DE602005000684D1 - Photoelektrischer Positionsgeber und Verfahren zur Herstellung von Gittern - Google Patents
Photoelektrischer Positionsgeber und Verfahren zur Herstellung von GitternInfo
- Publication number
- DE602005000684D1 DE602005000684D1 DE602005000684T DE602005000684T DE602005000684D1 DE 602005000684 D1 DE602005000684 D1 DE 602005000684D1 DE 602005000684 T DE602005000684 T DE 602005000684T DE 602005000684 T DE602005000684 T DE 602005000684T DE 602005000684 D1 DE602005000684 D1 DE 602005000684D1
- Authority
- DE
- Germany
- Prior art keywords
- position sensor
- photoelectric position
- producing gratings
- gratings
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004017567 | 2004-01-26 | ||
JP2004017567 | 2004-01-26 | ||
JP2004091344 | 2004-03-26 | ||
JP2004091344 | 2004-03-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602005000684D1 true DE602005000684D1 (de) | 2007-04-26 |
DE602005000684T2 DE602005000684T2 (de) | 2007-06-28 |
Family
ID=34635701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005000684T Active DE602005000684T2 (de) | 2004-01-26 | 2005-01-26 | Photoelektrischer Positionsgeber und Verfahren zur Herstellung von Gittern |
Country Status (5)
Country | Link |
---|---|
US (1) | US7129475B2 (de) |
EP (1) | EP1557701B1 (de) |
JP (1) | JP5043167B2 (de) |
CN (1) | CN100397045C (de) |
DE (1) | DE602005000684T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006178312A (ja) * | 2004-12-24 | 2006-07-06 | Canon Inc | 表面反射型位相格子 |
JP4828612B2 (ja) * | 2007-06-01 | 2011-11-30 | 株式会社ミツトヨ | 反射型エンコーダ、そのスケール、及び、スケールの製造方法 |
JP4971047B2 (ja) | 2007-06-19 | 2012-07-11 | 株式会社ミツトヨ | 表面反射型エンコーダ用スケール及びそれを用いた表面反射型エンコーダ |
GB0720408D0 (en) * | 2007-10-18 | 2007-11-28 | Renishaw Plc | Metrological scale and method of manufacture |
JP2010181181A (ja) * | 2009-02-03 | 2010-08-19 | Canon Inc | スケール、それを有する変位検出装置、及びそれを有する撮像装置 |
FR2945159B1 (fr) * | 2009-04-29 | 2016-04-01 | Horiba Jobin Yvon Sas | Reseau de diffraction metallique en reflexion a haute tenue au flux en regime femtoseconde, systeme comprenant un tel reseau et procede d'amelioration du seuil d'endommagement d'un reseau de diffraction metallique |
DE102010063253A1 (de) * | 2010-12-16 | 2012-06-21 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
CN103906997B (zh) * | 2011-10-31 | 2016-12-07 | 日本精工株式会社 | 光学传感器、光学传感器的制造方法、光学式编码器、扭矩检测装置以及电动动力转向装置 |
JP5846686B2 (ja) * | 2011-11-22 | 2016-01-20 | 株式会社ミツトヨ | 光電式エンコーダのスケールの製造方法 |
CN104094087B (zh) * | 2011-12-28 | 2016-07-20 | 株式会社尼康 | 编码器、编码器用标尺制造方法、编码器制造方法及驱动装置 |
US20130221212A1 (en) * | 2012-02-24 | 2013-08-29 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Coding Members With Embedded Metal Layers For Encoders |
CN103176231B (zh) * | 2013-03-04 | 2016-04-27 | 中国科学院长春光学精密机械与物理研究所 | 单层膜反射式平面金属光栅及其制作方法 |
JP6425875B2 (ja) * | 2013-06-14 | 2018-11-21 | 株式会社ミツトヨ | 光電式測定器用スケール、エンコーダ及びスケールの形成方法 |
WO2015147756A1 (en) * | 2014-03-27 | 2015-10-01 | Heptagon Micro Optics Pte. Ltd. | Optical encoder system |
CN103954600B (zh) * | 2014-05-12 | 2017-01-25 | 国家纳米科学中心 | 一种荧光纳米标尺部件及其制作方法 |
DE102015201230A1 (de) | 2015-01-26 | 2016-07-28 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
CN107430217B (zh) * | 2015-03-05 | 2021-01-15 | 奇跃公司 | 虚拟和增强现实系统和组件的改进制造 |
JP7060370B2 (ja) | 2017-12-18 | 2022-04-26 | 株式会社ミツトヨ | スケールおよびその製造方法 |
