DE602004023944D1 - Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum - Google Patents

Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum

Info

Publication number
DE602004023944D1
DE602004023944D1 DE602004023944T DE602004023944T DE602004023944D1 DE 602004023944 D1 DE602004023944 D1 DE 602004023944D1 DE 602004023944 T DE602004023944 T DE 602004023944T DE 602004023944 T DE602004023944 T DE 602004023944T DE 602004023944 D1 DE602004023944 D1 DE 602004023944D1
Authority
DE
Germany
Prior art keywords
sup
article
vacuum
coating
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004023944T
Other languages
English (en)
Inventor
Alexandr Yakovlevich Kolpakov
Vitaly Nikolaevich Inkin
Sergei Ivanovich Ukhanov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Argor Aljba SA
Original Assignee
Argor Aljba SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Argor Aljba SA filed Critical Argor Aljba SA
Publication of DE602004023944D1 publication Critical patent/DE602004023944D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
DE602004023944T 2003-05-22 2004-04-21 Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum Expired - Lifetime DE602004023944D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2003115309/02A RU2240376C1 (ru) 2003-05-22 2003-05-22 Способ формирования сверхтвердого аморфного углеродного покрытия в вакууме
PCT/RU2004/000149 WO2004104263A1 (en) 2003-05-22 2004-04-21 A method for forming a superhard amorphous carbon coating in vacuum

Publications (1)

Publication Number Publication Date
DE602004023944D1 true DE602004023944D1 (de) 2009-12-17

Family

ID=33476132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004023944T Expired - Lifetime DE602004023944D1 (de) 2003-05-22 2004-04-21 Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum

Country Status (9)

Country Link
US (1) US20070134436A1 (de)
EP (1) EP1639149B1 (de)
JP (1) JP4489079B2 (de)
CN (1) CN100554497C (de)
AT (1) ATE447630T1 (de)
DE (1) DE602004023944D1 (de)
IL (1) IL172000A (de)
RU (1) RU2240376C1 (de)
WO (1) WO2004104263A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1884978B1 (de) * 2006-08-03 2011-10-19 Creepservice S.à.r.l. Verfahren zur Beschichtung von Substraten mit diamantähnlichen Kohlenstoffschichten
JP5320815B2 (ja) * 2008-05-20 2013-10-23 富士電機株式会社 磁気記録媒体用薄膜の成膜方法およびそれが用いられる成膜装置
WO2010020274A1 (en) * 2008-08-18 2010-02-25 Metso Paper, Inc. Coating for lowering friction effect and improving wear resistance of a component in a fibre web machine and process of producing the same
EP2587518B1 (de) * 2011-10-31 2018-12-19 IHI Hauzer Techno Coating B.V. Vorrichtung und Verfahren zur Abscheidung wasserstofffreier ta-C-Schichten auf Werkstücken und Werkstück
WO2013075061A1 (en) * 2011-11-17 2013-05-23 United Protective Technologies Carbon based coatings and methods of producing the same
RU2527113C1 (ru) * 2013-03-04 2014-08-27 Игорь Валерьевич Белашов Способ нанесения аморфного алмазоподобного покрытия на лезвия хирургических скальпелей
CN103409723A (zh) * 2013-06-29 2013-11-27 电子科技大学 薄膜沉积制备方法以及纳米纤维结构柔性缓冲层制备方法
RU2532749C9 (ru) * 2013-07-01 2015-01-10 Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук Способ получения наноразмерных слоев углерода со свойствами алмаза
JP5627148B1 (ja) * 2013-07-24 2014-11-19 株式会社リケン ピストンリング及びその製造方法
KR102156989B1 (ko) 2015-06-24 2020-09-16 캐논 아네르바 가부시키가이샤 진공 아크 성막 장치 및 성막 방법
JP5997417B1 (ja) * 2015-06-24 2016-09-28 キヤノンアネルバ株式会社 真空アーク成膜装置および成膜方法
RU2651836C1 (ru) * 2017-04-13 2018-04-24 Олег Андреевич Стрелецкий Способ нанесения антиадгезивного, биосовместимого и бактериостатичного покрытия на основе углерода на изделия медицинского назначения из материала с термомеханической памятью формы
RU2656312C1 (ru) * 2017-08-14 2018-06-04 Федеральное государственное бюджетное учреждение науки Институт физики металлов имени М.Н. Михеева Уральского отделения Российской академии наук (ИФМ УрО РАН) Способ нанесения твердых износостойких наноструктурных покрытий из аморфного алмазоподобного углерода

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5474816A (en) * 1993-04-16 1995-12-12 The Regents Of The University Of California Fabrication of amorphous diamond films
EP0757615B1 (de) * 1994-04-25 2004-03-31 The Gillette Company Verfahren zum amorphen diamantbeschichten von klingen
RU2095464C1 (ru) * 1996-01-12 1997-11-10 Акционерное общество закрытого типа "Тетра" Биокарбон, способ его получения и устройство для его осуществления
TW353758B (en) * 1996-09-30 1999-03-01 Motorola Inc Electron emissive film and method
RU2114210C1 (ru) * 1997-05-30 1998-06-27 Валерий Павлович Гончаренко Способ формирования углеродного алмазоподобного покрытия в вакууме
US6455021B1 (en) * 1998-07-21 2002-09-24 Showa Denko K.K. Method for producing carbon nanotubes
CA2256846A1 (fr) * 1998-12-08 2000-06-08 Marius Morin Roue retractable pour motoneige
US6548817B1 (en) * 1999-03-31 2003-04-15 The Regents Of The University Of California Miniaturized cathodic arc plasma source
TW483945B (en) * 1999-11-10 2002-04-21 Nat Science Council Field emission device film deposition manufacture process
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems

Also Published As

Publication number Publication date
CN1795285A (zh) 2006-06-28
ATE447630T1 (de) 2009-11-15
EP1639149A4 (de) 2008-08-06
US20070134436A1 (en) 2007-06-14
JP4489079B2 (ja) 2010-06-23
EP1639149B1 (de) 2009-11-04
RU2240376C1 (ru) 2004-11-20
IL172000A (en) 2009-09-22
WO2004104263A1 (en) 2004-12-02
EP1639149A1 (de) 2006-03-29
JP2007501331A (ja) 2007-01-25
CN100554497C (zh) 2009-10-28

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