DE602008005354D1 - Kaltfeldemitter - Google Patents

Kaltfeldemitter

Info

Publication number
DE602008005354D1
DE602008005354D1 DE602008005354T DE602008005354T DE602008005354D1 DE 602008005354 D1 DE602008005354 D1 DE 602008005354D1 DE 602008005354 T DE602008005354 T DE 602008005354T DE 602008005354 T DE602008005354 T DE 602008005354T DE 602008005354 D1 DE602008005354 D1 DE 602008005354D1
Authority
DE
Germany
Prior art keywords
emitter
cold field
field emitters
coating
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008005354T
Other languages
English (en)
Inventor
Theodore Ii Tessner
Gregory Schwind
Lynwood Swanson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of DE602008005354D1 publication Critical patent/DE602008005354D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044—Point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06341—Field emission

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Inorganic Insulating Materials (AREA)
  • Bipolar Transistors (AREA)
DE602008005354T 2007-01-24 2008-01-23 Kaltfeldemitter Active DE602008005354D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89736907P 2007-01-24 2007-01-24
US11/900,956 US7888654B2 (en) 2007-01-24 2007-09-14 Cold field emitter

Publications (1)

Publication Number Publication Date
DE602008005354D1 true DE602008005354D1 (de) 2011-04-21

Family

ID=39301320

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008005354T Active DE602008005354D1 (de) 2007-01-24 2008-01-23 Kaltfeldemitter

Country Status (5)

Country Link
US (2) US7888654B2 (de)
EP (1) EP1950786B1 (de)
JP (1) JP5301168B2 (de)
AT (1) ATE501520T1 (de)
DE (1) DE602008005354D1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter
DE112009001537B8 (de) * 2008-06-20 2019-01-24 Hitachi High-Technologies Corporation Vorrichtung mit geladenem Teilchenstrahl und Verfahren zum Steuern der Vorrichtung
DE102008049654B4 (de) 2008-09-30 2024-08-01 Carl Zeiss Microscopy Gmbh Elektronenstrahlquelle, Elektronenstrahlsystem mit derselben, Verfahren zur Herstellung der Elektronenstrahlquelle sowie deren Verwendung
WO2010144267A1 (en) * 2009-06-12 2010-12-16 Carl Zeiss Nts, Llc Method and system for heating a tip apex of a charged particle source
JP2011076753A (ja) * 2009-09-29 2011-04-14 Denki Kagaku Kogyo Kk 電子源及び電子機器
JP5455700B2 (ja) 2010-02-18 2014-03-26 株式会社日立ハイテクノロジーズ 電界放出電子銃及びその制御方法
JP5363413B2 (ja) * 2010-05-10 2013-12-11 電気化学工業株式会社 電子源
DE112011102643B4 (de) * 2010-08-06 2023-05-17 Hitachi High-Tech Corporation Gasfeld-Ionenquelle, Ionenstrahl-Vorrichtung und Emitterspitze sowie Verfahren zur Herstellung derselben
KR101027397B1 (ko) 2010-08-27 2011-04-11 손호섭 전기 및 전자 소자의 검사를 위한 초소형 전자칼럼용 텅스텐 ｃｆｅ의 제조 방법
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source
US8536773B2 (en) * 2011-03-30 2013-09-17 Carl Zeiss Microscopy Gmbh Electron beam source and method of manufacturing the same
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
US10790403B1 (en) 2013-03-14 2020-09-29 nVizix LLC Microfabricated vacuum photodiode arrays for solar power
JP6345273B2 (ja) 2014-12-26 2018-06-20 株式会社日立ハイテクノロジーズ 複合荷電粒子線装置およびその制御方法
US9984846B2 (en) 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
JP2019527918A (ja) 2016-08-08 2019-10-03 エーエスエムエル ネザーランズ ビー．ブイ． 電子エミッタ及びそれを製作する方法
US9847208B1 (en) * 2016-08-10 2017-12-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electron beam device, cold field emitter, and method for regeneration of a cold field emitter
US10410827B2 (en) 2017-05-03 2019-09-10 Fei Company Gun lens design in a charged particle microscope
CN110709959B (zh) 2017-05-25 2022-05-13 新加坡国立大学 用于冷场电子发射的阴极结构及其制备方法
FR3074955B1 (fr) * 2017-12-07 2021-01-08 Thales Sa Source d'electrons a commande optique amelioree
CN109936906B (zh) * 2017-12-15 2024-03-08 中国科学院大连化学物理研究所 光阴极电子枪射频同步慢飘抑制装置
CN111048373B (zh) * 2018-10-12 2021-04-27 中国电子科技集团公司第三十八研究所 一种电子源再生方法
US11417492B2 (en) 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source
US11823862B2 (en) * 2021-12-29 2023-11-21 Nuflare Technology, Inc. Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE)
US11651924B1 (en) 2022-06-22 2023-05-16 Fei Company Method of producing microrods for electron emitters, and associated microrods and electron emitters
US11848169B1 (en) * 2023-01-21 2023-12-19 Dazhi Chen Field-emission type electron source and charged particle beam device using the same

