DE60220729D1 - Testkopfpositionierungsvorrichtung - Google Patents
TestkopfpositionierungsvorrichtungInfo
- Publication number
- DE60220729D1 DE60220729D1 DE60220729T DE60220729T DE60220729D1 DE 60220729 D1 DE60220729 D1 DE 60220729D1 DE 60220729 T DE60220729 T DE 60220729T DE 60220729 T DE60220729 T DE 60220729T DE 60220729 D1 DE60220729 D1 DE 60220729D1
- Authority
- DE
- Germany
- Prior art keywords
- outer cylinder
- test head
- positioning apparatus
- piston
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/025—Arms extensible telescopic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
- B25J19/0012—Balancing devices using fluidic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
- B25J19/002—Balancing devices using counterweights
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Body Structure For Vehicles (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IB2002/004064 WO2004031782A1 (en) | 2002-10-02 | 2002-10-02 | Test head positioning apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60220729D1 true DE60220729D1 (de) | 2007-07-26 |
DE60220729T2 DE60220729T2 (de) | 2008-02-14 |
Family
ID=32051167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60220729T Expired - Lifetime DE60220729T2 (de) | 2002-10-02 | 2002-10-02 | Testkopfpositionierungsvorrichtung |
Country Status (9)
Country | Link |
---|---|
US (1) | US20060156850A1 (de) |
EP (1) | EP1549961B1 (de) |
JP (1) | JP4511354B2 (de) |
CN (1) | CN100383534C (de) |
AT (1) | ATE364844T1 (de) |
AU (1) | AU2002368253A1 (de) |
DE (1) | DE60220729T2 (de) |
HK (2) | HK1078135B (de) |
WO (1) | WO2004031782A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY127154A (en) * | 2000-09-22 | 2006-11-30 | Intest Corp | Apparatus and method for balancing and for providing a compliant range to a test head |
JP4336831B2 (ja) * | 2004-11-24 | 2009-09-30 | 東芝機械株式会社 | 産業用ロボット |
US8350584B2 (en) | 2006-12-29 | 2013-01-08 | Intest Corporation | Test head positioning system and method |
TWI490513B (zh) * | 2006-12-29 | 2015-07-01 | Intest Corp | 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法 |
DE102007011700B4 (de) * | 2007-03-09 | 2009-03-26 | Hubertus Heigl | Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung |
DE102007027698B4 (de) * | 2007-06-15 | 2011-06-22 | Airbus Operations GmbH, 21129 | Dualer Linear-Aktuator |
US7677129B2 (en) * | 2007-09-28 | 2010-03-16 | Intuitive Surgical, Inc. | Multiaxis counterbalance and positioning system using a spatial linkage |
US8212578B1 (en) | 2008-03-17 | 2012-07-03 | Intest Corporation | Test head positioner system |
US8981807B2 (en) | 2010-07-27 | 2015-03-17 | Intest Corporation | Positioner system and method of positioning |
KR101174276B1 (ko) | 2010-12-28 | 2012-08-16 | (주)피엔티 | 패키지 분류 장치 |
US8943892B2 (en) * | 2012-05-11 | 2015-02-03 | The Boeing Company | Automated inspection of spar web in hollow monolithic structure |
CN103777675B (zh) * | 2012-10-24 | 2015-07-01 | 亿和精密工业(苏州)有限公司 | 一种定位调整装置 |
KR101644329B1 (ko) * | 2015-12-30 | 2016-08-02 | (주) 네스텍코리아 | 전자부품 테스트용 자동 소켓 |
CN107478968A (zh) * | 2017-08-07 | 2017-12-15 | 纳恩博(天津)科技有限公司 | 检测工装 |
US10962590B2 (en) * | 2017-12-27 | 2021-03-30 | Spin Memory, Inc. | Magnet mounting apparatus for MTJ device testers |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1554101A (en) * | 1975-07-09 | 1979-10-17 | Herbert Ltd A | Pressure fluid operated feed drive system for a movable member |
US5149029A (en) * | 1982-08-25 | 1992-09-22 | Intest Corporation | Electronic test head positioner for test systems |
US4527942A (en) * | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
US4705447A (en) * | 1983-08-11 | 1987-11-10 | Intest Corporation | Electronic test head positioner for test systems |
DE3617741A1 (de) * | 1986-05-27 | 1987-12-03 | Heigl Helmuth | Handhabungsvorrichtung |
US6057695A (en) * | 1993-09-15 | 2000-05-02 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
JP3347844B2 (ja) * | 1993-10-12 | 2002-11-20 | エスエムシー株式会社 | バランサ |
JPH07217607A (ja) * | 1994-02-03 | 1995-08-15 | Smc Corp | 負荷の位置決め装置 |
ATE205303T1 (de) * | 1995-02-23 | 2001-09-15 | Aesop Inc | Manipulator für einen testkopf einer automatischen testanlage |
US6271657B1 (en) * | 1997-07-25 | 2001-08-07 | Advantest Corporation | Test head positioner for semiconductor device testing apparatus |
JP4319709B2 (ja) * | 1997-07-25 | 2009-08-26 | 株式会社アドバンテスト | 半導体デバイス試験装置のテストヘッド位置決め装置 |
DE60012692T2 (de) * | 1999-01-13 | 2005-09-15 | Intest Ip Corp., Wilmington | Testkopf-manipulator |
EP1200842B1 (de) * | 1999-07-14 | 2003-10-29 | Teradyne, Inc. | Manipulator für eine automatische testeinrichtung mit innerhalb des testkopfs befindlicher stütze |
MY144519A (en) * | 2000-03-01 | 2011-09-30 | Intest Corp | Vertical counter balanced test head manipulator |
MY127154A (en) * | 2000-09-22 | 2006-11-30 | Intest Corp | Apparatus and method for balancing and for providing a compliant range to a test head |
-
2002
- 2002-10-02 AU AU2002368253A patent/AU2002368253A1/en not_active Abandoned
- 2002-10-02 EP EP02807885A patent/EP1549961B1/de not_active Expired - Lifetime
- 2002-10-02 JP JP2004541009A patent/JP4511354B2/ja not_active Expired - Fee Related
- 2002-10-02 WO PCT/IB2002/004064 patent/WO2004031782A1/en active IP Right Grant
- 2002-10-02 DE DE60220729T patent/DE60220729T2/de not_active Expired - Lifetime
- 2002-10-02 CN CNB028297083A patent/CN100383534C/zh not_active Expired - Fee Related
- 2002-10-02 AT AT02807885T patent/ATE364844T1/de not_active IP Right Cessation
- 2002-10-02 US US10/529,161 patent/US20060156850A1/en not_active Abandoned
-
2006
- 2006-01-06 HK HK06100267.0A patent/HK1078135B/zh unknown
- 2006-06-14 HK HK06106797A patent/HK1086885A1/xx unknown
Also Published As
Publication number | Publication date |
---|---|
ATE364844T1 (de) | 2007-07-15 |
DE60220729T2 (de) | 2008-02-14 |
JP4511354B2 (ja) | 2010-07-28 |
WO2004031782A1 (en) | 2004-04-15 |
HK1086885A1 (en) | 2006-09-29 |
AU2002368253A1 (en) | 2004-04-23 |
EP1549961A1 (de) | 2005-07-06 |
HK1078135B (zh) | 2007-12-21 |
US20060156850A1 (en) | 2006-07-20 |
JP2006501464A (ja) | 2006-01-12 |
CN1708693A (zh) | 2005-12-14 |
HK1078135A1 (en) | 2006-03-03 |
CN100383534C (zh) | 2008-04-23 |
EP1549961B1 (de) | 2007-06-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |