DE60200343D1 - Fluidkontrollvorrichtung - Google Patents

Fluidkontrollvorrichtung

Info

Publication number
DE60200343D1
DE60200343D1 DE60200343T DE60200343T DE60200343D1 DE 60200343 D1 DE60200343 D1 DE 60200343D1 DE 60200343 T DE60200343 T DE 60200343T DE 60200343 T DE60200343 T DE 60200343T DE 60200343 D1 DE60200343 D1 DE 60200343D1
Authority
DE
Germany
Prior art keywords
control device
fluid control
fluid
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60200343T
Other languages
English (en)
Other versions
DE60200343T2 (de
Inventor
Michio Yamaji
Tsutomu Shinohara
Ichiro Mine
Izuro Shikata
Kenji Tsubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE60200343D1 publication Critical patent/DE60200343D1/de
Publication of DE60200343T2 publication Critical patent/DE60200343T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
    • F24H1/121—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium using electric energy supply
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
DE60200343T 2001-07-05 2002-07-01 Fluidkontrollvorrichtung Expired - Fee Related DE60200343T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001204199A JP4655423B2 (ja) 2001-07-05 2001-07-05 流体制御装置
JP2001204199 2001-07-05

Publications (2)

Publication Number Publication Date
DE60200343D1 true DE60200343D1 (de) 2004-05-13
DE60200343T2 DE60200343T2 (de) 2005-05-12

Family

ID=19040704

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60200343T Expired - Fee Related DE60200343T2 (de) 2001-07-05 2002-07-01 Fluidkontrollvorrichtung

Country Status (6)

Country Link
US (1) US6554020B2 (de)
EP (1) EP1273839B1 (de)
JP (1) JP4655423B2 (de)
KR (1) KR100825845B1 (de)
DE (1) DE60200343T2 (de)
TW (1) TW591184B (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1289851C (zh) * 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP4596409B2 (ja) * 2003-04-21 2010-12-08 株式会社東京技術研究所 バルブ装着用ヒータユニット
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
TWI279158B (en) 2003-11-07 2007-04-11 Celerity Group Inc Surface mount heater
US7383648B1 (en) * 2004-02-23 2008-06-10 Reebok International Ltd. Inflatable support system for an article of footwear
US7770263B2 (en) * 2004-11-18 2010-08-10 Beza, L.P. Non-metallic devices for holding paper, cards, and wallets
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
JP4355724B2 (ja) * 2006-12-25 2009-11-04 シーケーディ株式会社 ガス集積ユニット
JP4749447B2 (ja) * 2008-07-23 2011-08-17 Ｕｄトラックス株式会社 配管継手用ヒータ部品
JP5048717B2 (ja) * 2009-05-28 2012-10-17 Ｃｋｄ株式会社 真空用開閉弁
JP5797010B2 (ja) * 2011-05-20 2015-10-21 株式会社フジキン 流体制御装置
JP6475950B2 (ja) * 2014-10-29 2019-02-27 株式会社フジキン 流体制御器用加熱装置および流体制御装置
JP6630483B2 (ja) * 2015-03-31 2020-01-15 株式会社フジキン センサ保持具および流体制御装置
JP6484497B2 (ja) * 2015-04-24 2019-03-13 株式会社フジキン 断熱カバーおよび流体制御装置
BE1024953B1 (fr) * 2017-01-31 2018-08-30 Out And Out Chemistry Sprl Méthode pour connecter au moins deux vannes fluidiques et le système de communication fluidique mis en œuvre
KR20210143270A (ko) * 2019-03-25 2021-11-26 가부시키가이샤 후지킨 온도 센서의 부착 구조체
JP7365662B2 (ja) * 2019-03-26 2023-10-20 株式会社フジキン ヒータ固定具および流体制御装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB822821A (en) 1956-06-20 1959-11-04 Plax Corp Improvements in or relating to a process and apparatus for forming tubular film of organic thermoplastic material
US3322381A (en) * 1965-04-27 1967-05-30 Designa G M B H Display device
JPS5111451Y2 (de) * 1971-12-16 1976-03-27
US3718881A (en) * 1972-03-27 1973-02-27 Gen Motors Corp Detachable fastening clip
US4094483A (en) * 1977-06-06 1978-06-13 Addmaster Corporation Mounting device
US4313048A (en) * 1978-10-10 1982-01-26 Rolf C. Hagen (Usa) Corp. Thermostatically controlled externally mounted electric aquarium heater
JPS5631404Y2 (de) * 1978-11-20 1981-07-27
JPS5576176A (en) * 1978-12-04 1980-06-09 Toho Chem Ind Co Ltd High temperature dyeing of polyester synthetic fiber
US4396824A (en) * 1979-10-09 1983-08-02 Siltec Corporation Conduit for high temperature transfer of molten semiconductor crystalline material
GB2156191B (en) * 1984-03-28 1987-04-23 Jeremy Frank Lawford Phillips Aquarium heater
DE3623766C1 (de) 1986-07-15 1987-06-11 Kurt 7307 Aichwald De Lorber
US5455014A (en) * 1993-07-20 1995-10-03 Hughes Aircraft Company Liquid deposition source gas delivery system
US5915444A (en) * 1996-01-30 1999-06-29 Aluma Shield Industries, Inc. Garage door panel
JP3997338B2 (ja) * 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
JP3785516B2 (ja) * 1997-03-07 2006-06-14 株式会社フジキン 流体制御装置
JP3919208B2 (ja) * 1997-08-01 2007-05-23 シーケーディ株式会社 プロセスガス供給ユニット
JPH11294615A (ja) * 1998-04-10 1999-10-29 Ckd Corp 集積弁
JP2000230670A (ja) * 1999-02-10 2000-08-22 Hitachi Metals Ltd ヒータ付き集積流体制御装置
US6129108A (en) * 1999-12-03 2000-10-10 United Semiconductor Corp Fluid delivering system
JP2001301374A (ja) * 2000-04-21 2001-10-31 Kouichi Fukiya クリップ
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置

Also Published As

Publication number Publication date
JP2003021262A (ja) 2003-01-24
DE60200343T2 (de) 2005-05-12
KR100825845B1 (ko) 2008-04-28
JP4655423B2 (ja) 2011-03-23
KR20030005011A (ko) 2003-01-15
US20030005959A1 (en) 2003-01-09
TW591184B (en) 2004-06-11
US6554020B2 (en) 2003-04-29
EP1273839A1 (de) 2003-01-08
EP1273839B1 (de) 2004-04-07

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee