DE602008001207D1 - Maßstab für einen Oberflächenreflexionsgeber - Google Patents

Maßstab für einen Oberflächenreflexionsgeber

Info

Publication number
DE602008001207D1
DE602008001207D1 DE200860001207 DE602008001207T DE602008001207D1 DE 602008001207 D1 DE602008001207 D1 DE 602008001207D1 DE 200860001207 DE200860001207 DE 200860001207 DE 602008001207 T DE602008001207 T DE 602008001207T DE 602008001207 D1 DE602008001207 D1 DE 602008001207D1
Authority
DE
Germany
Prior art keywords
scale
surface reflection
reflection transmitter
transmitter
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200860001207
Other languages
English (en)
Inventor
Fujio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602008001207D1 publication Critical patent/DE602008001207D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Transform (AREA)
DE200860001207 2007-06-19 2008-06-18 Maßstab für einen Oberflächenreflexionsgeber Active DE602008001207D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007161168A JP4971047B2 (ja) 2007-06-19 2007-06-19 表面反射型エンコーダ用スケール及びそれを用いた表面反射型エンコーダ

Publications (1)

Publication Number Publication Date
DE602008001207D1 true DE602008001207D1 (de) 2010-06-24

Family

ID=39761115

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200860001207 Active DE602008001207D1 (de) 2007-06-19 2008-06-18 Maßstab für einen Oberflächenreflexionsgeber

Country Status (5)

Country Link
US (1) US7916305B2 (de)
EP (1) EP2006712B1 (de)
JP (1) JP4971047B2 (de)
CN (1) CN101329186B (de)
DE (1) DE602008001207D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2524569C (en) 2002-05-03 2013-10-22 Duke University A method of regulating gene expression
JP5846686B2 (ja) * 2011-11-22 2016-01-20 株式会社ミツトヨ 光電式エンコーダのスケールの製造方法
CN102519496B (zh) * 2011-11-25 2014-04-16 上海交通大学 直线运动检测装置
JP2013195180A (ja) * 2012-03-19 2013-09-30 Canon Inc 変位測定装置および画像形成装置
JP6355349B2 (ja) * 2014-02-04 2018-07-11 株式会社ミツトヨ リニアエンコーダ
CN104019827A (zh) * 2014-06-10 2014-09-03 北京路桥瑞通养护中心有限公司 道路3d数据采集车数字里程传感器系统
WO2017036717A2 (en) * 2015-09-03 2017-03-09 Asml Netherlands B.V. Beam splitting apparatus
CN107290812A (zh) * 2016-03-31 2017-10-24 株式会社岛津制作所 衍射光栅的制造方法、衍射效率计算方法及衍射光栅
US11333807B2 (en) * 2017-06-08 2022-05-17 Lawrence Livermore National Security, Llc Metal-overcoated grating and method
JP2021014990A (ja) * 2017-11-08 2021-02-12 アルプスアルパイン株式会社 反射型光学式エンコーダのコード板
JP2021192010A (ja) 2020-06-05 2021-12-16 株式会社ミツトヨ スケールおよびその製造方法
FR3111979B1 (fr) * 2020-06-30 2023-03-24 Codechamp Revetement reflechissant des moyens de reflexion d’un codeur optique et codeur optique ainsi realise

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5112435A (en) * 1985-10-11 1992-05-12 Applied Materials, Inc. Materials and methods for etching silicides, polycrystalline silicon and polycides
JPH07113905A (ja) * 1993-10-15 1995-05-02 Ricoh Co Ltd 回折格子作製方法
ATE210832T1 (de) * 1995-04-13 2001-12-15 Heidenhain Gmbh Dr Johannes Ma stab und verfahren zur herstellung eines ma stabes sowie positionsmesseinrichtung
DE19652563A1 (de) * 1996-12-17 1998-06-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE59912617D1 (de) * 1998-08-01 2006-02-16 Heidenhain Gmbh Dr Johannes Rotatorische Positionsmesseinrichtung
US6762880B2 (en) * 2001-02-21 2004-07-13 Ibsen Photonics A/S Grating structures and methods of making the grating structures
JP2004077295A (ja) * 2002-08-19 2004-03-11 Mitsutoyo Corp エンコーダ
JP4358583B2 (ja) 2003-09-12 2009-11-04 株式会社ミツトヨ スケールの製造方法
CN100397045C (zh) * 2004-01-26 2008-06-25 三丰株式会社 标尺的制造方法和光电式编码器
JP4913345B2 (ja) 2004-01-26 2012-04-11 株式会社ミツトヨ 反射型光電式エンコーダ用スケール、スケールの製造方法及び光電式エンコーダ
JP2005309413A (ja) * 2004-03-26 2005-11-04 Nippon Sheet Glass Co Ltd 光学素子およびそれを用いた分波素子
US7109472B2 (en) * 2004-03-26 2006-09-19 Mitutoyo Corporation Scale for reflective photoelectric encoder and reflective photoelectric encoder
JP4833543B2 (ja) * 2004-12-09 2011-12-07 株式会社ミツトヨ 光電式エンコーダ、それに用いるスケール及びその製造方法
JP2006293089A (ja) * 2005-04-12 2006-10-26 Sony Corp 位相シフト量設定方法、並びに、位相シフト型のフォトマスク及びその作製方法

Also Published As

Publication number Publication date
CN101329186A (zh) 2008-12-24
US20080316493A1 (en) 2008-12-25
CN101329186B (zh) 2010-12-15
US7916305B2 (en) 2011-03-29
JP2009002670A (ja) 2009-01-08
EP2006712A2 (de) 2008-12-24
EP2006712B1 (de) 2010-05-12
JP4971047B2 (ja) 2012-07-11
EP2006712A3 (de) 2009-05-06

Similar Documents

Publication Publication Date Title
DE602008001207D1 (de) Maßstab für einen Oberflächenreflexionsgeber
DE602007009840D1 (de) Kalibrierverfahren für einen turbolader
DE602007010435D1 (de) Tassenhalter für einen kinderwagen
DE602008000157D1 (de) Linsenanordnung für einen chromatischen Abstandssensor
GB2448044B (en) Communicating measurement data from a well
DE502007001858D1 (de) Beschlag für einen fahrezugsitz
DE602007011885D1 (de) Kupplungsvorrichtung für einen Roboterarm
DE602007004899D1 (de) Montageanordnung für einen Steckverbinder
DE502007005471D1 (de) Synchronisationsvorrichtung für einen motor
IL219189A0 (en) Determining touch data for one or more objects on a touch surface
FR2911968B1 (fr) Sonde a ultrasons.
ATE453512T1 (de) Farbspeichereinheit für einen handstempel
ATE553659T1 (de) Ausgangsstoff für ein getränk
DE602007007053D1 (de) Fehlerdetektion für einen drucksensor
DE602007010239D1 (de) Duplex-bremse für einen spanner
DE602007011706D1 (de) Kupplung für einen Traktor
DE502007006918D1 (de) Schutzvorrichtung für einen Laderaum
DE602008001148D1 (de) Messinstrument
DE112009000818A5 (de) Einrichtung zur Verstellung der Exzentrizität für ein Kurbel-CVT-Getriebe
DE112007000927A5 (de) Ferngeber für analoge Messgeräte
DE112008003148A5 (de) Substrat-Transportvorrichtung für einen Bestückautomaten
DE602007013913D1 (de) Bremse für einen linearmotor
HK1108478A1 (en) Scale with parallel gauge function
FI20085384A0 (fi) Suoritemittarin lisälaite
DE112008004052A5 (de) Griff für einen Transportwagen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition