DE602005027312D1 - Verfahren zum herstellen eines piezoelektrischen elements - Google Patents

Verfahren zum herstellen eines piezoelektrischen elements

Info

Publication number
DE602005027312D1
DE602005027312D1 DE200560027312 DE602005027312T DE602005027312D1 DE 602005027312 D1 DE602005027312 D1 DE 602005027312D1 DE 200560027312 DE200560027312 DE 200560027312 DE 602005027312 T DE602005027312 T DE 602005027312T DE 602005027312 D1 DE602005027312 D1 DE 602005027312D1
Authority
DE
Germany
Prior art keywords
producing
piezoelectric element
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200560027312
Other languages
English (en)
Inventor
Takashi Abe
Li Li
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Japan Science and Technology Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Agency filed Critical Japan Science and Technology Agency
Publication of DE602005027312D1 publication Critical patent/DE602005027312D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Drying Of Semiconductors (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE200560027312 2004-02-02 2005-01-27 Verfahren zum herstellen eines piezoelektrischen elements Active DE602005027312D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004025780A JP4012156B2 (ja) 2004-02-02 2004-02-02 圧電素子の製造方法
PCT/JP2005/001564 WO2005074052A1 (ja) 2004-02-02 2005-01-27 圧電素子の製造方法

Publications (1)

Publication Number Publication Date
DE602005027312D1 true DE602005027312D1 (de) 2011-05-19

Family

ID=34823997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200560027312 Active DE602005027312D1 (de) 2004-02-02 2005-01-27 Verfahren zum herstellen eines piezoelektrischen elements

Country Status (7)

Country Link
US (1) US7770273B2 (de)
EP (1) EP1713135B1 (de)
JP (1) JP4012156B2 (de)
KR (1) KR100838188B1 (de)
CN (1) CN100477315C (de)
DE (1) DE602005027312D1 (de)
WO (1) WO2005074052A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101622076B (zh) * 2007-02-27 2013-06-26 株式会社东芝 涂布装置、涂布体的制造方法及流体喷出装置
US8969105B2 (en) * 2010-07-26 2015-03-03 Fujifilm Corporation Forming a device having a curved piezoelectric membrane
NZ610140A (en) * 2010-10-05 2015-11-27 Anpac System Science Shanghai Co Ltd Micro-devices for disease detection
CN103562728B (zh) 2011-03-24 2016-08-17 安派科生物医学科技有限公司 用于疾病检测的微器件
FR2988911A1 (fr) * 2012-04-02 2013-10-04 St Microelectronics Crolles 2 Plaque incurvee et son procede de fabrication
FR2988912A1 (fr) 2012-04-02 2013-10-04 St Microelectronics Crolles 2 Dispositif de recuperation d'energie
US9939412B2 (en) 2013-02-06 2018-04-10 Empire Technology Development Llc Devices, systems, and methods for detecting odorants
US20160349216A1 (en) * 2014-01-30 2016-12-01 Empire Technology Development Llc Odor sensors

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4487828A (en) * 1983-06-03 1984-12-11 At&T Technologies, Inc. Method of manufacturing printed circuit boards
US4826564A (en) * 1987-10-30 1989-05-02 International Business Machines Corporation Method of selective reactive ion etching of substrates
US5178989A (en) * 1989-07-21 1993-01-12 Board Of Regents, The University Of Texas System Pattern forming and transferring processes
JP3183033B2 (ja) * 1994-05-16 2001-07-03 ブラザー工業株式会社 インク噴射装置のノズルプレートの製造方法
US5722162A (en) * 1995-10-12 1998-03-03 Fujitsu Limited Fabrication procedure for a stable post
GB9600469D0 (en) * 1996-01-10 1996-03-13 Secr Defence Three dimensional etching process
JP3731348B2 (ja) 1998-06-09 2006-01-05 松下電器産業株式会社 圧電振動子
US6530652B1 (en) * 1998-12-30 2003-03-11 Samsung Electronics Co., Ltd. Micro actuator and ink jet printer head manufactured using the same
JP2000232095A (ja) 1999-02-12 2000-08-22 Nippon Telegr & Teleph Corp <Ntt> 半導体表面の微細パターン形成方法
JP3594864B2 (ja) * 2000-01-25 2004-12-02 Ｔｄｋ株式会社 薄膜磁気ヘッドの製造方法
JP3368885B2 (ja) * 2000-03-15 2003-01-20 株式会社村田製作所 弾性表面波装置の製造方法
JP3539630B2 (ja) * 2000-03-22 2004-07-07 Ｔｄｋ株式会社 薄膜磁気ヘッドの製造方法
US6420202B1 (en) * 2000-05-16 2002-07-16 Agere Systems Guardian Corp. Method for shaping thin film resonators to shape acoustic modes therein
JP2002368572A (ja) 2001-06-05 2002-12-20 Yoshiaki Nagaura 圧電素子、又は電子素材、及び音響−電気変換器、及びその製造方法
JP2002048907A (ja) 2000-08-01 2002-02-15 Canon Inc 回折光学素子の製作方法
US6926850B2 (en) 2001-07-26 2005-08-09 Lucent Technologies Inc. Method for making micro lenses
JP2003168941A (ja) * 2001-11-30 2003-06-13 Kinseki Ltd 小型圧電素板のコンベックス加工法
JP2003234632A (ja) 2002-02-08 2003-08-22 Canon Inc 水晶振動子およびその製造方法
US20040016718A1 (en) * 2002-03-20 2004-01-29 Ruey-Jen Hwu Micro-optic elements and method for making the same
JP4133580B2 (ja) 2003-05-21 2008-08-13 独立行政法人科学技術振興機構 圧電材料の加工方法

Also Published As

Publication number Publication date
JP2005217370A (ja) 2005-08-11
WO2005074052A1 (ja) 2005-08-11
EP1713135B1 (de) 2011-04-06
US20070130739A1 (en) 2007-06-14
EP1713135A4 (de) 2009-01-07
EP1713135A1 (de) 2006-10-18
CN100477315C (zh) 2009-04-08
JP4012156B2 (ja) 2007-11-21
CN1914745A (zh) 2007-02-14
US7770273B2 (en) 2010-08-10
KR20070004582A (ko) 2007-01-09
KR100838188B1 (ko) 2008-06-16

Similar Documents

Publication Publication Date Title
DE102005030339B8 (de) Verfahren zum Herstellen eines Farbfilter-Arraysubstrats
DE502006007540D1 (de) Verfahren zum herstellen von keramischen schichten
DE602006004915D1 (de) Verfahren zum Herstellen einer Wabenkörperstruktur
AT505197A3 (de) Verfahren zur aktivierung eines photosensibilisators
DE502004012381D1 (de) Verfahren zum herstellen eines vertikalen feldeffekttransistors
DE502007002301D1 (de) Verfahren zum Herstellen von Ventilgehäusen
DE502005005126D1 (de) Verfahren zum Herstellen eines top-emittierenden Bauteils sowie Verwendung
DE602006002355D1 (de) Verfahren zum Herstellen eines Luftsackmoduls
DE112004002902A5 (de) Verfahren zum Herstellen eines Metalls
DE602005027312D1 (de) Verfahren zum herstellen eines piezoelektrischen elements
DE50304673D1 (de) Strömungsmaschine und Verfahren zum Herstellen eines Leitgitters
DE502005004802D1 (de) Verfahren zum einstellen eines wischwinkels
DE502005002725D1 (de) Verfahren zum erkennen eines sensortyps
DE602005004187D1 (de) Verfahren zum Entfernen keilringgesicherter Schraubenbolzen
DE502006006550D1 (de) Verfahren zum herstellen eines ventils
DE602005024653D1 (de) Verfahren zum Herstellen von Hohlkörpern
DE602006006609D1 (de) Verfahren zum Steuern eines Flüssigkeitausstosses
DE502004000588D1 (de) Verfahren zum herstellen eines möbelkorpus
DE502004003700D1 (de) Verfahren zum abgleich eines drehratensensors
DE10260613B8 (de) Verfahren zum Herstellen eines Feldeffekttransistors
DE502007000169D1 (de) Verfahren zum Herstellen eines tribologischen Bauteils
DE502004006948D1 (de) Verfahren zum herstellen eines schichtsystems
DE112005001345A5 (de) Verfahren zum Aktivieren einer Anfahrhilfe
DE112006001228A5 (de) Verfahren zum Herstellen eines mikromechanischen Strukturelementes und Halbleiteranordnung
DE602005002718D1 (de) Verfahren zum Konfigurieren eines Spannungsreglers