DE60213835D1 - Verfahren und vorrichtung zur behandlung von fluor enthaldenden verbindungen enthaldendem gas - Google Patents

Verfahren und vorrichtung zur behandlung von fluor enthaldenden verbindungen enthaldendem gas

Info

Publication number
DE60213835D1
DE60213835D1 DE60213835T DE60213835T DE60213835D1 DE 60213835 D1 DE60213835 D1 DE 60213835D1 DE 60213835 T DE60213835 T DE 60213835T DE 60213835 T DE60213835 T DE 60213835T DE 60213835 D1 DE60213835 D1 DE 60213835D1
Authority
DE
Germany
Prior art keywords
fluor
treating
containing compounds
related gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60213835T
Other languages
English (en)
Other versions
DE60213835T2 (de
Inventor
Yoichi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE60213835D1 publication Critical patent/DE60213835D1/de
Publication of DE60213835T2 publication Critical patent/DE60213835T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B01D53/8662—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20715—Zirconium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20776—Tungsten
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/209—Other metals
    • B01D2255/2092—Aluminium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE60213835T 2001-10-10 2002-10-09 Verfahren und vorrichtung zur behandlung von fluor enthaldenden verbindungen enthaldendem gas Expired - Fee Related DE60213835T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001312565 2001-10-10
JP2001312565A JP4065672B2 (ja) 2001-10-10 2001-10-10 フッ素含有化合物を含む排ガスの処理方法及び装置
PCT/JP2002/010475 WO2003033116A1 (en) 2001-10-10 2002-10-09 Method and apparatus for treating exhaust gases containing fluorine-containing compounds

Publications (2)

Publication Number Publication Date
DE60213835D1 true DE60213835D1 (de) 2006-09-21
DE60213835T2 DE60213835T2 (de) 2007-03-15

Family

ID=19131201

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60213835T Expired - Fee Related DE60213835T2 (de) 2001-10-10 2002-10-09 Verfahren und vorrichtung zur behandlung von fluor enthaldenden verbindungen enthaldendem gas

Country Status (7)

Country Link
US (1) US7556787B2 (de)
EP (2) EP1609520A1 (de)
JP (1) JP4065672B2 (de)
KR (1) KR100939307B1 (de)
DE (1) DE60213835T2 (de)
TW (2) TWI248832B (de)
WO (1) WO2003033116A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4459648B2 (ja) * 2004-02-17 2010-04-28 株式会社荏原製作所 フッ素含有化合物を含むガスの処理方法及び装置
JP4675148B2 (ja) * 2005-05-12 2011-04-20 昭和電工株式会社 フッ素化合物含有ガスの処理方法及び処理装置
US20100112191A1 (en) * 2008-10-30 2010-05-06 Micron Technology, Inc. Systems and associated methods for depositing materials
US20110318932A1 (en) * 2010-06-28 2011-12-29 Uop Llc Pyrolysis Methods, Catalysts, and Apparatuses for Treating and/or Detecting Gas Contaminants
KR101383985B1 (ko) * 2013-11-05 2014-04-15 (주) 일하하이텍 배기가스 배출 장치
WO2017146554A1 (ko) * 2016-02-25 2017-08-31 주식회사 에코프로 과불화 화합물 분해용 내산성 촉매 및 이의 용도
CN106178925A (zh) * 2016-08-26 2016-12-07 安徽中科艾克西玛光电科技有限公司 一种小型干式含氟废气过滤器
CN112495138A (zh) * 2020-12-03 2021-03-16 天长市富信电子有限公司 一种屏线生产用废气净化装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2569421B2 (ja) * 1993-09-10 1997-01-08 九州大学長 弗素化合物ガスの分解処理用触媒
DE19719834A1 (de) 1997-05-12 1998-11-19 Cs Halbleiter Solartech Verfahren zur Reinigung von Gasen
US6602480B1 (en) 1998-08-17 2003-08-05 Ebara Corporation Method for treating waste gas containing fluorochemical
EP1205234B1 (de) 1999-06-09 2010-03-17 Hitachi, Ltd. Verfahren und vorrichtung zum entfernen von fluorhaltigen verbindungen durch zersetzung
WO2001008786A1 (en) 1999-07-28 2001-02-08 Applied Materials, Inc. Method and apparatus for catalytic conversion of fluorinated compounds in gases
JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP2001293335A (ja) * 2000-04-12 2001-10-23 Ebara Corp フッ素含有化合物を含む排ガスの処理方法

Also Published As

Publication number Publication date
TW200539933A (en) 2005-12-16
DE60213835T2 (de) 2007-03-15
TWI306776B (en) 2009-03-01
WO2003033116A1 (en) 2003-04-24
EP1609520A1 (de) 2005-12-28
KR20040047770A (ko) 2004-06-05
KR100939307B1 (ko) 2010-01-28
JP2003117350A (ja) 2003-04-22
EP1434644B1 (de) 2006-08-09
EP1434644A1 (de) 2004-07-07
TWI248832B (en) 2006-02-11
US20040191147A1 (en) 2004-09-30
US7556787B2 (en) 2009-07-07
JP4065672B2 (ja) 2008-03-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee