DE602004003316D1 - Membranpumpe für kühlluft - Google Patents

Membranpumpe für kühlluft

Info

Publication number
DE602004003316D1
DE602004003316D1 DE602004003316T DE602004003316T DE602004003316D1 DE 602004003316 D1 DE602004003316 D1 DE 602004003316D1 DE 602004003316 T DE602004003316 T DE 602004003316T DE 602004003316 T DE602004003316 T DE 602004003316T DE 602004003316 D1 DE602004003316 D1 DE 602004003316D1
Authority
DE
Germany
Prior art keywords
cooling air
diaphragm pump
diaphragm
pump
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004003316T
Other languages
English (en)
Other versions
DE602004003316T2 (de
Inventor
Hye-Jung Cho
Xiaobing Luo
Zhaoying Zhou
Xing Yang
Xiongying Ye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Samsung Electronics Co Ltd
Original Assignee
Tsinghua University
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CNB031570690A external-priority patent/CN100427759C/zh
Application filed by Tsinghua University, Samsung Electronics Co Ltd filed Critical Tsinghua University
Publication of DE602004003316D1 publication Critical patent/DE602004003316D1/de
Application granted granted Critical
Publication of DE602004003316T2 publication Critical patent/DE602004003316T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE602004003316T 2003-09-12 2004-08-24 Membranpumpe für Kühlluft Active DE602004003316T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CN03157069 2003-09-12
CNB031570690A CN100427759C (zh) 2003-09-12 2003-09-12 双压电梁驱动的膜片气泵
KR1020040051674A KR100594802B1 (ko) 2003-09-12 2004-07-02 다이어프램 에어펌프
KR2004051674 2004-07-02

Publications (2)

Publication Number Publication Date
DE602004003316D1 true DE602004003316D1 (de) 2007-01-04
DE602004003316T2 DE602004003316T2 (de) 2007-03-15

Family

ID=34137225

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004003316T Active DE602004003316T2 (de) 2003-09-12 2004-08-24 Membranpumpe für Kühlluft

Country Status (4)

Country Link
US (1) US7553135B2 (de)
EP (1) EP1515043B1 (de)
JP (1) JP4057001B2 (de)
DE (1) DE602004003316T2 (de)

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JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5900155B2 (ja) * 2011-09-06 2016-04-06 株式会社村田製作所 流体制御装置
JP5533823B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
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US10119532B2 (en) * 2015-02-16 2018-11-06 Hamilton Sundstrand Corporation System and method for cooling electrical components using an electroactive polymer actuator
JP6319517B2 (ja) * 2015-06-11 2018-05-09 株式会社村田製作所 ポンプ
KR101704571B1 (ko) * 2015-09-21 2017-02-08 현대자동차주식회사 배터리 냉각 장치
CN106733310B (zh) * 2015-11-20 2019-03-22 英业达科技有限公司 合成射流器
CN105508209B (zh) * 2016-03-04 2017-07-25 青岛农业大学 大流量阻流体无阀压电泵
US10438868B2 (en) * 2017-02-20 2019-10-08 Microjet Technology Co., Ltd. Air-cooling heat dissipation device
TWI652408B (zh) * 2017-09-15 2019-03-01 研能科技股份有限公司 氣體輸送裝置
CN109899327B (zh) * 2017-12-07 2021-09-21 昆山纬绩资通有限公司 气流产生装置
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CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
US11043444B2 (en) 2018-08-10 2021-06-22 Frore Systems Inc. Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices
US11464140B2 (en) * 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US10487817B1 (en) * 2018-11-02 2019-11-26 Baoxiang Shan Methods for creating an undulating structure
CN109772225B (zh) * 2019-03-01 2021-03-12 浙江师范大学 一种多级流体混合器
CN109772223B (zh) * 2019-03-01 2021-02-26 浙江师范大学 一种流体混合器
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US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
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US20210183739A1 (en) * 2019-12-17 2021-06-17 Frore Systems Inc. Airflow control in active cooling systems
CN111779656B (zh) * 2020-06-17 2022-05-10 长春大学 一种双摆式压电风机
US11956921B1 (en) * 2020-08-28 2024-04-09 Frore Systems Inc. Support structure designs for MEMS-based active cooling
CN112177903A (zh) * 2020-09-29 2021-01-05 长春工业大学 一种矩形腔柔性膜双振子无阀压电泵
KR20230075503A (ko) 2020-10-02 2023-05-31 프로리 시스템스 인코포레이티드 능동 방열판
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CN112588221B (zh) * 2020-12-22 2022-03-01 哈尔滨工业大学 一种组合式隔膜驱动微流控反应系统
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Also Published As

Publication number Publication date
US7553135B2 (en) 2009-06-30
DE602004003316T2 (de) 2007-03-15
US20050089415A1 (en) 2005-04-28
EP1515043B1 (de) 2006-11-22
EP1515043A1 (de) 2005-03-16
JP2005090510A (ja) 2005-04-07
JP4057001B2 (ja) 2008-03-05

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Legal Events

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