DE60138323D1 - Thermischer Sensor zum Messen der Luftströmung - Google Patents

Thermischer Sensor zum Messen der Luftströmung

Info

Publication number
DE60138323D1
DE60138323D1 DE60138323T DE60138323T DE60138323D1 DE 60138323 D1 DE60138323 D1 DE 60138323D1 DE 60138323 T DE60138323 T DE 60138323T DE 60138323 T DE60138323 T DE 60138323T DE 60138323 D1 DE60138323 D1 DE 60138323D1
Authority
DE
Germany
Prior art keywords
air flow
thermal sensor
measuring air
measuring
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60138323T
Other languages
English (en)
Inventor
Masamichi Yamada
Izumi Watanabe
Keiichi Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Automotive Systems Engineering Co Ltd
Original Assignee
Hitachi Ltd
Hitachi Car Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Car Engineering Co Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE60138323D1 publication Critical patent/DE60138323D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE60138323T 2000-01-14 2001-01-12 Thermischer Sensor zum Messen der Luftströmung Expired - Lifetime DE60138323D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000010103A JP3468731B2 (ja) 2000-01-14 2000-01-14 熱式空気流量センサ、素子および内燃機関制御装置

Publications (1)

Publication Number Publication Date
DE60138323D1 true DE60138323D1 (de) 2009-05-28

Family

ID=18538154

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138323T Expired - Lifetime DE60138323D1 (de) 2000-01-14 2001-01-12 Thermischer Sensor zum Messen der Luftströmung

Country Status (5)

Country Link
US (1) US6490915B2 (de)
EP (1) EP1116939B1 (de)
JP (1) JP3468731B2 (de)
KR (1) KR100728314B1 (de)
DE (1) DE60138323D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3698679B2 (ja) 2002-03-27 2005-09-21 株式会社日立製作所 ガス流量計及びその製造方法
JP4254263B2 (ja) 2002-08-22 2009-04-15 日産自動車株式会社 ガス流量測定装置及びガス流量測定方法
US6983653B2 (en) * 2002-12-13 2006-01-10 Denso Corporation Flow sensor having thin film portion and method for manufacturing the same
JP3718198B2 (ja) * 2003-02-26 2005-11-16 株式会社日立製作所 流量センサ
DE10317466A1 (de) * 2003-04-16 2004-12-09 Robert Bosch Gmbh Elektromotor
DE10324292B4 (de) * 2003-05-21 2018-03-15 Robert Bosch Gmbh Messelement für einen Durchflusssensor, insbesondere einen Luftmassensensor für Brennkraftmaschinen
JP4975972B2 (ja) * 2005-03-15 2012-07-11 日立オートモティブシステムズ株式会社 物理量センサ
JP4839685B2 (ja) * 2005-06-13 2011-12-21 株式会社デンソー 半導体装置
US7755466B2 (en) 2006-04-26 2010-07-13 Honeywell International Inc. Flip-chip flow sensor
JP4980665B2 (ja) * 2006-07-10 2012-07-18 ルネサスエレクトロニクス株式会社 固体撮像装置
JP4882732B2 (ja) * 2006-12-22 2012-02-22 株式会社デンソー 半導体装置
JP4497165B2 (ja) * 2007-02-05 2010-07-07 株式会社デンソー 半導体装置の製造方法
US7500392B1 (en) 2007-10-11 2009-03-10 Memsys, Inc. Solid state microanemometer device and method of fabrication
US20100078753A1 (en) * 2008-10-01 2010-04-01 Flowmems, Inc. Flow Sensor and Method of Fabrication
US8263426B2 (en) * 2008-12-03 2012-09-11 Electronics And Telecommunications Research Institute High-sensitivity z-axis vibration sensor and method of fabricating the same
JP5276964B2 (ja) * 2008-12-08 2013-08-28 日立オートモティブシステムズ株式会社 熱式流体流量センサおよびその製造方法
CN101980026B (zh) * 2010-09-29 2012-05-23 东南大学 圆形硅膜二维风速风向传感器
CN101980024B (zh) * 2010-09-29 2012-05-02 东南大学 矩形铂金薄膜二维风速风向传感器
JP5883740B2 (ja) * 2012-08-01 2016-03-15 日立オートモティブシステムズ株式会社 熱式空気流量センサ
EP2740452B1 (de) 2012-12-10 2021-11-10 The Procter & Gamble Company Saugfähiger Artikel mit hohem Anteil an Absorptionsmaterial
EP2740449B1 (de) 2012-12-10 2019-01-23 The Procter & Gamble Company Saugfähiger artikel mit hohem anteil an absorptionsmaterial
EP2740450A1 (de) 2012-12-10 2014-06-11 The Procter & Gamble Company Saugfähiger Artikel mit hohem Anteil an Superabsorptionsmaterial
US10107662B2 (en) 2015-01-30 2018-10-23 Honeywell International Inc. Sensor assembly

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2728060A1 (de) * 1977-06-22 1979-01-18 Bosch Gmbh Robert Messonde mit temperaturabhaengigem widerstand zur mengenmessung
US4571996A (en) * 1984-08-10 1986-02-25 Allied Corporation Air flow sensor
US4930347A (en) * 1989-05-23 1990-06-05 University Of Cincinnati Solid state microanemometer with improved sensitivity and response time
JPH0760107B2 (ja) * 1989-07-11 1995-06-28 三菱電機株式会社 熱式流量センサの信号処理方法
US5237867A (en) * 1990-06-29 1993-08-24 Siemens Automotive L.P. Thin-film air flow sensor using temperature-biasing resistive element
DE4426102C2 (de) * 1994-07-22 1997-07-10 Bosch Gmbh Robert Sensorträger für eine Vorrichtung zur Messung der Masse eines strömenden Mediums und Verfahren zum Herstellen eines Sensorträgers
JP2880651B2 (ja) 1994-08-12 1999-04-12 東京瓦斯株式会社 熱式マイクロフローセンサ及びその製造方法
US5631417A (en) * 1995-09-06 1997-05-20 General Motors Corporation Mass air flow sensor structure with bi-directional airflow incident on a sensing device at an angle
EP0885387A1 (de) * 1996-03-08 1998-12-23 Holometrix, Inc. Wärmeflussmessgeräte
JP3333712B2 (ja) * 1997-06-19 2002-10-15 三菱電機株式会社 流量検出素子およびそれを用いた流量センサ
JP3364115B2 (ja) * 1997-07-03 2003-01-08 三菱電機株式会社 感熱式流量検出素子
JPH1183580A (ja) 1997-09-11 1999-03-26 Hitachi Ltd 熱式空気流量センサ
JP3355127B2 (ja) * 1998-02-23 2002-12-09 株式会社日立製作所 熱式空気流量センサ

Also Published As

Publication number Publication date
JP2001194202A (ja) 2001-07-19
JP3468731B2 (ja) 2003-11-17
EP1116939A3 (de) 2003-08-06
KR20010087155A (ko) 2001-09-15
EP1116939A2 (de) 2001-07-18
KR100728314B1 (ko) 2007-06-13
EP1116939B1 (de) 2009-04-15
US6490915B2 (en) 2002-12-10
US20010015199A1 (en) 2001-08-23

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