ATE507471T1 - Polarisations-analysegerät und entsprechende methode - Google Patents

Polarisations-analysegerät und entsprechende methode

Info

Publication number
ATE507471T1
ATE507471T1 AT04704745T AT04704745T ATE507471T1 AT E507471 T1 ATE507471 T1 AT E507471T1 AT 04704745 T AT04704745 T AT 04704745T AT 04704745 T AT04704745 T AT 04704745T AT E507471 T1 ATE507471 T1 AT E507471T1
Authority
AT
Austria
Prior art keywords
light
regions
receiving element
stripes
wavelength plate
Prior art date
Application number
AT04704745T
Other languages
English (en)
Inventor
Shojiro Kawakami
Takashi Sato
Naoki Hashimoto
Yoshihro Sasaki
Original Assignee
Photonic Lattice Inc
Japan Science & Tech Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003407485A external-priority patent/JP4153412B2/ja
Priority claimed from JP2003411786A external-priority patent/JP4174419B2/ja
Application filed by Photonic Lattice Inc, Japan Science & Tech Agency filed Critical Photonic Lattice Inc
Application granted granted Critical
Publication of ATE507471T1 publication Critical patent/ATE507471T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
AT04704745T 2003-09-17 2004-01-23 Polarisations-analysegerät und entsprechende methode ATE507471T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003363854 2003-09-17
JP2003407485A JP4153412B2 (ja) 2003-12-05 2003-12-05 偏光解析装置を用いた偏光解析方法
JP2003411786A JP4174419B2 (ja) 2003-09-17 2003-12-10 偏光解析装置
PCT/JP2004/000633 WO2005029050A1 (ja) 2003-09-17 2004-01-23 偏光解析装置および偏光解析方法

Publications (1)

Publication Number Publication Date
ATE507471T1 true ATE507471T1 (de) 2011-05-15

Family

ID=34381794

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04704745T ATE507471T1 (de) 2003-09-17 2004-01-23 Polarisations-analysegerät und entsprechende methode

Country Status (5)

Country Link
US (1) US7411677B2 (de)
EP (1) EP1666869B1 (de)
AT (1) ATE507471T1 (de)
DE (1) DE602004032449D1 (de)
WO (1) WO2005029050A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7292315B2 (en) * 2003-12-19 2007-11-06 Asml Masktools B.V. Optimized polarization illumination
JP4777064B2 (ja) 2005-12-29 2011-09-21 株式会社リコー 光学モジュール及びイメージング装置
US8130293B2 (en) * 2007-06-15 2012-03-06 Panasonic Corporation Image processing apparatus having patterned polarizer, patterned polarizer, and image processing method
US8643050B2 (en) * 2009-10-22 2014-02-04 Nec Corporation Light emitting element and image display apparatus using the light emitting element
US8866172B2 (en) * 2009-10-22 2014-10-21 Nec Corporation Light emitting element and image display apparatus using the light emitting element
GB0919059D0 (en) * 2009-10-30 2009-12-16 Sencon Europ Ltd Application and inspection system
US9360302B2 (en) * 2011-12-15 2016-06-07 Kla-Tencor Corporation Film thickness monitor
WO2013101252A1 (en) * 2011-12-31 2013-07-04 J.A. Woollam Co., Inc. Terahertz ellipsometer system, and method of use
JP6274916B2 (ja) 2014-03-10 2018-02-07 キヤノン株式会社 偏光情報取得ユニットを有する撮像装置
DE102015103706A1 (de) 2015-03-13 2016-09-15 CiS Forschungsinstitut für Mikrosensorik GmbH Optische Sensoranordnung zur Bestimmung der Eigenschaften einer dünnen Schicht
KR102659810B1 (ko) * 2015-09-11 2024-04-23 삼성디스플레이 주식회사 결정화도 측정 장치 및 그 측정 방법
JP6598673B2 (ja) * 2015-12-24 2019-10-30 キヤノン株式会社 データ処理装置およびその方法
JP6616494B2 (ja) 2016-03-30 2019-12-04 富士フイルム株式会社 光学積層フィルムおよび偏光イメージングセンサ
JP6817642B2 (ja) 2016-08-24 2021-01-20 公立大学法人兵庫県立大学 エリプソメトリ装置およびエリプソメトリ方法
JP6673783B2 (ja) * 2016-08-29 2020-03-25 富士フイルム株式会社 偏光イメージセンサーおよび偏光イメージセンサーの製造方法
KR20220032922A (ko) * 2020-09-08 2022-03-15 삼성전자주식회사 퓨필 타원 편광 계측 장치 및 방법, 및 그 방법을 이용한 반도체 소자 제조방법

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4158506A (en) * 1977-11-15 1979-06-19 The United States Of America As Represented By The Secretary Of The Army Automatic determination of the polarization state of nanosecond laser pulses
US5327285A (en) * 1990-06-11 1994-07-05 Faris Sadeg M Methods for manufacturing micropolarizers
JPH04147040A (ja) 1990-10-09 1992-05-20 Smith Oriental Shokai:Kk 物品判定用信号発生装置
JPH05113371A (ja) * 1991-08-29 1993-05-07 Nkk Corp エリプソパラメータ測定方法及びエリプソメータ
US5416324A (en) * 1993-06-11 1995-05-16 Chun; Cornell S. L. Optical imaging device with integrated polarizer
US5479015A (en) * 1994-08-18 1995-12-26 Grumman Aerospace Corporation Multi-image detector assembly
US6075235A (en) 1997-01-02 2000-06-13 Chun; Cornell Seu Lun High-resolution polarization-sensitive imaging sensors
US5890095A (en) * 1997-01-21 1999-03-30 Nichols Research Corporation System for receiving and enhancing electromagnetic radiation input signals
EP1218707A1 (de) * 1999-07-27 2002-07-03 Colorado School Of Mines Parallel detektierende spetroskopische ellipsometer/ palarimeter
JP2002116085A (ja) * 2000-10-05 2002-04-19 Tetsuya Hamamoto 偏光計測装置
JPWO2004008196A1 (ja) * 2002-07-13 2005-11-10 有限会社オートクローニング・テクノロジー 偏光解析装置

Also Published As

Publication number Publication date
EP1666869A4 (de) 2009-08-19
DE602004032449D1 (de) 2011-06-09
US20070268490A1 (en) 2007-11-22
WO2005029050A1 (ja) 2005-03-31
EP1666869A1 (de) 2006-06-07
EP1666869B1 (de) 2011-04-27
US7411677B2 (en) 2008-08-12

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