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
GB1477458A (en) 1974-10-28 1977-06-22 Shah J Specimen stages for electron beam instruments
JPS5661733A (en) 1979-10-24 1981-05-27 Hitachi Ltd Field emission cathode and its manufacture
JPS5971232A (ja) * 1982-10-14 1984-04-21 Natl Inst For Res In Inorg Mater 表面酸化型炭化物フィールドエミッターの製造法
JPS61190830A (ja) * 1984-12-27 1986-08-25 Natl Inst For Res In Inorg Mater チタンオキシカーバイドエミッターの製造方法
EP0366851B1 (de) * 1988-11-01 1994-02-16 International Business Machines Corporation Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
JPH08250054A (ja) * 1995-03-14 1996-09-27 Hitachi Ltd 拡散補給型電子線源およびそれを用いた電子線装置
US6680562B1 (en) * 1999-08-20 2004-01-20 Fei Company Schottky emitter having extended life
US6771013B2 (en) * 2000-10-17 2004-08-03 Fei Company Low power schottky emitter
JP2003100244A (ja) * 2001-09-26 2003-04-04 Jeol Ltd 電子ビーム源
US6798126B2 (en) * 2002-05-03 2004-09-28 Fei Company High angular intensity Schottky electron point source
EP1858047B1 (de) * 2005-01-14 2012-06-27 Denki Kagaku Kogyo Kabushiki Kaisha Herstellungsverfahren für eine elektronenquelle
EP1892740B1 (de) * 2005-06-17 2011-10-05 Sumitomo Electric Industries, Ltd. Diamantenelektronen-emissionskathode, elektronenemissionsquelle, elektronenmikroskop und elektronenstrahlbelichtungsvorrichtung
EP1993119B1 (de) * 2005-09-05 2017-11-08 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung zur Emission geladener Teilchen und Verfahren zum Betrieb einer Vorrichtung zur Emission geladener Teilchen
EP1777730B1 (de) * 2005-10-19 2018-05-30 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Anordnung und Verfahren zum Kompensieren von Vibrationen von Emitterspitzen
US7544523B2 (en) * 2005-12-23 2009-06-09 Fei Company Method of fabricating nanodevices
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter

Also Published As

Publication number Publication date
ATE501520T1 (de) 2011-03-15
EP1950786B1 (de) 2011-03-09
US7888654B2 (en) 2011-02-15
EP1950786A2 (de) 2008-07-30
JP5301168B2 (ja) 2013-09-25
US20110101238A1 (en) 2011-05-05
US20080174225A1 (en) 2008-07-24
US8217565B2 (en) 2012-07-10
JP2008181876A (ja) 2008-08-07
EP1950786A3 (de) 2009-03-25

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