JP2019120500A (ja) * | 2017-12-28 | 2019-07-22 | 株式会社ミツトヨ | スケールおよびその製造方法 |
JP7140495B2 (ja) | 2017-12-28 | 2022-09-21 | 株式会社ミツトヨ | スケールおよびその製造方法 |
CN110411485A (zh) * | 2018-04-27 | 2019-11-05 | 广东工业大学 | 基于掩膜滤除光干扰的透射式绝对旋转编码器及测量方法 |
US10761334B2 (en) * | 2018-07-13 | 2020-09-01 | Varian Semiconductor Equipment Associates, Inc. | System and method for optimally forming gratings of diffracted optical elements |
US10795173B2 (en) | 2018-07-13 | 2020-10-06 | Varian Semiconductor Equipment Associates, Inc. | System and method for optimally forming gratings of diffracted optical elements |
US11119405B2 (en) | 2018-10-12 | 2021-09-14 | Applied Materials, Inc. | Techniques for forming angled structures |
US11226556B2 (en) | 2019-04-11 | 2022-01-18 | Applied Materials, Inc. | Patterning of multi-depth optical devices |
JP2021192010A (ja) * | 2020-06-05 | 2021-12-16 | 株式会社ミツトヨ | スケールおよびその製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3412980A1 (de) * | 1984-04-06 | 1985-10-17 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters |
IN168444B (de) * | 1986-08-15 | 1991-04-06 | Mitutoyo Mfg Co Ltd | |
US5004673A (en) * | 1987-04-20 | 1991-04-02 | Environmental Research Institute Of Michigan | Method of manufacturing surface relief patterns of variable cross-sectional geometry |
JPH02244002A (ja) * | 1989-03-17 | 1990-09-28 | Sekinosu Kk | 射出成形用光回折格子コアの作成方法 |
JPH0624747B2 (ja) * | 1990-10-15 | 1994-04-06 | セキノス株式会社 | 微細加工を施した射出成形用コアの作成方法 |
JPH07113905A (ja) * | 1993-10-15 | 1995-05-02 | Ricoh Co Ltd | 回折格子作製方法 |
DE59509940D1 (de) * | 1995-04-13 | 2002-01-24 | Heidenhain Gmbh Dr Johannes | Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung |
CN1146551A (zh) * | 1995-09-29 | 1997-04-02 | 天津大学 | 光栅位移测量装置 |
DE19652563A1 (de) | 1996-12-17 | 1998-06-18 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
CN2395251Y (zh) * | 1999-06-17 | 2000-09-06 | 张学能 | 光栅位移传感器 |
DE10020575A1 (de) * | 2000-04-28 | 2001-10-31 | Heidenhain Gmbh Dr Johannes | Abtasteinheit für eine optische Positionsmesseinrichtung |
DE10025694C2 (de) * | 2000-05-24 | 2003-06-05 | Zeiss Carl | Verwendung eines Beugungsgitters |
DE10150099A1 (de) * | 2001-10-11 | 2003-04-17 | Heidenhain Gmbh Dr Johannes | Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung |
US6930053B2 (en) * | 2002-03-25 | 2005-08-16 | Sanyo Electric Co., Ltd. | Method of forming grating microstructures by anodic oxidation |
JP2004045672A (ja) * | 2002-07-11 | 2004-02-12 | Canon Inc | 偏光分離素子およびそれを用いた光学系 |
-
2005
- 2005-01-24 CN CNB2005100056807A patent/CN100397045C/zh not_active Expired - Fee Related
- 2005-01-26 EP EP05001563A patent/EP1557701B1/de not_active Expired - Fee Related
- 2005-01-26 DE DE602005000684T patent/DE602005000684T2/de active Active
- 2005-01-26 US US11/042,075 patent/US7129475B2/en not_active Expired - Fee Related
-
2010
- 2010-09-22 JP JP2010212589A patent/JP5043167B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US20050207013A1 (en) | 2005-09-22 |
CN100397045C (zh) | 2008-06-25 |
JP5043167B2 (ja) | 2012-10-10 |
EP1557701B1 (de) | 2007-03-14 |
US7129475B2 (en) | 2006-10-31 |
CN1648611A (zh) | 2005-08-03 |
JP2010281839A (ja) | 2010-12-16 |
DE602005000684T2 (de) | 2007-06-28 |
EP1557701A1 (de) | 2005-07-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |