DE602007002846D1 - Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser - Google Patents

Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser

Info

Publication number
DE602007002846D1
DE602007002846D1 DE602007002846T DE602007002846T DE602007002846D1 DE 602007002846 D1 DE602007002846 D1 DE 602007002846D1 DE 602007002846 T DE602007002846 T DE 602007002846T DE 602007002846 T DE602007002846 T DE 602007002846T DE 602007002846 D1 DE602007002846 D1 DE 602007002846D1
Authority
DE
Germany
Prior art keywords
oscillation
optical
oscillator
projected parts
oscillation part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007002846T
Other languages
German (de)
English (en)
Inventor
Takahisa Kato
Yukio Furukawa
Takahiro Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602007002846D1 publication Critical patent/DE602007002846D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Micromachines (AREA)
  • Laser Beam Printer (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE602007002846T 2006-06-07 2007-06-05 Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser Active DE602007002846D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006158004 2006-06-07
JP2007065950 2007-03-15
JP2007130619A JP5121301B2 (ja) 2006-06-07 2007-05-16 揺動体装置、光偏向器、及びそれを用いた光学機器

Publications (1)

Publication Number Publication Date
DE602007002846D1 true DE602007002846D1 (de) 2009-12-03

Family

ID=39978264

Family Applications (2)

Application Number Title Priority Date Filing Date
DE602007002846T Active DE602007002846D1 (de) 2006-06-07 2007-06-05 Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser
DE602007002362T Active DE602007002362D1 (de) 2006-06-07 2007-06-05 Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE602007002362T Active DE602007002362D1 (de) 2006-06-07 2007-06-05 Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser

Country Status (4)

Country Link
JP (2) JP5121301B2 (https=)
KR (1) KR101030847B1 (https=)
AT (1) ATE446528T1 (https=)
DE (2) DE602007002846D1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010035759A1 (ja) * 2008-09-25 2010-04-01 コニカミノルタオプト株式会社 光スキャナ
JP2010230792A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 光学デバイス、光スキャナー及び画像形成装置
JP6060577B2 (ja) * 2012-09-13 2017-01-18 Jsr株式会社 ネガ型レジストパターン形成方法
JP5922603B2 (ja) * 2013-03-04 2016-05-24 日本電信電話株式会社 マイクロミラー素子およびマイクロミラーアレイ
JP5993509B2 (ja) * 2015-10-05 2016-09-14 京セラドキュメントソリューションズ株式会社 光走査装置及び該光走査装置を備えた画像形成装置、並びに、光走査装置の振動ミラー部の質量調整方法。
JP6959525B2 (ja) * 2017-12-21 2021-11-02 ミツミ電機株式会社 光走査装置
JP6651110B1 (ja) 2019-05-28 2020-02-19 Ｄｏｌｐｈｉｎ株式会社 物体検出装置
JP2021060556A (ja) 2019-10-09 2021-04-15 パイオニア株式会社 光反射体
JP6890856B1 (ja) * 2020-03-04 2021-06-18 国立大学法人東北大学 全方位走査ミラー
CN113495335B (zh) * 2020-03-18 2023-08-25 扬明光学股份有限公司 光路调整机构及其制造方法
JP7695131B2 (ja) * 2021-07-13 2025-06-18 スタンレー電気株式会社 光走査装置、光走査装置の製造方法及び調整方法
DE102021212327A1 (de) 2021-11-02 2023-05-04 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Einrichtung zum Ermitteln dynamischer Parameter einer MEMS-Vorrichtung, und MEMS-Vorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0875475A (ja) * 1994-09-01 1996-03-22 Omron Corp 共振子、当該共振子を用いた光走査装置、視覚認識装置、振動センサ及び振動ジャイロ
JP2001519726A (ja) * 1997-04-01 2001-10-23 クセロス・インク 微細加工捩り振動子の動的特性の調整
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
JP4516673B2 (ja) * 2000-07-28 2010-08-04 シチズンファインテックミヨタ株式会社 プレーナ型ガルバノミラーの製造方法
JP4390174B2 (ja) * 2001-09-14 2009-12-24 株式会社リコー 光走査装置
WO2003081318A1 (en) * 2002-03-26 2003-10-02 Optiscan Pty Ltd Light scanning device
JP2005181926A (ja) * 2003-12-24 2005-07-07 Canon Inc 光偏向器及びその製造方法、それを用いた光学機器
JP4027359B2 (ja) * 2003-12-25 2007-12-26 キヤノン株式会社 マイクロ揺動体、光偏向器、画像形成装置
JP2005326745A (ja) * 2004-05-17 2005-11-24 Canon Inc 光偏向装置およびその制御方法
JP2006178408A (ja) * 2004-11-25 2006-07-06 Ricoh Co Ltd スキャナ素子、光走査装置および画像形成装置
JP2006230048A (ja) * 2005-02-15 2006-08-31 Seiko Epson Corp アクチュエータの共振周波数の調整方法およびアクチュエータ
JP2006243034A (ja) * 2005-02-28 2006-09-14 Ricoh Co Ltd 光走査装置、および画像形成装置
JP4881073B2 (ja) * 2006-05-30 2012-02-22 キヤノン株式会社 光偏向器、及びそれを用いた光学機器

Also Published As

Publication number Publication date
JP2012226359A (ja) 2012-11-15
JP2008254162A (ja) 2008-10-23
JP5400925B2 (ja) 2014-01-29
KR101030847B1 (ko) 2011-04-22
KR20090015179A (ko) 2009-02-11
JP5121301B2 (ja) 2013-01-16
ATE446528T1 (de) 2009-11-15
DE602007002362D1 (de) 2009-10-22

Similar Documents

Publication Publication Date Title
DE602007002846D1 (de) Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser
WO2007075581A3 (en) Accommodating artificial ocular lens (aaol) device
DK1720489T3 (da) To optiske elementer, der i kombination danner en linse med variabel optisk styrke til anvendlese som en intraokulær linse
JP6321765B2 (ja) 時計用結合振動子
ATE470883T1 (de) Optische abtastvorrichtung und bildanzeigegerät
EA200900385A1 (ru) Внутриглазное устройство для поддержания линз
ATE557328T1 (de) Chronographmodul für armbanduhr
ITMI990206A1 (it) Dispositivo portatile autolivellante a raggio laser perfezionato
RU2011153931A (ru) Устройство для лазерной хирургической офтальмологии
ATE538404T1 (de) Optisches system, objektivtubus; belichtungssystem und bauelemente- herstellungsverfahren
RU2013118321A (ru) Визирное устройство
AR062067A1 (es) Lentes de contacto toricas con perfil de potencia optica controlado
EP2535759A3 (en) Optical scanning device
DE602005019551D1 (de) Gemischer optischer und mechanischer sensor und dazugehöriges rücksetzverfahren
CN102362151B (zh) 自动调平式的激光标线仪
WO2009138964A3 (en) Apparatus for performing eye exercise
WO2007112259A3 (en) System and method for laser speckle reduction
TW200942860A (en) Projector to project an image and corresponding method
JP2008254162A5 (https=)
DE60123275D1 (de) Strahlsteueranordnungen und optische schalter
US20070109783A1 (en) Hand-held stabilized laser pointer
GB2562832A8 (en) Optical device able to change the direction of propagation of a light beam
TW200705086A (en) Vibration type tilting device and image projection device having the tilting device
ATE526782T1 (de) Projektionsanzeigevorrichtung
FR2888226B1 (fr) Dispositif de va-et-vient a bras oscillant

Legal Events

Date Code Title Description
8364 No opposition during term of opposition