CN101980025B - 圆形铂金薄膜二维风速风向传感器 - Google Patents
圆形铂金薄膜二维风速风向传感器 Download PDFInfo
- Publication number
- CN101980025B CN101980025B CN2010105015683A CN201010501568A CN101980025B CN 101980025 B CN101980025 B CN 101980025B CN 2010105015683 A CN2010105015683 A CN 2010105015683A CN 201010501568 A CN201010501568 A CN 201010501568A CN 101980025 B CN101980025 B CN 101980025B
- Authority
- CN
- China
- Prior art keywords
- platinum film
- circular
- wind speed
- heating resistor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105015683A CN101980025B (zh) | 2010-09-29 | 2010-09-29 | 圆形铂金薄膜二维风速风向传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105015683A CN101980025B (zh) | 2010-09-29 | 2010-09-29 | 圆形铂金薄膜二维风速风向传感器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101980025A CN101980025A (zh) | 2011-02-23 |
CN101980025B true CN101980025B (zh) | 2012-02-01 |
Family
ID=43600541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010105015683A Expired - Fee Related CN101980025B (zh) | 2010-09-29 | 2010-09-29 | 圆形铂金薄膜二维风速风向传感器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101980025B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102998479B (zh) * | 2012-12-31 | 2014-08-13 | 哈尔滨理工大学 | 氮化铝基集成阵列结构的二维风速风向传感器及其制造方法 |
CN104535793B (zh) * | 2015-01-16 | 2017-09-29 | 东南大学 | 基于延时测量的热风速传感器结构和风速风向测定方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3355127B2 (ja) * | 1998-02-23 | 2002-12-09 | 株式会社日立製作所 | 熱式空気流量センサ |
CN1303426C (zh) * | 2004-10-14 | 2007-03-07 | 东南大学 | 基于微机械加工的风速传感器 |
CN100460875C (zh) * | 2007-05-11 | 2009-02-11 | 东南大学 | 十字架结构的二维风速风向传感器及其制备方法 |
CN201867423U (zh) * | 2010-09-29 | 2011-06-15 | 东南大学 | 基于热损失工作方式的圆形铂金薄膜二维风速风向传感器 |
-
2010
- 2010-09-29 CN CN2010105015683A patent/CN101980025B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101980025A (zh) | 2011-02-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8651737B2 (en) | Sensor temperature sensing device | |
KR101339296B1 (ko) | 그래핀을 이용한 멀티터치 힘 또는 압력 감지 투명 터치스크린을 이용한 힘 측정방법 | |
CN110726959B (zh) | 一种基于反常霍尔效应的灵敏度可调节的磁场传感器件 | |
CN203940940U (zh) | 一种用于多物理量测量的传感器芯片 | |
Kempe et al. | Evaluation of the sensitivity limits of water vapor transmission rate measurements using electrical calcium test | |
Fu | CuS-doped CuO nanoparticles sensor for detection of H2S and NH3 at room temperature | |
CN201867423U (zh) | 基于热损失工作方式的圆形铂金薄膜二维风速风向传感器 | |
MY163139A (en) | Resistive ion sensing device | |
CN204924795U (zh) | 一种裂纹尖端应变场传感器 | |
CN105841739A (zh) | 温湿度传感器及其制备方法、温湿度测量系统 | |
CN101980025B (zh) | 圆形铂金薄膜二维风速风向传感器 | |
CN106959169A (zh) | 一种新型多功能传感器芯片及其制备方法 | |
CN111157039B (zh) | 一种可同时检测湿度、温度和流量的多功能气体传感器及其制备方法 | |
CN104218147A (zh) | 磁传感器的制备方法以及磁传感器 | |
CN101980024B (zh) | 矩形铂金薄膜二维风速风向传感器 | |
CN102243274A (zh) | 一种测算Pb-Sn-Al层状复合材料界面电阻率的方法 | |
CN201867424U (zh) | 基于热损失工作方式的圆形硅膜二维风速风向传感器 | |
CN201867422U (zh) | 基于热损失工作方式的矩形铂金薄膜二维风速风向传感器 | |
CN206573523U (zh) | 一种高度集成型pH传感器 | |
CN205280640U (zh) | 电容式湿度传感器 | |
CN101980026B (zh) | 圆形硅膜二维风速风向传感器 | |
RU133312U1 (ru) | Газовый сенсор на основе гибридных наноматериалов | |
CN101975870B (zh) | 矩形硅膜二维风速风向传感器 | |
CN201867421U (zh) | 基于热损失工作方式的矩形硅膜二维风速风向传感器 | |
CN105047814B (zh) | 一种硅基低磁场巨磁阻磁传感器件及制备与性能测试方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NANTONG DALISHEN CONSTRUCTION AND MACHINERY JOINT Free format text: FORMER OWNER: SOWTHEAST UNIV. Effective date: 20140813 Owner name: SOWTHEAST UNIV. Effective date: 20140813 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 210096 NANJING, JIANGSU PROVINCE TO: 226691 NANTONG, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140813 Address after: 226691, Nantong County, Jiangsu City, Haian Province, pier Town, pier West Village five groups Patentee after: NANTONG DALISHEN CONSTRUCTION AND MACHINERY JOINT VENTURE Patentee after: SOUTHEAST University Address before: 210096 Jiangsu city Nanjing Province four pailou No. 2 Patentee before: Southeast University |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120201 Termination date: 20210929 |
|
CF01 | Termination of patent right due to non-payment of annual fee |