DE602004032449D1 - Polarisations-Analysegerät und entsprechende Methode - Google Patents

Polarisations-Analysegerät und entsprechende Methode

Info

Publication number
DE602004032449D1
DE602004032449D1 DE602004032449T DE602004032449T DE602004032449D1 DE 602004032449 D1 DE602004032449 D1 DE 602004032449D1 DE 602004032449 T DE602004032449 T DE 602004032449T DE 602004032449 T DE602004032449 T DE 602004032449T DE 602004032449 D1 DE602004032449 D1 DE 602004032449D1
Authority
DE
Germany
Prior art keywords
light
regions
receiving element
stripes
wavelength plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004032449T
Other languages
English (en)
Inventor
Shojiro Kawakami
Takashi Sato
Naoki Hashimoto
Yoshihro Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Photonic Lattice Inc
Original Assignee
Japan Science and Technology Agency
Photonic Lattice Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003407485A external-priority patent/JP4153412B2/ja
Priority claimed from JP2003411786A external-priority patent/JP4174419B2/ja
Application filed by Japan Science and Technology Agency, Photonic Lattice Inc filed Critical Japan Science and Technology Agency
Publication of DE602004032449D1 publication Critical patent/DE602004032449D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE602004032449T 2003-09-17 2004-01-23 Polarisations-Analysegerät und entsprechende Methode Expired - Lifetime DE602004032449D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003363854 2003-09-17
JP2003407485A JP4153412B2 (ja) 2003-12-05 2003-12-05 偏光解析装置を用いた偏光解析方法
JP2003411786A JP4174419B2 (ja) 2003-09-17 2003-12-10 偏光解析装置
PCT/JP2004/000633 WO2005029050A1 (ja) 2003-09-17 2004-01-23 偏光解析装置および偏光解析方法

Publications (1)

Publication Number Publication Date
DE602004032449D1 true DE602004032449D1 (de) 2011-06-09

Family

ID=34381794

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004032449T Expired - Lifetime DE602004032449D1 (de) 2003-09-17 2004-01-23 Polarisations-Analysegerät und entsprechende Methode

Country Status (5)

Country Link
US (1) US7411677B2 (de)
EP (1) EP1666869B1 (de)
AT (1) ATE507471T1 (de)
DE (1) DE602004032449D1 (de)
WO (1) WO2005029050A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7292315B2 (en) * 2003-12-19 2007-11-06 Asml Masktools B.V. Optimized polarization illumination
JP4777064B2 (ja) 2005-12-29 2011-09-21 株式会社リコー 光学モジュール及びイメージング装置
EP3217660B1 (de) * 2007-06-15 2018-10-31 Panasonic Intellectual Property Management Co., Ltd. Bildverarbeitungsvorrichtung
JP5582147B2 (ja) * 2009-10-22 2014-09-03 日本電気株式会社 発光素子および該発光素子を用いた画像表示装置
WO2011048952A1 (ja) * 2009-10-22 2011-04-28 日本電気株式会社 発光素子および該発光素子を用いた画像表示装置
GB0919059D0 (en) * 2009-10-30 2009-12-16 Sencon Europ Ltd Application and inspection system
US9360302B2 (en) * 2011-12-15 2016-06-07 Kla-Tencor Corporation Film thickness monitor
EP2798322B1 (de) * 2011-12-31 2020-07-15 J.A. Woollam Co., Inc. Terahertz-ellipsometersystem und verwendungsverfahren dafür
JP6274916B2 (ja) 2014-03-10 2018-02-07 キヤノン株式会社 偏光情報取得ユニットを有する撮像装置
DE102015103706A1 (de) 2015-03-13 2016-09-15 CiS Forschungsinstitut für Mikrosensorik GmbH Optische Sensoranordnung zur Bestimmung der Eigenschaften einer dünnen Schicht
KR102659810B1 (ko) 2015-09-11 2024-04-23 삼성디스플레이 주식회사 결정화도 측정 장치 및 그 측정 방법
JP6598673B2 (ja) * 2015-12-24 2019-10-30 キヤノン株式会社 データ処理装置およびその方法
WO2017169968A1 (ja) 2016-03-30 2017-10-05 富士フイルム株式会社 光学積層フィルムおよび偏光イメージングセンサ
JP6817642B2 (ja) * 2016-08-24 2021-01-20 公立大学法人兵庫県立大学 エリプソメトリ装置およびエリプソメトリ方法
JP6673783B2 (ja) * 2016-08-29 2020-03-25 富士フイルム株式会社 偏光イメージセンサーおよび偏光イメージセンサーの製造方法
KR20220032922A (ko) * 2020-09-08 2022-03-15 삼성전자주식회사 퓨필 타원 편광 계측 장치 및 방법, 및 그 방법을 이용한 반도체 소자 제조방법

