DE602004023944D1 - Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum - Google Patents
Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuumInfo
- Publication number
- DE602004023944D1 DE602004023944D1 DE602004023944T DE602004023944T DE602004023944D1 DE 602004023944 D1 DE602004023944 D1 DE 602004023944D1 DE 602004023944 T DE602004023944 T DE 602004023944T DE 602004023944 T DE602004023944 T DE 602004023944T DE 602004023944 D1 DE602004023944 D1 DE 602004023944D1
- Authority
- DE
- Germany
- Prior art keywords
- sup
- article
- vacuum
- coating
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract 6
- 229910052799 carbon Inorganic materials 0.000 title abstract 5
- 239000011248 coating agent Substances 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000002500 ions Chemical class 0.000 abstract 3
- 229910003481 amorphous carbon Inorganic materials 0.000 abstract 2
- 238000010891 electric arc Methods 0.000 abstract 2
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 230000000977 initiatory effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2003115309/02A RU2240376C1 (ru) | 2003-05-22 | 2003-05-22 | Способ формирования сверхтвердого аморфного углеродного покрытия в вакууме |
PCT/RU2004/000149 WO2004104263A1 (en) | 2003-05-22 | 2004-04-21 | A method for forming a superhard amorphous carbon coating in vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004023944D1 true DE602004023944D1 (de) | 2009-12-17 |
Family
ID=33476132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004023944T Expired - Lifetime DE602004023944D1 (de) | 2003-05-22 | 2004-04-21 | Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum |
Country Status (9)
Country | Link |
---|---|
US (1) | US20070134436A1 (de) |
EP (1) | EP1639149B1 (de) |
JP (1) | JP4489079B2 (de) |
CN (1) | CN100554497C (de) |
AT (1) | ATE447630T1 (de) |
DE (1) | DE602004023944D1 (de) |
IL (1) | IL172000A (de) |
RU (1) | RU2240376C1 (de) |
WO (1) | WO2004104263A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1884978B1 (de) * | 2006-08-03 | 2011-10-19 | Creepservice S.à.r.l. | Verfahren zur Beschichtung von Substraten mit diamantähnlichen Kohlenstoffschichten |
JP5320815B2 (ja) * | 2008-05-20 | 2013-10-23 | 富士電機株式会社 | 磁気記録媒体用薄膜の成膜方法およびそれが用いられる成膜装置 |
WO2010020274A1 (en) * | 2008-08-18 | 2010-02-25 | Metso Paper, Inc. | Coating for lowering friction effect and improving wear resistance of a component in a fibre web machine and process of producing the same |
EP2587518B1 (de) * | 2011-10-31 | 2018-12-19 | IHI Hauzer Techno Coating B.V. | Vorrichtung und Verfahren zur Abscheidung wasserstofffreier ta-C-Schichten auf Werkstücken und Werkstück |
WO2013075061A1 (en) * | 2011-11-17 | 2013-05-23 | United Protective Technologies | Carbon based coatings and methods of producing the same |
RU2527113C1 (ru) * | 2013-03-04 | 2014-08-27 | Игорь Валерьевич Белашов | Способ нанесения аморфного алмазоподобного покрытия на лезвия хирургических скальпелей |
CN103409723A (zh) * | 2013-06-29 | 2013-11-27 | 电子科技大学 | 薄膜沉积制备方法以及纳米纤维结构柔性缓冲层制备方法 |
RU2532749C9 (ru) * | 2013-07-01 | 2015-01-10 | Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук | Способ получения наноразмерных слоев углерода со свойствами алмаза |
JP5627148B1 (ja) * | 2013-07-24 | 2014-11-19 | 株式会社リケン | ピストンリング及びその製造方法 |
KR102156989B1 (ko) | 2015-06-24 | 2020-09-16 | 캐논 아네르바 가부시키가이샤 | 진공 아크 성막 장치 및 성막 방법 |
JP5997417B1 (ja) * | 2015-06-24 | 2016-09-28 | キヤノンアネルバ株式会社 | 真空アーク成膜装置および成膜方法 |
RU2651836C1 (ru) * | 2017-04-13 | 2018-04-24 | Олег Андреевич Стрелецкий | Способ нанесения антиадгезивного, биосовместимого и бактериостатичного покрытия на основе углерода на изделия медицинского назначения из материала с термомеханической памятью формы |
RU2656312C1 (ru) * | 2017-08-14 | 2018-06-04 | Федеральное государственное бюджетное учреждение науки Институт физики металлов имени М.Н. Михеева Уральского отделения Российской академии наук (ИФМ УрО РАН) | Способ нанесения твердых износостойких наноструктурных покрытий из аморфного алмазоподобного углерода |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5474816A (en) * | 1993-04-16 | 1995-12-12 | The Regents Of The University Of California | Fabrication of amorphous diamond films |
EP0757615B1 (de) * | 1994-04-25 | 2004-03-31 | The Gillette Company | Verfahren zum amorphen diamantbeschichten von klingen |
RU2095464C1 (ru) * | 1996-01-12 | 1997-11-10 | Акционерное общество закрытого типа "Тетра" | Биокарбон, способ его получения и устройство для его осуществления |
TW353758B (en) * | 1996-09-30 | 1999-03-01 | Motorola Inc | Electron emissive film and method |
RU2114210C1 (ru) * | 1997-05-30 | 1998-06-27 | Валерий Павлович Гончаренко | Способ формирования углеродного алмазоподобного покрытия в вакууме |
US6455021B1 (en) * | 1998-07-21 | 2002-09-24 | Showa Denko K.K. | Method for producing carbon nanotubes |
CA2256846A1 (fr) * | 1998-12-08 | 2000-06-08 | Marius Morin | Roue retractable pour motoneige |
US6548817B1 (en) * | 1999-03-31 | 2003-04-15 | The Regents Of The University Of California | Miniaturized cathodic arc plasma source |
TW483945B (en) * | 1999-11-10 | 2002-04-21 | Nat Science Council | Field emission device film deposition manufacture process |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
-
2003
- 2003-05-22 RU RU2003115309/02A patent/RU2240376C1/ru not_active IP Right Cessation
-
2004
- 2004-04-21 WO PCT/RU2004/000149 patent/WO2004104263A1/en active Application Filing
- 2004-04-21 JP JP2006532165A patent/JP4489079B2/ja not_active Expired - Lifetime
- 2004-04-21 US US10/558,000 patent/US20070134436A1/en not_active Abandoned
- 2004-04-21 CN CNB2004800141714A patent/CN100554497C/zh not_active Expired - Fee Related
- 2004-04-21 DE DE602004023944T patent/DE602004023944D1/de not_active Expired - Lifetime
- 2004-04-21 AT AT04728724T patent/ATE447630T1/de active
- 2004-04-21 EP EP04728724A patent/EP1639149B1/de not_active Expired - Lifetime
-
2005
- 2005-11-16 IL IL172000A patent/IL172000A/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN1795285A (zh) | 2006-06-28 |
ATE447630T1 (de) | 2009-11-15 |
EP1639149A4 (de) | 2008-08-06 |
US20070134436A1 (en) | 2007-06-14 |
JP4489079B2 (ja) | 2010-06-23 |
EP1639149B1 (de) | 2009-11-04 |
RU2240376C1 (ru) | 2004-11-20 |
IL172000A (en) | 2009-09-22 |
WO2004104263A1 (en) | 2004-12-02 |
EP1639149A1 (de) | 2006-03-29 |
JP2007501331A (ja) | 2007-01-25 |
CN100554497C (zh) | 2009-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |