ATE447630T1 - Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum - Google Patents

Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum

Info

Publication number
ATE447630T1
ATE447630T1 AT04728724T AT04728724T ATE447630T1 AT E447630 T1 ATE447630 T1 AT E447630T1 AT 04728724 T AT04728724 T AT 04728724T AT 04728724 T AT04728724 T AT 04728724T AT E447630 T1 ATE447630 T1 AT E447630T1
Authority
AT
Austria
Prior art keywords
sup
article
vacuum
amorphous carbon
pulsed
Prior art date
Application number
AT04728724T
Other languages
English (en)
Inventor
Alexandr Yakovlevich Kolpakov
Vitaly Nikolaevich Inkin
Sergei Ivanovich Ukhanov
Original Assignee
Argor Aljba S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Argor Aljba S A filed Critical Argor Aljba S A
Application granted granted Critical
Publication of ATE447630T1 publication Critical patent/ATE447630T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
AT04728724T 2003-05-22 2004-04-21 Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum ATE447630T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2003115309/02A RU2240376C1 (ru) 2003-05-22 2003-05-22 Способ формирования сверхтвердого аморфного углеродного покрытия в вакууме
PCT/RU2004/000149 WO2004104263A1 (en) 2003-05-22 2004-04-21 A method for forming a superhard amorphous carbon coating in vacuum

Publications (1)

Publication Number Publication Date
ATE447630T1 true ATE447630T1 (de) 2009-11-15

Family

ID=33476132

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04728724T ATE447630T1 (de) 2003-05-22 2004-04-21 Verfahren zur herstellung einer superharten beschichtung aus amorphem kohlenstoff im vakuum

Country Status (9)

Country Link
US (1) US20070134436A1 (de)
EP (1) EP1639149B1 (de)
JP (1) JP4489079B2 (de)
CN (1) CN100554497C (de)
AT (1) ATE447630T1 (de)
DE (1) DE602004023944D1 (de)
IL (1) IL172000A (de)
RU (1) RU2240376C1 (de)
WO (1) WO2004104263A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2273670C1 (ru) * 2004-12-09 2006-04-10 Владимир Иванович Пудов Способ термомагнитной обработки изделий из инструментальной быстрорежущей стали
RU2310013C2 (ru) * 2005-11-25 2007-11-10 Андрей Робертович Кожевников Способ получения сверхтвердых покрытий
EP1884978B1 (de) * 2006-08-03 2011-10-19 Creepservice S.à.r.l. Verfahren zur Beschichtung von Substraten mit diamantähnlichen Kohlenstoffschichten
JP5320815B2 (ja) * 2008-05-20 2013-10-23 富士電機株式会社 磁気記録媒体用薄膜の成膜方法およびそれが用いられる成膜装置
WO2010020274A1 (en) * 2008-08-18 2010-02-25 Metso Paper, Inc. Coating for lowering friction effect and improving wear resistance of a component in a fibre web machine and process of producing the same
EP2587518B1 (de) * 2011-10-31 2018-12-19 IHI Hauzer Techno Coating B.V. Vorrichtung und Verfahren zur Abscheidung wasserstofffreier ta-C-Schichten auf Werkstücken und Werkstück
WO2013075061A1 (en) * 2011-11-17 2013-05-23 United Protective Technologies Carbon based coatings and methods of producing the same
RU2527113C1 (ru) * 2013-03-04 2014-08-27 Игорь Валерьевич Белашов Способ нанесения аморфного алмазоподобного покрытия на лезвия хирургических скальпелей
CN103409723A (zh) * 2013-06-29 2013-11-27 电子科技大学 薄膜沉积制备方法以及纳米纤维结构柔性缓冲层制备方法
RU2532749C9 (ru) * 2013-07-01 2015-01-10 Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук Способ получения наноразмерных слоев углерода со свойствами алмаза
JP5627148B1 (ja) * 2013-07-24 2014-11-19 株式会社リケン ピストンリング及びその製造方法
SG11201709951VA (en) 2015-06-24 2018-01-30 Canon Anelva Corp Vacuum arc deposition apparatus and deposition method
JP5997417B1 (ja) * 2015-06-24 2016-09-28 キヤノンアネルバ株式会社 真空アーク成膜装置および成膜方法
RU2651836C1 (ru) * 2017-04-13 2018-04-24 Олег Андреевич Стрелецкий Способ нанесения антиадгезивного, биосовместимого и бактериостатичного покрытия на основе углерода на изделия медицинского назначения из материала с термомеханической памятью формы
RU2656312C1 (ru) * 2017-08-14 2018-06-04 Федеральное государственное бюджетное учреждение науки Институт физики металлов имени М.Н. Михеева Уральского отделения Российской академии наук (ИФМ УрО РАН) Способ нанесения твердых износостойких наноструктурных покрытий из аморфного алмазоподобного углерода

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2032765C1 (ru) * 1987-04-03 1995-04-10 Фудзицу Лимитед Способ нанесения алмазного покрытия из паровой фазы и устройство для его осуществления
US5474816A (en) * 1993-04-16 1995-12-12 The Regents Of The University Of California Fabrication of amorphous diamond films
PL178753B1 (pl) * 1994-04-25 2000-06-30 Gillette Co Ostrze golarki i sposób wytwarzania ostrza golarki
RU2095464C1 (ru) * 1996-01-12 1997-11-10 Акционерное общество закрытого типа "Тетра" Биокарбон, способ его получения и устройство для его осуществления
TW353758B (en) * 1996-09-30 1999-03-01 Motorola Inc Electron emissive film and method
RU2114210C1 (ru) * 1997-05-30 1998-06-27 Валерий Павлович Гончаренко Способ формирования углеродного алмазоподобного покрытия в вакууме
US6455021B1 (en) * 1998-07-21 2002-09-24 Showa Denko K.K. Method for producing carbon nanotubes
CA2256846A1 (fr) * 1998-12-08 2000-06-08 Marius Morin Roue retractable pour motoneige
US6548817B1 (en) * 1999-03-31 2003-04-15 The Regents Of The University Of California Miniaturized cathodic arc plasma source
TW483945B (en) * 1999-11-10 2002-04-21 Nat Science Council Field emission device film deposition manufacture process
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems

Also Published As

Publication number Publication date
DE602004023944D1 (de) 2009-12-17
RU2240376C1 (ru) 2004-11-20
EP1639149A4 (de) 2008-08-06
JP4489079B2 (ja) 2010-06-23
JP2007501331A (ja) 2007-01-25
CN100554497C (zh) 2009-10-28
EP1639149B1 (de) 2009-11-04
US20070134436A1 (en) 2007-06-14
WO2004104263A1 (en) 2004-12-02
IL172000A (en) 2009-09-22
CN1795285A (zh) 2006-06-28
EP1639149A1 (de) 2006-03-29

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