FR3074955B1 - Source d'electrons a commande optique amelioree - Google Patents
Source d'electrons a commande optique amelioree Download PDFInfo
- Publication number
- FR3074955B1 FR3074955B1 FR1701284A FR1701284A FR3074955B1 FR 3074955 B1 FR3074955 B1 FR 3074955B1 FR 1701284 A FR1701284 A FR 1701284A FR 1701284 A FR1701284 A FR 1701284A FR 3074955 B1 FR3074955 B1 FR 3074955B1
- Authority
- FR
- France
- Prior art keywords
- electron source
- controlled electron
- optically controlled
- improved optically
- monolayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002356 single layer Substances 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
- H01J1/3044—Point emitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
- H01J29/481—Electron guns using field-emission, photo-emission, or secondary-emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30407—Microengineered point emitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30407—Microengineered point emitters
- H01J2201/30411—Microengineered point emitters conical shaped, e.g. Spindt type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30407—Microengineered point emitters
- H01J2201/30415—Microengineered point emitters needle shaped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30434—Nanotubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06333—Photo emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06341—Field emission
Abstract
L'invention concerne une source d'électrons (100) à commande optique comprenant au moins une pointe (P) réalisée en un matériau conducteur (Cond) dont la surface au voisinage de l'apex est recouverte d'au moins une monocouche (L) d'un semiconducteur bidimensionnel (semi2D), une monocouche comprenant entre 1 et 5 plans atomiques.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1701284A FR3074955B1 (fr) | 2017-12-07 | 2017-12-07 | Source d'electrons a commande optique amelioree |
PCT/EP2018/083342 WO2019110502A1 (fr) | 2017-12-07 | 2018-12-03 | Source d'électrons à commande optique améliorée |
EP18811032.4A EP3721464A1 (fr) | 2017-12-07 | 2018-12-03 | Source d'électrons à commande optique améliorée |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1701284 | 2017-12-07 | ||
FR1701284A FR3074955B1 (fr) | 2017-12-07 | 2017-12-07 | Source d'electrons a commande optique amelioree |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3074955A1 FR3074955A1 (fr) | 2019-06-14 |
FR3074955B1 true FR3074955B1 (fr) | 2021-01-08 |
Family
ID=62749009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1701284A Active FR3074955B1 (fr) | 2017-12-07 | 2017-12-07 | Source d'electrons a commande optique amelioree |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3721464A1 (fr) |
FR (1) | FR3074955B1 (fr) |
WO (1) | WO2019110502A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113205987B (zh) * | 2021-04-07 | 2022-06-17 | 清华大学 | 基于多层二维材料的平面光致电子发射源 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10245052A1 (de) * | 2002-09-26 | 2004-04-08 | Leo Elektronenmikroskopie Gmbh | Elektronenstrahlquelle und elektronenoptischer Apparat mit einer solchen |
GB0412538D0 (en) * | 2004-06-04 | 2004-07-07 | Council Cent Lab Res Councils | Time resolving microscope and chemical specificity microscope |
EP1705684A1 (fr) * | 2005-03-22 | 2006-09-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Emetteur stabilisé et méthode pour le stabiliser |
US7888654B2 (en) * | 2007-01-24 | 2011-02-15 | Fei Company | Cold field emitter |
JP4975095B2 (ja) * | 2007-03-29 | 2012-07-11 | 株式会社アドバンテスト | 電子銃及び電子ビーム露光装置 |
FR2926924B1 (fr) * | 2008-01-25 | 2012-10-12 | Thales Sa | Source radiogene comprenant au moins une source d'electrons associee a un dispositif photoelectrique de commande |
US8518542B2 (en) * | 2009-05-26 | 2013-08-27 | Life Technology Research Institute, Inc. | Carbon film and carbon film structure |
FR3002526B1 (fr) * | 2013-02-22 | 2015-10-16 | Thales Sa | Procede de fabrication d'un nanotube de carbone multi-parois; nanotube, source d'electrons et dispositif associes |
JP6192097B2 (ja) * | 2013-05-31 | 2017-09-06 | 国立研究開発法人物質・材料研究機構 | フォトカソード型電子線源、その作成方法及びフォトカソード型電子線源システム |
US9837239B2 (en) * | 2013-11-07 | 2017-12-05 | Gregory Hirsch | Techniques for optimizing nanotips derived from frozen taylor cones |
CN106383250B (zh) * | 2016-10-11 | 2020-05-19 | 中山大学 | 一种采用二维原子晶体材料的扫描隧道显微镜探针 |
-
2017
- 2017-12-07 FR FR1701284A patent/FR3074955B1/fr active Active
-
2018
- 2018-12-03 EP EP18811032.4A patent/EP3721464A1/fr active Pending
- 2018-12-03 WO PCT/EP2018/083342 patent/WO2019110502A1/fr unknown
Also Published As
Publication number | Publication date |
---|---|
FR3074955A1 (fr) | 2019-06-14 |
WO2019110502A1 (fr) | 2019-06-13 |
EP3721464A1 (fr) | 2020-10-14 |
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Legal Events
Date | Code | Title | Description |
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PLSC | Publication of the preliminary search report |
Effective date: 20190614 |
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Year of fee payment: 3 |
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PLFP | Fee payment |
Year of fee payment: 4 |
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PLFP | Fee payment |
Year of fee payment: 5 |
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PLFP | Fee payment |
Year of fee payment: 6 |
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PLFP | Fee payment |
Year of fee payment: 7 |