DE60137280D1 - Polymer, Resistzusammensetzung und Musterübertragungsverfahren - Google Patents
Polymer, Resistzusammensetzung und MusterübertragungsverfahrenInfo
- Publication number
- DE60137280D1 DE60137280D1 DE60137280T DE60137280T DE60137280D1 DE 60137280 D1 DE60137280 D1 DE 60137280D1 DE 60137280 T DE60137280 T DE 60137280T DE 60137280 T DE60137280 T DE 60137280T DE 60137280 D1 DE60137280 D1 DE 60137280D1
- Authority
- DE
- Germany
- Prior art keywords
- polymer
- transfer process
- resist composition
- pattern transfer
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
- C08F232/08—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having condensed rings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000060626 | 2000-03-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60137280D1 true DE60137280D1 (de) | 2009-02-26 |
Family
ID=18580901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60137280T Expired - Lifetime DE60137280D1 (de) | 2000-03-06 | 2001-03-05 | Polymer, Resistzusammensetzung und Musterübertragungsverfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US6566037B2 (de) |
EP (1) | EP1132774B1 (de) |
KR (1) | KR100576200B1 (de) |
DE (1) | DE60137280D1 (de) |
TW (1) | TWI228205B (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100501600B1 (ko) * | 1999-11-15 | 2005-07-18 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 고분자 화합물, 레지스트 재료 및 패턴 형성 방법 |
US6492090B2 (en) * | 2000-04-28 | 2002-12-10 | Shin-Etsu Chemical Co., Ltd. | Polymers, resist compositions and patterning process |
TW594410B (en) * | 2000-09-07 | 2004-06-21 | Shinetsu Chemical Co | Resist compositions and patterning process |
US6624335B2 (en) * | 2001-01-17 | 2003-09-23 | Shin Etsu Chemical Co., Ltd. | Ether, polymer, resist composition and patterning process |
US7192681B2 (en) | 2001-07-05 | 2007-03-20 | Fuji Photo Film Co., Ltd. | Positive photosensitive composition |
US7989571B2 (en) | 2002-07-10 | 2011-08-02 | Lg Chem, Ltd. | Method for producing norbornene monomer composition, norbornene polymer prepared therefrom, optical film comprising the norbornene polymer, and method for producing the norbornene polymer |
CN100334117C (zh) | 2002-07-10 | 2007-08-29 | Lg化学株式会社 | 制备含有酯或乙酰功能基团的降冰片烯基加成聚合物的方法 |
DE60311103T2 (de) * | 2002-07-10 | 2007-10-25 | Lg Chem, Ltd. | Auf norbornenester basierendes polymerisat und verfahren zu seiner herstellung |
KR100561068B1 (ko) * | 2002-07-10 | 2006-03-15 | 주식회사 엘지화학 | 노보넨-에스테르계 부가중합체 및 이의 제조방법 |
JP2020011463A (ja) * | 2018-07-19 | 2020-01-23 | 京セラドキュメントソリューションズ株式会社 | インクジェット記録用前処理液、インクジェット記録装置及び画像形成方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100195583B1 (ko) | 1997-04-08 | 1999-06-15 | 박찬구 | 양성 포토레지스트 제조용 공중합체 및 이를 함유하는 화학증폭형 양성 포토레지스트 조성물 |
KR19990081722A (ko) | 1998-04-30 | 1999-11-15 | 김영환 | 카르복실기 함유 지환족 유도체 및 그의 제조방법 |
TW457277B (en) * | 1998-05-11 | 2001-10-01 | Shinetsu Chemical Co | Ester compounds, polymers, resist composition and patterning process |
KR100483418B1 (ko) * | 1998-05-11 | 2005-04-15 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 신규한 고분자 화합물, 레지스트 재료 및 패턴 형성 방법 |
KR100271419B1 (ko) * | 1998-09-23 | 2001-03-02 | 박찬구 | 화학증폭형 레지스트 제조용 중합체 및 이를 함유하는 레지스트조성물 |
KR100271420B1 (ko) * | 1998-09-23 | 2001-03-02 | 박찬구 | 화학증폭형 양성 포토레지스트 조성물 |
KR100274119B1 (ko) * | 1998-10-08 | 2001-03-02 | 박찬구 | 감방사선성 레지스트 제조용 중합체 및 이를 함유하는 레지스트조성물 |
JP3734012B2 (ja) * | 1999-10-25 | 2006-01-11 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
KR100332463B1 (ko) * | 1999-12-20 | 2002-04-13 | 박찬구 | 노보난계 저분자 화합물 첨가제를 포함하는 화학증폭형레지스트 조성물 |
KR100384810B1 (ko) * | 2000-02-16 | 2003-05-22 | 금호석유화학 주식회사 | 저분자 화합물 첨가제를 포함하는 화학증폭형 레지스트조성물 |
TWI284782B (en) * | 2000-04-28 | 2007-08-01 | Shinetsu Chemical Co | Polymers, resist compositions and patterning process |
US6492090B2 (en) * | 2000-04-28 | 2002-12-10 | Shin-Etsu Chemical Co., Ltd. | Polymers, resist compositions and patterning process |
JP3997381B2 (ja) * | 2000-04-28 | 2007-10-24 | 信越化学工業株式会社 | 脂環構造を有する新規エステル化合物及びその製造方法 |
JP3997382B2 (ja) * | 2000-04-28 | 2007-10-24 | 信越化学工業株式会社 | 脂環構造を有する新規エステル化合物及びその製造方法 |
US6500961B2 (en) * | 2000-06-01 | 2002-12-31 | Shin-Etsu Chemical Co., Ltd. | Lactone compounds having alicyclic structure and their manufacturing method |
-
2001
- 2001-03-05 KR KR1020010011128A patent/KR100576200B1/ko not_active IP Right Cessation
- 2001-03-05 EP EP01301953A patent/EP1132774B1/de not_active Expired - Lifetime
- 2001-03-05 DE DE60137280T patent/DE60137280D1/de not_active Expired - Lifetime
- 2001-03-05 TW TW090105041A patent/TWI228205B/zh not_active IP Right Cessation
- 2001-03-05 US US09/797,878 patent/US6566037B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20010026904A1 (en) | 2001-10-04 |
KR100576200B1 (ko) | 2006-05-03 |
EP1132774A3 (de) | 2001-09-19 |
US6566037B2 (en) | 2003-05-20 |
EP1132774B1 (de) | 2009-01-07 |
TWI228205B (en) | 2005-02-21 |
KR20010088379A (ko) | 2001-09-26 |
EP1132774A2 (de) | 2001-09-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |