DE602005002033D1 - Verdampfen von temperaturempfindlichen materialien für oled - Google Patents
Verdampfen von temperaturempfindlichen materialien für oledInfo
- Publication number
- DE602005002033D1 DE602005002033D1 DE602005002033T DE602005002033T DE602005002033D1 DE 602005002033 D1 DE602005002033 D1 DE 602005002033D1 DE 602005002033 T DE602005002033 T DE 602005002033T DE 602005002033 T DE602005002033 T DE 602005002033T DE 602005002033 D1 DE602005002033 D1 DE 602005002033D1
- Authority
- DE
- Germany
- Prior art keywords
- oled
- evaporation
- temperature
- sensitive materials
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
- H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/784,585 US7232588B2 (en) | 2004-02-23 | 2004-02-23 | Device and method for vaporizing temperature sensitive materials |
US784585 | 2004-02-23 | ||
PCT/US2005/004544 WO2005083146A2 (en) | 2004-02-23 | 2005-02-11 | Vaporizing temperature sensitive materials for oled |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602005002033D1 true DE602005002033D1 (de) | 2007-09-27 |
DE602005002033T2 DE602005002033T2 (de) | 2008-05-15 |
Family
ID=34861486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005002033T Active DE602005002033T2 (de) | 2004-02-23 | 2005-02-11 | Aufdampfen temperaturempfindlicher materialien für oled-vorrichtungen |
Country Status (8)
Country | Link |
---|---|
US (3) | US7232588B2 (de) |
EP (1) | EP1721025B1 (de) |
JP (1) | JP5037949B2 (de) |
KR (1) | KR101171209B1 (de) |
CN (1) | CN100482017C (de) |
DE (1) | DE602005002033T2 (de) |
TW (1) | TWI357775B (de) |
WO (1) | WO2005083146A2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7232588B2 (en) * | 2004-02-23 | 2007-06-19 | Eastman Kodak Company | Device and method for vaporizing temperature sensitive materials |
US7465475B2 (en) * | 2004-11-09 | 2008-12-16 | Eastman Kodak Company | Method for controlling the deposition of vaporized organic material |
US20060099344A1 (en) | 2004-11-09 | 2006-05-11 | Eastman Kodak Company | Controlling the vaporization of organic material |
US20060286405A1 (en) | 2005-06-17 | 2006-12-21 | Eastman Kodak Company | Organic element for low voltage electroluminescent devices |
US7989021B2 (en) * | 2005-07-27 | 2011-08-02 | Global Oled Technology Llc | Vaporizing material at a uniform rate |
US20070231490A1 (en) * | 2006-03-29 | 2007-10-04 | Eastman Kodak Company | Uniformly vaporizing metals and organic materials |
US20080254217A1 (en) * | 2007-04-16 | 2008-10-16 | Boroson Michael L | Fine control of vaporized organic material |
US20090081365A1 (en) * | 2007-09-20 | 2009-03-26 | Cok Ronald S | Deposition apparatus for temperature sensitive materials |
US8420229B2 (en) * | 2007-10-26 | 2013-04-16 | Global OLED Technologies LLC | OLED device with certain fluoranthene light-emitting dopants |
US20090110956A1 (en) * | 2007-10-26 | 2009-04-30 | Begley William J | Oled device with electron transport material combination |
US8431242B2 (en) | 2007-10-26 | 2013-04-30 | Global Oled Technology, Llc. | OLED device with certain fluoranthene host |
US8076009B2 (en) * | 2007-10-26 | 2011-12-13 | Global Oled Technology, Llc. | OLED device with fluoranthene electron transport materials |
US7883583B2 (en) | 2008-01-08 | 2011-02-08 | Global Oled Technology Llc | Vaporization apparatus with precise powder metering |
US7947974B2 (en) * | 2008-03-25 | 2011-05-24 | Global Oled Technology Llc | OLED device with hole-transport and electron-transport materials |
US7931975B2 (en) * | 2008-11-07 | 2011-04-26 | Global Oled Technology Llc | Electroluminescent device containing a flouranthene compound |
US8088500B2 (en) * | 2008-11-12 | 2012-01-03 | Global Oled Technology Llc | OLED device with fluoranthene electron injection materials |
US7968215B2 (en) * | 2008-12-09 | 2011-06-28 | Global Oled Technology Llc | OLED device with cyclobutene electron injection materials |