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4158506A (en) * 1977-11-15 1979-06-19 The United States Of America As Represented By The Secretary Of The Army Automatic determination of the polarization state of nanosecond laser pulses
US5327285A (en) * 1990-06-11 1994-07-05 Faris Sadeg M Methods for manufacturing micropolarizers
JPH04147040A (ja) 1990-10-09 1992-05-20 Smith Oriental Shokai:Kk 物品判定用信号発生装置
JPH05113371A (ja) * 1991-08-29 1993-05-07 Nkk Corp エリプソパラメータ測定方法及びエリプソメータ
US5416324A (en) * 1993-06-11 1995-05-16 Chun; Cornell S. L. Optical imaging device with integrated polarizer
US5479015A (en) * 1994-08-18 1995-12-26 Grumman Aerospace Corporation Multi-image detector assembly
US6075235A (en) * 1997-01-02 2000-06-13 Chun; Cornell Seu Lun High-resolution polarization-sensitive imaging sensors
US5890095A (en) * 1997-01-21 1999-03-30 Nichols Research Corporation System for receiving and enhancing electromagnetic radiation input signals
JP2003508772A (ja) * 1999-07-27 2003-03-04 コロラド・スクール・オブ・マインズ 平行検出分光楕円偏光計／偏光計
JP2002116085A (ja) * 2000-10-05 2002-04-19 Tetsuya Hamamoto 偏光計測装置
WO2004008196A1 (ja) * 2002-07-13 2004-01-22 Autocloning Technology Ltd. 偏光解析装置

Also Published As

Publication number Publication date
ATE507471T1 (de) 2011-05-15
EP1666869A4 (de) 2009-08-19
WO2005029050A1 (ja) 2005-03-31
US7411677B2 (en) 2008-08-12
EP1666869B1 (de) 2011-04-27
EP1666869A1 (de) 2006-06-07
US20070268490A1 (en) 2007-11-22

Similar Documents

Publication Publication Date Title
ATE507471T1 (de) Polarisations-analysegerät und entsprechende methode
US20180066991A1 (en) Polarization-selective scattering antenna arrays based polarimeter
EP2682741B1 (de) Vorrichtung zur messung optischer eigenschaften und verfahren zur messung optischer eigenschaften
Garcia-Caurel et al. Advanced Mueller ellipsometry instrumentation and data analysis
US20160313185A1 (en) Light polarization state modulation and detection apparatuses and detection method
US20060176471A1 (en) Optical anlysis system
US9074936B2 (en) Multidimensional pulse shaper and spectrometer
KR20180101604A (ko) 초분광 이미징 계측을 위한 시스템 및 방법
US11264256B2 (en) Wafer inspection apparatus
JP2000507349A (ja) 光学活性化合物の非侵襲的測定
US10634607B1 (en) Snapshot ellipsometer
JP6780791B2 (ja) 分光分析装置
US20090213374A1 (en) Optical Characteristic Measuring Apparatus and Optical Characteristics Measuring Method
WO2018038628A1 (ru) Устройство для идентификации алмаза
WO2014060466A1 (en) Dual beam device for simultaneous measurement of spectrum and polarization of light
JP5926953B2 (ja) 偏光解消板およびこれを用いた円二色性分光装置
US11530953B2 (en) Snapshot Mueller matrix polarimeter
US10119903B2 (en) Interferometric ellipsometry and method using conical refraction
EP2149040A2 (de) Verfahren und vorrichtung zum messen eines zirkulardichroismus in echtzeit
CN113092386A (zh) 一种自容式穆勒矩阵测量方法和装置
KR101672980B1 (ko) 틈 배치 구조체 및 그것을 이용한 측정 방법
JP7147657B2 (ja) 広帯域パルス光源装置、分光測定装置及び分光測定方法
EP2948780A1 (de) Spektrumsanalysator eines akustooptischen hf-signals
JP2004085359A (ja) テラヘルツパルス光計測装置
WO2007127760A3 (en) Spectroscopic ellipsometers