DE60223514D1 - Gasphasen-aufwachseinrichtung - Google Patents
Gasphasen-aufwachseinrichtungInfo
- Publication number
- DE60223514D1 DE60223514D1 DE60223514T DE60223514T DE60223514D1 DE 60223514 D1 DE60223514 D1 DE 60223514D1 DE 60223514 T DE60223514 T DE 60223514T DE 60223514 T DE60223514 T DE 60223514T DE 60223514 D1 DE60223514 D1 DE 60223514D1
- Authority
- DE
- Germany
- Prior art keywords
- gas phase
- growing device
- phase growing
- gas
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001100848A JP3931578B2 (ja) | 2001-03-30 | 2001-03-30 | 気相成長装置 |
JP2001100848 | 2001-03-30 | ||
PCT/JP2002/002405 WO2002082516A1 (fr) | 2001-03-30 | 2002-03-14 | Dispositif de croissance de phase gazeuse |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60223514D1 true DE60223514D1 (de) | 2007-12-27 |
DE60223514T2 DE60223514T2 (de) | 2008-09-18 |
Family
ID=18954247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60223514T Expired - Lifetime DE60223514T2 (de) | 2001-03-30 | 2002-03-14 | Gasphasen-aufwachseinrichtung |
Country Status (7)
Country | Link |
---|---|
US (1) | US20030075109A1 (de) |
EP (1) | EP1376665B1 (de) |
JP (1) | JP3931578B2 (de) |
KR (1) | KR100781912B1 (de) |
DE (1) | DE60223514T2 (de) |
TW (1) | TW521326B (de) |
WO (1) | WO2002082516A1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6776873B1 (en) * | 2002-02-14 | 2004-08-17 | Jennifer Y Sun | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers |
US20050160992A1 (en) * | 2004-01-28 | 2005-07-28 | Applied Materials, Inc. | Substrate gripping apparatus |
US20050176252A1 (en) * | 2004-02-10 | 2005-08-11 | Goodman Matthew G. | Two-stage load for processing both sides of a wafer |
US7906234B2 (en) * | 2005-08-18 | 2011-03-15 | Panasonic Corporation | All-solid-state lithium secondary cell and method of manufacturing the same |
US20070089836A1 (en) * | 2005-10-24 | 2007-04-26 | Applied Materials, Inc. | Semiconductor process chamber |
EP1793021A3 (de) | 2005-12-02 | 2009-01-14 | Rohm and Haas Electronic Materials LLC | Verfahren zur Behandlung von Halbleitern unter Verwendung von einem Gegenstand aus Silizium Karbid |
US10242888B2 (en) | 2007-04-27 | 2019-03-26 | Applied Materials, Inc. | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance |
US10622194B2 (en) | 2007-04-27 | 2020-04-14 | Applied Materials, Inc. | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance |
JP5092975B2 (ja) * | 2008-07-31 | 2012-12-05 | 株式会社Sumco | エピタキシャルウェーハの製造方法 |
JP5275935B2 (ja) * | 2009-07-15 | 2013-08-28 | 株式会社ニューフレアテクノロジー | 半導体製造装置および半導体製造方法 |
US9905443B2 (en) * | 2011-03-11 | 2018-02-27 | Applied Materials, Inc. | Reflective deposition rings and substrate processing chambers incorporating same |
US20140007808A1 (en) * | 2011-07-05 | 2014-01-09 | Epicrew Corporation | Susceptor Device And Deposition Apparatus Having The Same |
JP6520050B2 (ja) * | 2014-10-31 | 2019-05-29 | 株式会社Sumco | リフトピン、該リフトピンを用いたエピタキシャル成長装置およびエピタキシャルウェーハの製造方法 |