DE102009004502A1 (de) | 2009-01-09 | 2010-07-15 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Verdampfung organischer Materialien |
US8216697B2 (en) * | 2009-02-13 | 2012-07-10 | Global Oled Technology Llc | OLED with fluoranthene-macrocyclic materials |
US8147989B2 (en) * | 2009-02-27 | 2012-04-03 | Global Oled Technology Llc | OLED device with stabilized green light-emitting layer |
US8206842B2 (en) | 2009-04-06 | 2012-06-26 | Global Oled Technology Llc | Organic element for electroluminescent devices |
US20100319255A1 (en) * | 2009-06-18 | 2010-12-23 | Douglas Struble | Process and system for production of synthesis gas |
CN101838790B (zh) * | 2010-06-04 | 2012-11-21 | 涂爱国 | 一种蒸发设备 |
JP5564573B2 (ja) * | 2010-09-03 | 2014-07-30 | 株式会社アルバック | 保護膜形成方法、表面平坦化方法 |
KR101806916B1 (ko) * | 2011-03-17 | 2017-12-12 | 한화테크윈 주식회사 | 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법 |
TWI458843B (zh) | 2011-10-06 | 2014-11-01 | Ind Tech Res Inst | 蒸鍍裝置與有機薄膜的形成方法 |
DE102012107824B3 (de) | 2012-08-24 | 2014-02-06 | Technische Universität Braunschweig Carolo-Wilhelmina | Verfahren zur Beschichtung eines Substrats mit mehreren Materialschichten und Mehrmaterialienabgabeeinrichtung dafür |
DE102012111218A1 (de) | 2012-11-21 | 2014-05-22 | Emdeoled Gmbh | Materialabgabekopf, Materialabgabeeinrichtung und Verfahren |
KR20140078284A (ko) * | 2012-12-17 | 2014-06-25 | 삼성디스플레이 주식회사 | 증착원 및 이를 포함하는 증착 장치 |
KR102052074B1 (ko) * | 2013-04-04 | 2019-12-05 | 삼성디스플레이 주식회사 | 증착 장치, 이를 이용한 박막 형성 방법 및 유기 발광 표시 장치 제조 방법 |
CN104078626B (zh) * | 2014-07-22 | 2016-07-06 | 深圳市华星光电技术有限公司 | 用于oled材料蒸镀的加热装置 |
CN110268091B (zh) * | 2017-02-21 | 2021-10-12 | 株式会社爱发科 | 成膜方法、成膜装置、元件结构体的制造方法及元件结构体的制造装置 |
US11946131B2 (en) * | 2017-05-26 | 2024-04-02 | Universal Display Corporation | Sublimation cell with time stability of output vapor pressure |
WO2019239192A1 (en) * | 2018-06-15 | 2019-12-19 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2447789A (en) * | 1945-03-23 | 1948-08-24 | Polaroid Corp | Evaporating crucible for coating apparatus |
GB1253124A (de) * | 1969-02-28 | 1971-11-10 | ||
US4293594A (en) * | 1980-08-22 | 1981-10-06 | Westinghouse Electric Corp. | Method for forming conductive, transparent coating on a substrate |
DE3200848C2 (de) * | 1982-01-14 | 1984-09-27 | GfO Gesellschaft für Oberflächentechnik mbH, 7070 Schwäbisch Gmünd | Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen |
JPS58167602A (ja) * | 1982-03-29 | 1983-10-03 | Futaba Corp | 有機物薄膜の形成方法 |
US4885211A (en) * | 1987-02-11 | 1989-12-05 | Eastman Kodak Company | Electroluminescent device with improved cathode |
US4769292A (en) * | 1987-03-02 | 1988-09-06 | Eastman Kodak Company | Electroluminescent device with modified thin film luminescent zone |
US5034025A (en) * | 1989-12-01 | 1991-07-23 | The Dow Chemical Company | Membrane process for removing water vapor from gas |
US5041719A (en) * | 1990-06-01 | 1991-08-20 | General Electric Company | Two-zone electrical furnace for molecular beam epitaxial apparatus |
JPH05117864A (ja) * | 1991-06-25 | 1993-05-14 | Anelva Corp | Cvd装置 |
US5849089A (en) * | 1997-03-14 | 1998-12-15 | Kabushiki Kaisha Toshiba | Evaporator for liquid raw material and evaporation method therefor |
US6340501B1 (en) * | 1997-05-08 | 2002-01-22 | Matsushita Electric Industrial Co., Ltd. | Device and method for manufacturing an optical recording medium |
JPH1161386A (ja) * | 1997-08-22 | 1999-03-05 | Fuji Electric Co Ltd | 有機薄膜発光素子の成膜装置 |
US6251233B1 (en) * | 1998-08-03 | 2001-06-26 | The Coca-Cola Company | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
JP2000068055A (ja) | 1998-08-26 | 2000-03-03 | Tdk Corp | 有機el素子用蒸発源、この有機el素子用蒸発源を用いた有機el素子の製造装置および製造方法 |
US6123993A (en) * | 1998-09-21 | 2000-09-26 | Advanced Technology Materials, Inc. | Method and apparatus for forming low dielectric constant polymeric films |
US6543466B2 (en) * | 2000-03-02 | 2003-04-08 | Rajinder S. Gill | Mass flow controller and method of operation of mass flow controller |
US6660328B1 (en) * | 2000-03-31 | 2003-12-09 | Florida State University Research Foundation | Powder precursor delivery system for chemical vapor deposition |
EP1167566B1 (de) * | 2000-06-22 | 2011-01-26 | Panasonic Electric Works Co., Ltd. | Vorrichtung und Verfahren zum Vakuum-Ausdampfen |
US6467427B1 (en) * | 2000-11-10 | 2002-10-22 | Helix Technology Inc. | Evaporation source material supplier |
EP1211333A3 (de) * | 2000-12-01 | 2003-07-30 | Japan Pionics Co., Ltd. | Verdampfer für CVD-Anlage |
JP4906018B2 (ja) * | 2001-03-12 | 2012-03-28 | 株式会社半導体エネルギー研究所 | 成膜方法、発光装置の作製方法及び成膜装置 |
JP4704605B2 (ja) * | 2001-05-23 | 2011-06-15 | 淳二 城戸 | 連続蒸着装置、蒸着装置及び蒸着方法 |
JP2003109755A (ja) * | 2001-09-27 | 2003-04-11 | Sanyo Electric Co Ltd | 有機elデバイスの製造装置 |
JP2005511894A (ja) * | 2001-12-04 | 2005-04-28 | プライマックス・インコーポレーテッド | 化学蒸着用ベーパライザ |
US6749906B2 (en) * | 2002-04-25 | 2004-06-15 | Eastman Kodak Company | Thermal physical vapor deposition apparatus with detachable vapor source(s) and method |
DE60305246T2 (de) * | 2002-07-19 | 2006-09-14 | Lg Electronics Inc. | Quelle zur thermischen PVD-Beschichtung für organische elektrolumineszente Schichten |
US7079091B2 (en) * | 2003-01-14 | 2006-07-18 | Eastman Kodak Company | Compensating for aging in OLED devices |
TWI242463B (en) * | 2003-08-28 | 2005-11-01 | Ind Tech Res Inst | Apparatus and process for vacuum sublimation |
US7339139B2 (en) * | 2003-10-03 | 2008-03-04 | Darly Custom Technology, Inc. | Multi-layered radiant thermal evaporator and method of use |
US7232588B2 (en) * | 2004-02-23 | 2007-06-19 | Eastman Kodak Company | Device and method for vaporizing temperature sensitive materials |
US20050244580A1 (en) * | 2004-04-30 | 2005-11-03 | Eastman Kodak Company | Deposition apparatus for temperature sensitive materials |
JP2006130216A (ja) * | 2004-11-09 | 2006-05-25 | Canon Inc | 揮発性有機塩素化合物分解処理方法及び装置 |
JP2007200611A (ja) * | 2006-01-24 | 2007-08-09 | Toshiba Corp | 化学反応装置及び燃料電池システム |
US7514380B2 (en) * | 2006-08-18 | 2009-04-07 | E. I. Du Pont De Nemours And Company | Selectively permeable protective structure and articles therefrom |
-
2004
- 2004-02-23 US US10/784,585 patent/US7232588B2/en not_active Expired - Lifetime
-
2005
- 2005-01-18 TW TW094101366A patent/TWI357775B/zh active
- 2005-02-11 KR KR1020067016794A patent/KR101171209B1/ko active IP Right Grant
- 2005-02-11 WO PCT/US2005/004544 patent/WO2005083146A2/en active IP Right Grant
- 2005-02-11 CN CNB2005800057668A patent/CN100482017C/zh active Active
- 2005-02-11 EP EP05723011A patent/EP1721025B1/de active Active
- 2005-02-11 JP JP2006554149A patent/JP5037949B2/ja active Active
- 2005-02-11 DE DE602005002033T patent/DE602005002033T2/de active Active
-
2007
- 2007-05-08 US US11/745,504 patent/US7704554B2/en active Active
-
2010
- 2010-04-27 US US12/768,312 patent/US20100206233A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1721025B1 (de) | 2007-08-15 |
WO2005083146A3 (en) | 2006-02-23 |
US20050186340A1 (en) | 2005-08-25 |
TWI357775B (en) | 2012-02-01 |
US7232588B2 (en) | 2007-06-19 |
US20070207261A1 (en) | 2007-09-06 |
JP5037949B2 (ja) | 2012-10-03 |
TW200541387A (en) | 2005-12-16 |
JP2007526396A (ja) | 2007-09-13 |
KR20070009990A (ko) | 2007-01-19 |
US7704554B2 (en) | 2010-04-27 |
KR101171209B1 (ko) | 2012-08-06 |
US20100206233A1 (en) | 2010-08-19 |
WO2005083146A2 (en) | 2005-09-09 |
EP1721025A2 (de) | 2006-11-15 |
CN100482017C (zh) | 2009-04-22 |
DE602005002033T2 (de) | 2008-05-15 |
CN1922927A (zh) | 2007-02-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: GLOBAL OLED TECHNOLOGY LLC, WILMINGTON, DEL., US |