DE602005000684D1 - Photoelektrischer Positionsgeber und Verfahren zur Herstellung von Gittern - Google Patents

Photoelektrischer Positionsgeber und Verfahren zur Herstellung von Gittern

Info

Publication number
DE602005000684D1
DE602005000684D1 DE602005000684T DE602005000684T DE602005000684D1 DE 602005000684 D1 DE602005000684 D1 DE 602005000684D1 DE 602005000684 T DE602005000684 T DE 602005000684T DE 602005000684 T DE602005000684 T DE 602005000684T DE 602005000684 D1 DE602005000684 D1 DE 602005000684D1
Authority
DE
Germany
Prior art keywords
position sensor
photoelectric position
producing gratings
gratings
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005000684T
Other languages
English (en)
Other versions
DE602005000684T2 (de
Inventor
Takashi Kanno
Atsushi Tominaga
Kenichi Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602005000684D1 publication Critical patent/DE602005000684D1/de
Application granted granted Critical
Publication of DE602005000684T2 publication Critical patent/DE602005000684T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
DE602005000684T 2004-01-26 2005-01-26 Photoelektrischer Positionsgeber und Verfahren zur Herstellung von Gittern Active DE602005000684T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004017567 2004-01-26
JP2004017567 2004-01-26
JP2004091344 2004-03-26
JP2004091344 2004-03-26

Publications (2)

Publication Number Publication Date
DE602005000684D1 true DE602005000684D1 (de) 2007-04-26
DE602005000684T2 DE602005000684T2 (de) 2007-06-28

Family

ID=34635701

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005000684T Active DE602005000684T2 (de) 2004-01-26 2005-01-26 Photoelektrischer Positionsgeber und Verfahren zur Herstellung von Gittern

Country Status (5)

Country Link
US (1) US7129475B2 (de)
EP (1) EP1557701B1 (de)
JP (1) JP5043167B2 (de)
CN (1) CN100397045C (de)
DE (1) DE602005000684T2 (de)

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JP2006178312A (ja) * 2004-12-24 2006-07-06 Canon Inc 表面反射型位相格子
JP4828612B2 (ja) * 2007-06-01 2011-11-30 株式会社ミツトヨ 反射型エンコーダ、そのスケール、及び、スケールの製造方法
JP4971047B2 (ja) 2007-06-19 2012-07-11 株式会社ミツトヨ 表面反射型エンコーダ用スケール及びそれを用いた表面反射型エンコーダ
GB0720408D0 (en) * 2007-10-18 2007-11-28 Renishaw Plc Metrological scale and method of manufacture
JP2010181181A (ja) * 2009-02-03 2010-08-19 Canon Inc スケール、それを有する変位検出装置、及びそれを有する撮像装置
FR2945159B1 (fr) * 2009-04-29 2016-04-01 Horiba Jobin Yvon Sas Reseau de diffraction metallique en reflexion a haute tenue au flux en regime femtoseconde, systeme comprenant un tel reseau et procede d'amelioration du seuil d'endommagement d'un reseau de diffraction metallique
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN103906997B (zh) * 2011-10-31 2016-12-07 日本精工株式会社 光学传感器、光学传感器的制造方法、光学式编码器、扭矩检测装置以及电动动力转向装置
JP5846686B2 (ja) * 2011-11-22 2016-01-20 株式会社ミツトヨ 光電式エンコーダのスケールの製造方法
CN104094087B (zh) * 2011-12-28 2016-07-20 株式会社尼康 编码器、编码器用标尺制造方法、编码器制造方法及驱动装置
US20130221212A1 (en) * 2012-02-24 2013-08-29 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Coding Members With Embedded Metal Layers For Encoders
CN103176231B (zh) * 2013-03-04 2016-04-27 中国科学院长春光学精密机械与物理研究所 单层膜反射式平面金属光栅及其制作方法
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法
WO2015147756A1 (en) * 2014-03-27 2015-10-01 Heptagon Micro Optics Pte. Ltd. Optical encoder system
CN103954600B (zh) * 2014-05-12 2017-01-25 国家纳米科学中心 一种荧光纳米标尺部件及其制作方法
DE102015201230A1 (de) 2015-01-26 2016-07-28 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
CN107430217B (zh) * 2015-03-05 2021-01-15 奇跃公司 虚拟和增强现实系统和组件的改进制造
JP7060370B2 (ja) 2017-12-18 2022-04-26 株式会社ミツトヨ スケールおよびその製造方法
JP2019120500A (ja) * 2017-12-28 2019-07-22 株式会社ミツトヨ スケールおよびその製造方法
JP7140495B2 (ja) 2017-12-28 2022-09-21 株式会社ミツトヨ スケールおよびその製造方法
CN110411485A (zh) * 2018-04-27 2019-11-05 广东工业大学 基于掩膜滤除光干扰的透射式绝对旋转编码器及测量方法
US10761334B2 (en) * 2018-07-13 2020-09-01 Varian Semiconductor Equipment Associates, Inc. System and method for optimally forming gratings of diffracted optical elements
US10795173B2 (en) 2018-07-13 2020-10-06 Varian Semiconductor Equipment Associates, Inc. System and method for optimally forming gratings of diffracted optical elements
US11119405B2 (en) 2018-10-12 2021-09-14 Applied Materials, Inc. Techniques for forming angled structures
US11226556B2 (en) 2019-04-11 2022-01-18 Applied Materials, Inc. Patterning of multi-depth optical devices
JP2021192010A (ja) * 2020-06-05 2021-12-16 株式会社ミツトヨ スケールおよびその製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412980A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters
IN168444B (de) * 1986-08-15 1991-04-06 Mitutoyo Mfg Co Ltd
US5004673A (en) * 1987-04-20 1991-04-02 Environmental Research Institute Of Michigan Method of manufacturing surface relief patterns of variable cross-sectional geometry
JPH02244002A (ja) * 1989-03-17 1990-09-28 Sekinosu Kk 射出成形用光回折格子コアの作成方法
JPH0624747B2 (ja) * 1990-10-15 1994-04-06 セキノス株式会社 微細加工を施した射出成形用コアの作成方法
JPH07113905A (ja) * 1993-10-15 1995-05-02 Ricoh Co Ltd 回折格子作製方法
DE59509940D1 (de) * 1995-04-13 2002-01-24 Heidenhain Gmbh Dr Johannes Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung
CN1146551A (zh) * 1995-09-29 1997-04-02 天津大学 光栅位移测量装置
DE19652563A1 (de) 1996-12-17 1998-06-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
CN2395251Y (zh) * 1999-06-17 2000-09-06 张学能 光栅位移传感器
DE10020575A1 (de) * 2000-04-28 2001-10-31 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
DE10025694C2 (de) * 2000-05-24 2003-06-05 Zeiss Carl Verwendung eines Beugungsgitters
DE10150099A1 (de) * 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
US6930053B2 (en) * 2002-03-25 2005-08-16 Sanyo Electric Co., Ltd. Method of forming grating microstructures by anodic oxidation
JP2004045672A (ja) * 2002-07-11 2004-02-12 Canon Inc 偏光分離素子およびそれを用いた光学系

Also Published As

Publication number Publication date
US20050207013A1 (en) 2005-09-22
CN100397045C (zh) 2008-06-25
JP5043167B2 (ja) 2012-10-10
EP1557701B1 (de) 2007-03-14
US7129475B2 (en) 2006-10-31
CN1648611A (zh) 2005-08-03
JP2010281839A (ja) 2010-12-16
DE602005000684T2 (de) 2007-06-28
EP1557701A1 (de) 2005-07-27

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