KR101670807B1 (ko) * | 2014-12-31 | 2016-11-01 | 한국기계연구원 | 고온 국부가열 방식의 서셉터 및 이를 갖는 히팅 장치 |
KR101548903B1 (ko) | 2015-03-19 | 2015-09-04 | (주)코미코 | 리프트 핀 및 이의 제조 방법 |
JP6435992B2 (ja) * | 2015-05-29 | 2018-12-12 | 株式会社Sumco | エピタキシャル成長装置、エピタキシャルウェーハの製造方法およびエピタキシャル成長装置用リフトピン |
TWI729101B (zh) * | 2016-04-02 | 2021-06-01 | 美商應用材料股份有限公司 | 用於旋轉料架基座中的晶圓旋轉的設備及方法 |
US11264265B2 (en) * | 2017-02-02 | 2022-03-01 | Sumco Corporation | Lift pin, and epitaxial growth apparatus and method of producing silicon epitaxial wafer using the lift pin |
CN114078680B (zh) * | 2020-08-20 | 2023-09-29 | 中微半导体设备(上海)股份有限公司 | 等离子体处理装置 |
JP7203158B2 (ja) * | 2020-09-11 | 2023-01-12 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
CN114695234A (zh) * | 2020-12-31 | 2022-07-01 | 拓荆科技股份有限公司 | 保护机构及保护晶圆和销的方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01167034U (de) * | 1988-05-13 | 1989-11-22 | ||
US5421893A (en) * | 1993-02-26 | 1995-06-06 | Applied Materials, Inc. | Susceptor drive and wafer displacement mechanism |
JPH0722489A (ja) * | 1993-06-29 | 1995-01-24 | Toshiba Corp | ウェハーフォーク |
US6035101A (en) * | 1997-02-12 | 2000-03-07 | Applied Materials, Inc. | High temperature multi-layered alloy heater assembly and related methods |
US6063202A (en) * | 1997-09-26 | 2000-05-16 | Novellus Systems, Inc. | Apparatus for backside and edge exclusion of polymer film during chemical vapor deposition |
JPH11104950A (ja) * | 1997-10-03 | 1999-04-20 | Shin Etsu Chem Co Ltd | 電極板及びその製造方法 |
US5931666A (en) * | 1998-02-27 | 1999-08-03 | Saint-Gobain Industrial Ceramics, Inc. | Slip free vertical rack design having rounded horizontal arms |
JP3092801B2 (ja) * | 1998-04-28 | 2000-09-25 | 信越半導体株式会社 | 薄膜成長装置 |
US6596086B1 (en) * | 1998-04-28 | 2003-07-22 | Shin-Etsu Handotai Co., Ltd. | Apparatus for thin film growth |
US6146504A (en) * | 1998-05-21 | 2000-11-14 | Applied Materials, Inc. | Substrate support and lift apparatus and method |
JP4402763B2 (ja) * | 1999-05-13 | 2010-01-20 | Sumco Techxiv株式会社 | エピタキシャルウェーハ製造装置 |
-
2001
- 2001-03-30 JP JP2001100848A patent/JP3931578B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-14 EP EP02705172A patent/EP1376665B1/de not_active Expired - Lifetime
- 2002-03-14 US US10/276,092 patent/US20030075109A1/en not_active Abandoned
- 2002-03-14 KR KR1020027016086A patent/KR100781912B1/ko active IP Right Grant
- 2002-03-14 DE DE60223514T patent/DE60223514T2/de not_active Expired - Lifetime
- 2002-03-14 WO PCT/JP2002/002405 patent/WO2002082516A1/ja active IP Right Grant
- 2002-03-18 TW TW091105056A patent/TW521326B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20030007719A (ko) | 2003-01-23 |
EP1376665A4 (de) | 2006-11-22 |
JP2002299260A (ja) | 2002-10-11 |
US20030075109A1 (en) | 2003-04-24 |
EP1376665B1 (de) | 2007-11-14 |
EP1376665A1 (de) | 2004-01-02 |
TW521326B (en) | 2003-02-21 |
DE60223514T2 (de) | 2008-09-18 |
WO2002082516A1 (fr) | 2002-10-17 |
JP3931578B2 (ja) | 2007-06-20 |
KR100781912B1 (ko) | 2007-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |