DE60231456D1 - Flüssigkeitsausstosskopf - Google Patents

Flüssigkeitsausstosskopf

Info

Publication number
DE60231456D1
DE60231456D1 DE60231456T DE60231456T DE60231456D1 DE 60231456 D1 DE60231456 D1 DE 60231456D1 DE 60231456 T DE60231456 T DE 60231456T DE 60231456 T DE60231456 T DE 60231456T DE 60231456 D1 DE60231456 D1 DE 60231456D1
Authority
DE
Germany
Prior art keywords
liquid droplets
element substrate
ejection
ejection head
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60231456T
Other languages
English (en)
Inventor
Masahiko Kubota
Masashi Miyagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60231456D1 publication Critical patent/DE60231456D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2002/14169—Bubble vented to the ambience
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60231456T 2001-07-11 2002-07-10 Flüssigkeitsausstosskopf Expired - Lifetime DE60231456D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001211021A JP2003025577A (ja) 2001-07-11 2001-07-11 液体吐出ヘッド

Publications (1)

Publication Number Publication Date
DE60231456D1 true DE60231456D1 (de) 2009-04-23

Family

ID=19046405

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60231456T Expired - Lifetime DE60231456D1 (de) 2001-07-11 2002-07-10 Flüssigkeitsausstosskopf

Country Status (5)

Country Link
US (2) US7036909B2 (de)
EP (1) EP1275505B1 (de)
JP (1) JP2003025577A (de)
AT (1) ATE425004T1 (de)
DE (1) DE60231456D1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6951383B2 (en) * 2000-06-20 2005-10-04 Hewlett-Packard Development Company, L.P. Fluid ejection device having a substrate to filter fluid and method of manufacture
JP3890268B2 (ja) * 2002-07-10 2007-03-07 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
JP3862624B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
JP4323947B2 (ja) * 2003-01-10 2009-09-02 キヤノン株式会社 インクジェット記録ヘッド
JP2004337734A (ja) * 2003-05-15 2004-12-02 Seiko Epson Corp 液体吐出ヘッド及びその製造方法
JP2005199430A (ja) * 2004-01-13 2005-07-28 Hitachi Home & Life Solutions Inc インクジェット記録装置
US7892903B2 (en) * 2004-02-23 2011-02-22 Asml Netherlands B.V. Device manufacturing method and substrate comprising multiple resist layers
EP1768848B1 (de) * 2004-06-28 2010-07-21 Canon Kabushiki Kaisha Verfahren zur herstellung eines flüssigkeitsausgabekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsausgabekopf
US7290860B2 (en) * 2004-08-25 2007-11-06 Lexmark International, Inc. Methods of fabricating nozzle plates
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
JP4553360B2 (ja) * 2004-12-24 2010-09-29 キヤノン株式会社 インクジェット記録ヘッド
US7614711B2 (en) 2005-07-22 2009-11-10 Fujifilm Corporation Liquid droplet ejection method and liquid droplet ejection apparatus
JP4834426B2 (ja) * 2006-03-06 2011-12-14 キヤノン株式会社 インクジェット記録ヘッドの製造方法
WO2008029650A1 (en) * 2006-09-08 2008-03-13 Canon Kabushiki Kaisha Liquid discharge head and method of manufacturing the same
JP2009119650A (ja) * 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) * 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
JP2009220286A (ja) * 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
US8398212B2 (en) * 2008-12-15 2013-03-19 Canon Kabushiki Kaisha Ink jet head and method of manufacturing the same
JP2011051274A (ja) 2009-09-03 2011-03-17 Seiko Epson Corp 液体噴射ヘッド、及び、液体噴射ヘッドの製造方法
NL1037313C2 (nl) * 2009-09-23 2011-03-28 Inno & B V Werkwijze voor het aan een wasbehandeling onderwerpen van te reinigen lucht, inrichting alsmede een werkwijze voor de vervaardiging daarvan.
US8499453B2 (en) * 2009-11-26 2013-08-06 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
JP5777374B2 (ja) * 2010-05-28 2015-09-09 キヤノン株式会社 液体吐出ヘッド
JP5491288B2 (ja) * 2010-06-04 2014-05-14 キヤノンファインテック株式会社 液体吐出ヘッドおよび液体吐出装置
US8628180B2 (en) * 2010-10-26 2014-01-14 Eastman Kodak Company Liquid dispenser including vertical outlet opening wall
JP2012121168A (ja) * 2010-12-06 2012-06-28 Canon Inc 液体吐出ヘッド及びその製造方法
EP3212414B1 (de) * 2014-10-30 2020-12-16 Hewlett-Packard Development Company, L.P. Intenstrahldruckkopf
JP6929639B2 (ja) * 2016-01-08 2021-09-01 キヤノン株式会社 液体吐出ヘッド、液体吐出装置及び液体の供給方法
US10040290B2 (en) 2016-01-08 2018-08-07 Canon Kabushiki Kaisha Liquid ejection head, liquid ejection apparatus, and method of supplying liquid
JP6381581B2 (ja) * 2016-05-30 2018-08-29 キヤノン株式会社 記録素子基板および液体吐出ヘッド
JP2018094845A (ja) 2016-12-15 2018-06-21 キヤノン株式会社 液体吐出ヘッド
US11642887B2 (en) * 2021-04-22 2023-05-09 Funai Electric Co., Ltd. Ejection head having optimized fluid ejection characteristics

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2728657A1 (de) * 1977-06-24 1979-01-04 Siemens Ag Duesenplatte fuer tintenschreibeinrichtungen
JPS54161935A (en) 1978-06-12 1979-12-22 Seiko Epson Corp Ink jet printer
US4490728A (en) * 1981-08-14 1984-12-25 Hewlett-Packard Company Thermal ink jet printer
JPS61185455A (ja) 1985-02-14 1986-08-19 Olympus Optical Co Ltd インクジエツトプリンタ
JPS61249768A (ja) 1985-04-30 1986-11-06 Olympus Optical Co Ltd インクジエツト記録装置
US4812859A (en) 1987-09-17 1989-03-14 Hewlett-Packard Company Multi-chamber ink jet recording head for color use
US4882595A (en) 1987-10-30 1989-11-21 Hewlett-Packard Company Hydraulically tuned channel architecture
JPH0174142U (de) * 1987-11-07 1989-05-19
JPH0410941A (ja) 1990-04-27 1992-01-16 Canon Inc 液滴噴射方法及び該方法を用いた記録装置
JP2783647B2 (ja) 1990-04-27 1998-08-06 キヤノン株式会社 液体噴射方法および該方法を用いた記録装置
JPH04232752A (ja) * 1990-06-24 1992-08-21 Lexmark Internatl Inc インクジエツト・プリントヘツド及びインクジエツトのプリント方法
JP3044863B2 (ja) 1991-09-27 2000-05-22 セイコーエプソン株式会社 インクジェットヘッド
US5208605A (en) * 1991-10-03 1993-05-04 Xerox Corporation Multi-resolution roofshooter printheads
CN1082444C (zh) * 1994-12-29 2002-04-10 佳能株式会社 采用具有多个喷墨加热器的喷墨头的喷墨设备
JP3229526B2 (ja) * 1995-10-26 2001-11-19 キヤノン株式会社 記録装置およびその記録データ処理方法
US6003977A (en) * 1996-02-07 1999-12-21 Hewlett-Packard Company Bubble valving for ink-jet printheads
JP3183206B2 (ja) * 1996-04-08 2001-07-09 富士ゼロックス株式会社 インクジェットプリントヘッドとその製造方法およびインクジェット記録装置
JP3559647B2 (ja) * 1996-04-22 2004-09-02 キヤノン株式会社 インクジェット記録ヘッド、インクジェットヘッドカートリッジ及びインクジェット記録装置
DE69724875T2 (de) 1996-06-26 2004-07-22 Canon K.K. Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
US6142607A (en) * 1996-08-07 2000-11-07 Minolta Co., Ltd. Ink-jet recording head
JP3674885B2 (ja) * 1996-08-07 2005-07-27 コニカミノルタホールディングス株式会社 インクジェット記録ヘッド
JPH1081011A (ja) * 1996-09-10 1998-03-31 Minolta Co Ltd インクジェット記録ヘッド
JP3586987B2 (ja) * 1996-09-13 2004-11-10 富士ゼロックス株式会社 インクジェットプリントヘッド
US6139134A (en) 1996-10-14 2000-10-31 Sony Corporation Printer
JPH10217469A (ja) * 1997-02-05 1998-08-18 Fuji Xerox Co Ltd インクジェットヘッドおよびその制御方法
US6158843A (en) * 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
US6303274B1 (en) * 1998-03-02 2001-10-16 Hewlett-Packard Company Ink chamber and orifice shape variations in an ink-jet orifice plate
JP2000015810A (ja) * 1998-06-30 2000-01-18 Matsushita Electric Ind Co Ltd インクジェット記録ヘッド
EP1020291A3 (de) * 1999-01-18 2001-04-11 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf und Verfahren zur Herstellung desselben
US6447984B1 (en) * 1999-02-10 2002-09-10 Canon Kabushiki Kaisha Liquid discharge head, method of manufacture therefor and liquid discharge recording apparatus
US6745467B1 (en) * 1999-02-10 2004-06-08 Canon Kabushiki Kaisha Method of producing a liquid discharge head
JP2000313114A (ja) * 1999-03-01 2000-11-14 Canon Inc 液体吐出制御方法およびその液体吐出装置
JP2000255072A (ja) 1999-03-10 2000-09-19 Canon Inc インクジェット記録ヘッドの製造方法およびインクジェット記録ヘッド
JP2000343702A (ja) * 1999-06-04 2000-12-12 Canon Inc 液体吐出ヘッド及び該液体吐出ヘッドを用いた液体吐出装置
EP1065059B1 (de) * 1999-07-02 2007-01-31 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, damit hergestellter Flüssigkeitsausstosskopf, Kopfkassette, Flüssigkeitsausstossvorrichtung, Verfahren zur Herstellung einer Siliziumplatte und damit hergestellte Siliziumplatte
JP2001018395A (ja) * 1999-07-02 2001-01-23 Canon Inc 液体吐出ヘッドおよびその製造方法
EP1080906A3 (de) * 1999-09-03 2002-04-24 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf, Flüssigkeitsausstossverfahren, und Flüssigkeitsausstossvorrichtung
US6533400B1 (en) * 1999-09-03 2003-03-18 Canon Kabushiki Kaisha Liquid discharging method
US6497475B1 (en) * 1999-09-03 2002-12-24 Canon Kabushiki Kaisha Liquid discharge method, head, and apparatus which suppress bubble growth at the upstream side
US6435670B1 (en) * 2000-02-15 2002-08-20 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge method, liquid discharge apparatus, recovery method for liquid discharge head, and fluid structure body
JP3584193B2 (ja) * 2000-02-15 2004-11-04 キヤノン株式会社 液体吐出ヘッド、液体吐出装置及び前記液体吐出ヘッドの製造方法

