无线压力传感器
JP2015068799A (ja) * 2013-09-30 2015-04-13 セイコーエプソン株式会社 物理量センサー、圧力センサー、高度計、電子機器および移動体
DE102013220735A1 (de) * 2013-10-14 2015-04-16 Vega Grieshaber Kg Messanordnung mit einer keramischen Messzelle
CN103674399B (zh) * 2013-12-25 2016-04-27 北京必创科技有限公司 一种应力分散mems塑封压力传感器及其制备方法
JP6126545B2 (ja) 2014-03-20 2017-05-10 アズビル株式会社 静電容量型圧力センサ
CN104931188A (zh) * 2014-03-20 2015-09-23 立锜科技股份有限公司 微机电压力计以及其制作方法
CN104062045B (zh) * 2014-06-13 2017-09-15 江苏英特神斯科技有限公司 一种压阻式压力传感器及其制造方法
CN104021843A (zh) * 2014-06-27 2014-09-03 东风电子科技股份有限公司 NOx传感器用的绝缘层浆料及其用于制备NOx传感器绝缘层的方法
JP6373104B2 (ja) * 2014-07-18 2018-08-15 株式会社フジクラ 半導体圧力センサ及び半導体圧力センサ取付構造体
CN104990651A (zh) * 2015-08-16 2015-10-21 昆山泰莱宏成传感技术有限公司 硅-蓝宝石差分电容式压力传感器及制作方法
JP6908391B2 (ja) 2017-02-17 2021-07-28 アズビル株式会社 静電容量型圧力センサ
JP6815221B2 (ja) 2017-02-17 2021-01-20 アズビル株式会社 静電容量型圧力センサ
US11083902B2 (en) * 2018-05-29 2021-08-10 International Business Machines Corporation Biosensor package
DE102018114300A1 (de) 2018-06-14 2019-12-19 Endress+Hauser SE+Co. KG Druckmesseinrichtung und Verfahren zu deren Herstellung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3404262A1 (de) * 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Kapazitiver messfuehler
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
JP2896728B2 (ja) * 1992-12-18 1999-05-31 株式会社山武 静電容量式圧力センサ
JP2852593B2 (ja) * 1993-03-11 1999-02-03 株式会社山武 静電容量式圧力センサ
JP2748079B2 (ja) * 1993-04-12 1998-05-06 山武ハネウエル株式会社 静電容量式圧力センサ
JPH0727645A (ja) * 1993-07-14 1995-01-31 Yamatake Honeywell Co Ltd 静電容量式圧力センサ
JP2865552B2 (ja) * 1994-03-15 1999-03-08 株式会社山武 静電容量式圧力センサ
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
US6167761B1 (en) * 1998-03-31 2001-01-02 Hitachi, Ltd. And Hitachi Car Engineering Co., Ltd. Capacitance type pressure sensor with capacitive elements actuated by a diaphragm
JP3771425B2 (ja) * 2000-07-04 2006-04-26 株式会社山武 容量式圧力センサおよびその製造方法

Also Published As

Publication number Publication date
WO2002027803A1 (fr) 2002-04-04
EP1329960A1 (de) 2003-07-23
EP1329960B1 (de) 2010-06-30
CN1208843C (zh) 2005-06-29
JP4091241B2 (ja) 2008-05-28
US20040007071A1 (en) 2004-01-15
EP1329960A4 (de) 2007-01-24
US6904808B2 (en) 2005-06-14
JP2002111011A (ja) 2002-04-12
CN1466780A (zh) 2004-01-07

Similar Documents

Publication Publication Date Title
DE60142483D1 (de) Verfahren zur herstellung eines drucksensors
ATA10622000A (de) Verfahren zur herstellung eines haarstreifens
DE69908129D1 (de) Verfahren zur herstellung eines kapazitiven sensors
DE60106891D1 (de) Verfahren zur herstellung eines titansilicalitformkörpers
DE602004012033D1 (de) Verfahren zur Herstellung eines Druckbehälters
DE60201421D1 (de) Verfahren zur herstellung eines wachsartigen raffinats
DE60134841D1 (de) Verfahren zur herstellung eines dehnfähigen verschlusses
DE60142320D1 (de) Verfahren zur Herstellung eines Dünnfilms
DE60136901D1 (de) Verfahren zur Herstellung eines multifunktionalen akustischen Geräts
DE59914903D1 (de) Verfahren zur Herstellung eines magnetisch-induktiven Durchflussaufnehmers
DE60114582D1 (de) Verfahren zur herstellung eines flexiblen polyurethanschaums
ATE308576T1 (de) Verfahren zur herstellung eines polyurethanmaterials
DE50302301D1 (de) Verfahren zur herstellung eines formteiles
DE60110906D1 (de) Verfahren zur herstellung eines cof-gehäuses
ATE414058T1 (de) Verfahren zur herstellung eines sulfinyl- acetamids
DE60044470D1 (de) Verfahren zur herstellung eines halbleiterelement
DE60017949D1 (de) Verfahren zur herstellung eines mehrschichtverpackungsmaterials
DE60222896D1 (de) Verfahren zur herstellung eines polyurethan-weichschaumstoffs
DE60212643D1 (de) Verfahren zur herstellung eines reifenkomponentenglieds
ATE466016T1 (de) Verfahren for zur herstellung eines 14- hydroxynormorphinon-derivats
DE10195997T1 (de) Verfahren zur Herstellung eines Produktsensors, sowie ein Produktsensor
DE50115727D1 (de) Piezoaktor und verfahren zur herstellung eines piezoaktors
DE50212805D1 (de) Verfahren zur Herstellung eines Querträgers
DE60105642D1 (de) Verfahren zur herstellung eines doppelkammerbeutels
DE60128628D1 (de) Verfahren zur Herstellung eines Gassensorelements