CN101980026B - 圆形硅膜二维风速风向传感器 - Google Patents
圆形硅膜二维风速风向传感器 Download PDFInfo
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- CN101980026B CN101980026B CN201010501597XA CN201010501597A CN101980026B CN 101980026 B CN101980026 B CN 101980026B CN 201010501597X A CN201010501597X A CN 201010501597XA CN 201010501597 A CN201010501597 A CN 201010501597A CN 101980026 B CN101980026 B CN 101980026B
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CN201010501597XA CN101980026B (zh) | 2010-09-29 | 2010-09-29 | 圆形硅膜二维风速风向传感器 |
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CN201010501597XA CN101980026B (zh) | 2010-09-29 | 2010-09-29 | 圆形硅膜二维风速风向传感器 |
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CN101980026A CN101980026A (zh) | 2011-02-23 |
CN101980026B true CN101980026B (zh) | 2012-05-23 |
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CN201010501597XA Expired - Fee Related CN101980026B (zh) | 2010-09-29 | 2010-09-29 | 圆形硅膜二维风速风向传感器 |
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Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0264417A (ja) * | 1988-08-31 | 1990-03-05 | Ricoh Co Ltd | 流速センサ |
JP3468731B2 (ja) * | 2000-01-14 | 2003-11-17 | 株式会社日立製作所 | 熱式空気流量センサ、素子および内燃機関制御装置 |
CN1303426C (zh) * | 2004-10-14 | 2007-03-07 | 东南大学 | 基于微机械加工的风速传感器 |
JP2007024589A (ja) * | 2005-07-13 | 2007-02-01 | Hitachi Ltd | 気体流量計測装置 |
CN201867424U (zh) * | 2010-09-29 | 2011-06-15 | 东南大学 | 基于热损失工作方式的圆形硅膜二维风速风向传感器 |
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Owner name: SOWTHEAST UNIV. Effective date: 20140623 Owner name: JIANGSU HAIJAN CO., LTD. Free format text: FORMER OWNER: SOWTHEAST UNIV. Effective date: 20140623 |
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Effective date of registration: 20140623 Address after: 226600 Nantong, Haian Qu Qu Qu Town, the second floor Road, No. 198 Patentee after: Jiangsu Haijian Co., Ltd. Patentee after: Southeast University Address before: 210096 Jiangsu city Nanjing Province four pailou No. 2 Patentee before: Southeast University |
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