Also Published As

Publication number Publication date
ATE425004T1 (de) 2009-03-15
EP1275505A3 (de) 2003-03-05
EP1275505B1 (de) 2009-03-11
US7036909B2 (en) 2006-05-02
EP1275505A2 (de) 2003-01-15
JP2003025577A (ja) 2003-01-29
US20060125877A1 (en) 2006-06-15
US20030016270A1 (en) 2003-01-23
US7384130B2 (en) 2008-06-10

Similar Documents

Publication Publication Date Title
DE60231456D1 (de) Flüssigkeitsausstosskopf
US9156262B2 (en) Fluid ejection device with two-layer tophat
KR101257840B1 (ko) 리스트릭터용 압전 액츄에이터를 구비한 잉크젯 헤드
EP2186642B1 (de) Flüssigkeitsabgabekopf und Flüssigkeitsabgabeverfahren
ATE495016T1 (de) Thermotintenstrahldruckkopfmit symmetrischer blasenbildung
DE60332381D1 (de) Tintenstrahldruckkopfmit nahtlos überzogener heizvorrichtung
CN100519191C (zh) 流体喷射装置
US6652068B2 (en) Compact printhead and method of delivering ink to the printhead
DK1567349T3 (da) Termisk blækstråleprinthoved med lav masse af varmeanordning
JP3408060B2 (ja) 液体吐出方法および装置とこれらに用いられる液体吐出ヘッド
EP1510348A3 (de) Tintenstrahlkopfeinheit und Drucker, welcher diese aufweist
EP0855275A3 (de) Tintenstrahlaufzeichnungskopf
TW526142B (en) Ink supply structure of ink-jet print head
JP2006175822A5 (de)
JP2002127406A (ja) 液体噴射装置
ATE500060T1 (de) Selbstkühlender thermotintenstrahldruckkopf
WO2009014853A1 (en) Fluid ejection device
JP2006334935A (ja) 液体吐出ヘッド
JPH024429B2 (de)
JPS6467351A (en) Ink jet head
JP2001287376A5 (de)
JPS6112785B2 (de)
CN108906350A (zh) 一种用于精密设备的分段式喷嘴
GB2351042A (en) Ink jet printhead with pressure concentrater
ATE417736T1 (de) Tropfenflugkorrektur für tintenstrahldruckkopf mit sich bewegender düse

Legal Events

Date Code Title Description
8364 No opposition during term of opposition