DE60220729D1 - Testkopfpositionierungsvorrichtung - Google Patents

Testkopfpositionierungsvorrichtung

Info

Publication number
DE60220729D1
DE60220729D1 DE60220729T DE60220729T DE60220729D1 DE 60220729 D1 DE60220729 D1 DE 60220729D1 DE 60220729 T DE60220729 T DE 60220729T DE 60220729 T DE60220729 T DE 60220729T DE 60220729 D1 DE60220729 D1 DE 60220729D1
Authority
DE
Germany
Prior art keywords
outer cylinder
test head
positioning apparatus
piston
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60220729T
Other languages
English (en)
Other versions
DE60220729T2 (de
Inventor
Christian Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InTest Corp filed Critical InTest Corp
Application granted granted Critical
Publication of DE60220729D1 publication Critical patent/DE60220729D1/de
Publication of DE60220729T2 publication Critical patent/DE60220729T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001Arrangements compensating weight or flexion on parts of the machine
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00Arms
    • B25J18/02Arms extensible
    • B25J18/025Arms extensible telescopic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008Balancing devices
    • B25J19/0012Balancing devices using fluidic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008Balancing devices
    • B25J19/002Balancing devices using counterweights
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/20Control lever and linkage systems
    • Y10T74/20207Multiple controlling elements for single controlled element
    • Y10T74/20305Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Body Structure For Vehicles (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Die Bonding (AREA)
DE60220729T 2002-10-02 2002-10-02 Testkopfpositionierungsvorrichtung Expired - Lifetime DE60220729T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB2002/004064 WO2004031782A1 (en) 2002-10-02 2002-10-02 Test head positioning apparatus

Publications (2)

Publication Number Publication Date
DE60220729D1 true DE60220729D1 (de) 2007-07-26
DE60220729T2 DE60220729T2 (de) 2008-02-14

Family

ID=32051167

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60220729T Expired - Lifetime DE60220729T2 (de) 2002-10-02 2002-10-02 Testkopfpositionierungsvorrichtung

Country Status (9)

Country Link
US (1) US20060156850A1 (de)
EP (1) EP1549961B1 (de)
JP (1) JP4511354B2 (de)
CN (1) CN100383534C (de)
AT (1) ATE364844T1 (de)
AU (1) AU2002368253A1 (de)
DE (1) DE60220729T2 (de)
HK (2) HK1078135B (de)
WO (1) WO2004031782A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY127154A (en) * 2000-09-22 2006-11-30 Intest Corp Apparatus and method for balancing and for providing a compliant range to a test head
JP4336831B2 (ja) * 2004-11-24 2009-09-30 東芝機械株式会社 産業用ロボット
US8350584B2 (en) 2006-12-29 2013-01-08 Intest Corporation Test head positioning system and method
TWI490513B (zh) * 2006-12-29 2015-07-01 Intest Corp 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法
DE102007011700B4 (de) * 2007-03-09 2009-03-26 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
DE102007027698B4 (de) * 2007-06-15 2011-06-22 Airbus Operations GmbH, 21129 Dualer Linear-Aktuator
US7677129B2 (en) * 2007-09-28 2010-03-16 Intuitive Surgical, Inc. Multiaxis counterbalance and positioning system using a spatial linkage
US8212578B1 (en) 2008-03-17 2012-07-03 Intest Corporation Test head positioner system
US8981807B2 (en) 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
KR101174276B1 (ko) 2010-12-28 2012-08-16 (주)피엔티 패키지 분류 장치
US8943892B2 (en) * 2012-05-11 2015-02-03 The Boeing Company Automated inspection of spar web in hollow monolithic structure
CN103777675B (zh) * 2012-10-24 2015-07-01 亿和精密工业(苏州)有限公司 一种定位调整装置
KR101644329B1 (ko) * 2015-12-30 2016-08-02 (주) 네스텍코리아 전자부품 테스트용 자동 소켓
CN107478968A (zh) * 2017-08-07 2017-12-15 纳恩博(天津)科技有限公司 检测工装
US10962590B2 (en) * 2017-12-27 2021-03-30 Spin Memory, Inc. Magnet mounting apparatus for MTJ device testers

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1554101A (en) * 1975-07-09 1979-10-17 Herbert Ltd A Pressure fluid operated feed drive system for a movable member
US5149029A (en) * 1982-08-25 1992-09-22 Intest Corporation Electronic test head positioner for test systems
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
DE3617741A1 (de) * 1986-05-27 1987-12-03 Heigl Helmuth Handhabungsvorrichtung
US6057695A (en) * 1993-09-15 2000-05-02 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
JPH07217607A (ja) * 1994-02-03 1995-08-15 Smc Corp 負荷の位置決め装置
ATE205303T1 (de) * 1995-02-23 2001-09-15 Aesop Inc Manipulator für einen testkopf einer automatischen testanlage
US6271657B1 (en) * 1997-07-25 2001-08-07 Advantest Corporation Test head positioner for semiconductor device testing apparatus
JP4319709B2 (ja) * 1997-07-25 2009-08-26 株式会社アドバンテスト 半導体デバイス試験装置のテストヘッド位置決め装置
DE60012692T2 (de) * 1999-01-13 2005-09-15 Intest Ip Corp., Wilmington Testkopf-manipulator
EP1200842B1 (de) * 1999-07-14 2003-10-29 Teradyne, Inc. Manipulator für eine automatische testeinrichtung mit innerhalb des testkopfs befindlicher stütze
MY144519A (en) * 2000-03-01 2011-09-30 Intest Corp Vertical counter balanced test head manipulator
MY127154A (en) * 2000-09-22 2006-11-30 Intest Corp Apparatus and method for balancing and for providing a compliant range to a test head

Also Published As

Publication number Publication date
ATE364844T1 (de) 2007-07-15
DE60220729T2 (de) 2008-02-14
JP4511354B2 (ja) 2010-07-28
WO2004031782A1 (en) 2004-04-15
HK1086885A1 (en) 2006-09-29
AU2002368253A1 (en) 2004-04-23
EP1549961A1 (de) 2005-07-06
HK1078135B (zh) 2007-12-21
US20060156850A1 (en) 2006-07-20
JP2006501464A (ja) 2006-01-12
CN1708693A (zh) 2005-12-14
HK1078135A1 (en) 2006-03-03
CN100383534C (zh) 2008-04-23
EP1549961B1 (de) 2007-06-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition