DE602009000618D1 - Instrument und Verfahren zur Oberflächenstrukturmessung - Google Patents

Instrument und Verfahren zur Oberflächenstrukturmessung

Info

Publication number
DE602009000618D1
DE602009000618D1 DE602009000618T DE602009000618T DE602009000618D1 DE 602009000618 D1 DE602009000618 D1 DE 602009000618D1 DE 602009000618 T DE602009000618 T DE 602009000618T DE 602009000618 T DE602009000618 T DE 602009000618T DE 602009000618 D1 DE602009000618 D1 DE 602009000618D1
Authority
DE
Germany
Prior art keywords
workpiece
measurement
controller
inclination angle
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602009000618T
Other languages
English (en)
Inventor
Toshihiro Kanematsu
Hideki Mishima
Nobuyuki Hama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602009000618D1 publication Critical patent/DE602009000618D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Coating With Molten Metal (AREA)
DE602009000618T 2008-07-28 2009-07-27 Instrument und Verfahren zur Oberflächenstrukturmessung Active DE602009000618D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008193884A JP5270246B2 (ja) 2008-07-28 2008-07-28 表面性状測定機および測定方法

Publications (1)

Publication Number Publication Date
DE602009000618D1 true DE602009000618D1 (de) 2011-03-03

Family

ID=41170948

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602009000618T Active DE602009000618D1 (de) 2008-07-28 2009-07-27 Instrument und Verfahren zur Oberflächenstrukturmessung

Country Status (5)

Country Link
US (1) US8276435B2 (de)
EP (1) EP2149774B1 (de)
JP (1) JP5270246B2 (de)
AT (1) ATE496275T1 (de)
DE (1) DE602009000618D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7874079B2 (en) * 2007-02-06 2011-01-25 National Optronics, Inc. Holding mechanism for use with an ophthalmic tracer, and method
EP2270468B1 (de) * 2009-05-26 2018-06-20 E. I. du Pont de Nemours and Company Vorrichtung zur Bestimmung der Schnittbeständigkeit
TWM477342U (zh) * 2013-09-25 2014-05-01 China Steel Corp 加工機台之量測裝置
TWI558978B (zh) * 2015-06-24 2016-11-21 智泰科技股份有限公司 真圓度量測裝置及真圓度量測方法
CN106017250A (zh) * 2016-06-23 2016-10-12 山东钢铁股份有限公司 一种大型结构件的高精度测量仪器
JP6777589B2 (ja) * 2017-05-24 2020-10-28 株式会社ミツトヨ 表面性状測定装置
JP7384675B2 (ja) * 2020-01-15 2023-11-21 株式会社ディスコ 傾き調整機構
US11555693B2 (en) 2020-05-12 2023-01-17 The Boeing Company Measurement of surface profiles using unmanned aerial vehicles
CN114413729B (zh) * 2021-12-22 2024-07-19 浙江零跑科技股份有限公司 一种车辆金属装饰亮条检具
CN114608424B (zh) * 2022-03-19 2023-03-24 南昌航空大学 一种地下建筑工程平整度检测仪

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3769350D1 (de) * 1986-03-04 1991-05-23 Rank Taylor Hobson Ltd Positionskontrolle eines zu bearbeitenden werkstuecks.
JPH0419461Y2 (de) * 1987-04-06 1992-05-01
JP2607952B2 (ja) * 1989-03-23 1997-05-07 株式会社 ミツトヨ 表面粗さ測定装置
JPH0830743B2 (ja) * 1991-03-07 1996-03-27 株式会社ミツトヨ レベリング装置
JP3064184B2 (ja) * 1994-07-12 2000-07-12 株式会社ミツトヨ 形状測定機
JPH0886631A (ja) * 1994-07-22 1996-04-02 Toray Ind Inc 物体の姿勢測定装置、姿勢測定方法、姿勢制御装置および物体表面の検査装置
JP3482362B2 (ja) * 1999-01-12 2003-12-22 株式会社ミツトヨ 表面性状測定機、表面性状測定機用の傾斜調整装置および表面性状測定機における測定対象物の姿勢調整方法
US6745616B1 (en) * 1999-10-21 2004-06-08 Mitutoyo Corporation Surface texture measuring machine, leveling device for surface texture measuring machine and orientation-adjusting method of workpiece of surface texture measuring machine
TW550375B (en) * 2001-09-07 2003-09-01 Olympus Optical Co Apparatus for measuring a surface profile
EP1703252A1 (de) * 2005-03-07 2006-09-20 Mitutoyo Corporation Verfahren und Computerprogramm zum Nivellieren eines Werkstücks
JP5441302B2 (ja) * 2006-11-28 2014-03-12 キヤノン株式会社 形状測定装置

Also Published As

Publication number Publication date
JP2010032322A (ja) 2010-02-12
US20100018298A1 (en) 2010-01-28
US8276435B2 (en) 2012-10-02
EP2149774B1 (de) 2011-01-19
EP2149774A1 (de) 2010-02-03
ATE496275T1 (de) 2011-02-15
JP5270246B2 (ja) 2013-08-21

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