DE60206470D1 - Saw-bauelement und verfahren zu seiner herstellung - Google Patents

Saw-bauelement und verfahren zu seiner herstellung

Info

Publication number
DE60206470D1
DE60206470D1 DE60206470T DE60206470T DE60206470D1 DE 60206470 D1 DE60206470 D1 DE 60206470D1 DE 60206470 T DE60206470 T DE 60206470T DE 60206470 T DE60206470 T DE 60206470T DE 60206470 D1 DE60206470 D1 DE 60206470D1
Authority
DE
Germany
Prior art keywords
production
saw component
saw
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60206470T
Other languages
English (en)
Other versions
DE60206470T2 (de
Inventor
Satoshi Matsuo
Takashi Inoue
Yoshiki Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60206470D1 publication Critical patent/DE60206470D1/de
Publication of DE60206470T2 publication Critical patent/DE60206470T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02937—Means for compensation or elimination of undesirable effects of chemical damage, e.g. corrosion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02984—Protection measures against damaging
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
DE2002606470 2001-01-15 2002-01-09 Saw-bauelement und verfahren zu seiner herstellung Expired - Fee Related DE60206470T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001006031 2001-01-15
JP2001006031 2001-01-15
PCT/JP2002/000032 WO2002056465A1 (fr) 2001-01-15 2002-01-09 Dispositif saw et procede de production de ce dispositif

Publications (2)

Publication Number Publication Date
DE60206470D1 true DE60206470D1 (de) 2006-02-16
DE60206470T2 DE60206470T2 (de) 2006-05-11

Family

ID=18873986

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002606470 Expired - Fee Related DE60206470T2 (de) 2001-01-15 2002-01-09 Saw-bauelement und verfahren zu seiner herstellung

Country Status (8)

Country Link
US (1) US20030111936A1 (de)
EP (1) EP1353441B1 (de)
JP (1) JP3818258B2 (de)
KR (1) KR100479287B1 (de)
CN (1) CN1209870C (de)
DE (1) DE60206470T2 (de)
TW (1) TW513855B (de)
WO (1) WO2002056465A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3926633B2 (ja) * 2001-06-22 2007-06-06 沖電気工業株式会社 Ｓａｗデバイス及びその製造方法
WO2006042116A2 (en) * 2004-10-05 2006-04-20 Applied Thin Films, Inc. Aluminum phosphate compositions, coatings and related composites
WO2007088788A1 (ja) * 2006-01-31 2007-08-09 National University Corporation Chiba University 弾性表面波装置
FI20060389L (fi) * 2006-04-21 2007-10-22 Environics Oy Sensori
JP2012160979A (ja) * 2011-02-01 2012-08-23 Taiyo Yuden Co Ltd 弾性波デバイス及びその製造方法
CN112179981A (zh) * 2020-09-30 2021-01-05 湖南大学 一种声表面波传感器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3799804A (en) * 1972-01-03 1974-03-26 Honeywell Bull Soc Ind Process and apparatus for obtaining wire for magnetic memories
DE2749294A1 (de) * 1977-11-03 1979-05-10 Siemens Ag Verfahren um herstellen einer halbleitervorrichtung
JPS6220351A (ja) * 1985-07-18 1987-01-28 Nec Corp 半導体装置
US5857250A (en) * 1994-10-25 1999-01-12 Texas Instruments Incorporated Method of forming a capacitance type gaseous sensing device and apparatus thereof
JP2929987B2 (ja) * 1996-01-12 1999-08-03 日本電気株式会社 弾性表面波装置の製造方法
JPH10163800A (ja) * 1996-11-25 1998-06-19 Sanyo Electric Co Ltd 弾性表面波装置及びその製造方法
DE19758198A1 (de) * 1997-12-30 1999-08-19 Siemens Ag Oberflächenwellen-(SAW-)Bauelement auf auch pyroelektrischem Einkristall-Substrat
JP2000261283A (ja) * 1999-03-04 2000-09-22 Kyocera Corp 弾性表面波装置
WO2001041304A1 (fr) * 1999-11-30 2001-06-07 Tdk Corporation Dispositif a onde acoustique de surface et procede de production correspondant
JP3345779B2 (ja) * 2000-07-18 2002-11-18 セイコーエプソン株式会社 Ｓａｗチップ及びこれを利用したｓａｗデバイスの製造方法
JP3379518B2 (ja) * 2000-08-14 2003-02-24 株式会社村田製作所 圧電素子の製造方法

Also Published As

Publication number Publication date
US20030111936A1 (en) 2003-06-19
EP1353441B1 (de) 2005-10-05
JP3818258B2 (ja) 2006-09-06
CN1209870C (zh) 2005-07-06
JPWO2002056465A1 (ja) 2004-05-20
KR20020082871A (ko) 2002-10-31
KR100479287B1 (ko) 2005-03-28
DE60206470T2 (de) 2006-05-11
EP1353441A1 (de) 2003-10-15
EP1353441A4 (de) 2005-03-09
TW513855B (en) 2002-12-11
WO2002056465A1 (fr) 2002-07-18
CN1455986A (zh) 2003-11-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8339 Ceased/non-payment of the annual fee