DE60136246D1 - Laserbearbeitungsvorrichtung - Google Patents

Laserbearbeitungsvorrichtung

Info

Publication number
DE60136246D1
DE60136246D1 DE60136246T DE60136246T DE60136246D1 DE 60136246 D1 DE60136246 D1 DE 60136246D1 DE 60136246 T DE60136246 T DE 60136246T DE 60136246 T DE60136246 T DE 60136246T DE 60136246 D1 DE60136246 D1 DE 60136246D1
Authority
DE
Germany
Prior art keywords
control method
laser
controlling
positioning unit
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60136246T
Other languages
English (en)
Inventor
Kenji Kawazoe
Katsuichi Ukita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60136246D1 publication Critical patent/DE60136246D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45035—Printed circuit boards, also holes to be drilled in a plate
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45139—Laser drilling
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
  • Surgical Instruments (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Laser Surgery Devices (AREA)
DE60136246T 2000-06-06 2001-06-06 Laserbearbeitungsvorrichtung Expired - Lifetime DE60136246D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000168539A JP3407715B2 (ja) 2000-06-06 2000-06-06 レーザ加工装置

Publications (1)

Publication Number Publication Date
DE60136246D1 true DE60136246D1 (de) 2008-12-04

Family

ID=18671529

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60136246T Expired - Lifetime DE60136246D1 (de) 2000-06-06 2001-06-06 Laserbearbeitungsvorrichtung

Country Status (9)

Country Link
US (1) US6721343B2 (de)
EP (1) EP1162025B8 (de)
JP (1) JP3407715B2 (de)
KR (1) KR100796078B1 (de)
CN (1) CN1179818C (de)
AT (1) ATE411872T1 (de)
DE (1) DE60136246D1 (de)
NO (1) NO320136B1 (de)
TW (1) TW492901B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666435B2 (ja) * 2001-09-28 2005-06-29 松下電器産業株式会社 光照射装置と光加工装置およびその加工方法
DE60327206D1 (de) * 2002-07-25 2009-05-28 Panasonic Corp Laserbohrsystem und -verfahren unter verwendung einer kontinuierlich optimierten schärfentiefe
US20080066596A1 (en) * 2004-05-20 2008-03-20 Komatsu Insustries Corporation Cutting Machine and Method of Moving Cutting Head
WO2007077630A1 (ja) * 2006-01-06 2007-07-12 Mitsubishi Denki Kabushiki Kaisha レーザ加工装置、プログラム作成装置およびレーザ加工方法
JP4630853B2 (ja) 2006-03-30 2011-02-09 日立ビアメカニクス株式会社 移動体の位置決め制御装置及びレーザ加工装置
JP5405244B2 (ja) * 2009-09-07 2014-02-05 株式会社キーエンス レーザ加工装置
JP5460420B2 (ja) * 2010-03-30 2014-04-02 三菱電機株式会社 加工制御装置およびレーザ加工装置
JP5459255B2 (ja) * 2011-04-08 2014-04-02 株式会社安川電機 ロボットシステム
CN103163828B (zh) * 2011-12-15 2016-03-16 大族激光科技产业集团股份有限公司 一种pwm信号控制方法、系统及数控激光加工机床
JP5943627B2 (ja) * 2012-02-14 2016-07-05 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
TW201544222A (zh) * 2014-02-21 2015-12-01 Panasonic Ip Man Co Ltd 雷射加工裝置
JP5941108B2 (ja) * 2014-08-27 2016-06-29 ファナック株式会社 高速位置決め機能を有するレーザ加工装置
CN105676790B (zh) * 2016-03-28 2019-01-25 大族激光科技产业集团股份有限公司 激光加工控制方法和装置
CN106041335B (zh) * 2016-07-22 2018-01-23 深圳市德堡数控技术有限公司 一种激光切割机和激光切割多层复合材料的能量控制系统
US20180207748A1 (en) * 2017-01-23 2018-07-26 Lumentum Operations Llc Machining processes using a random trigger feature for an ultrashort pulse laser

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161123A (ja) 1984-08-31 1986-03-28 Fuji Photo Film Co Ltd ガルバノメ−タミラ−駆動装置
US5450202A (en) * 1988-11-17 1995-09-12 Tisue; James G. Adaptive resonant positioner having random access capability
US5168454A (en) 1989-10-30 1992-12-01 International Business Machines Corporation Formation of high quality patterns for substrates and apparatus therefor
US5302798A (en) 1991-04-01 1994-04-12 Canon Kabushiki Kaisha Method of forming a hole with a laser and an apparatus for forming a hole with a laser
JPH07112287A (ja) 1993-10-15 1995-05-02 Fanuc Ltd Ｎｃレーザ装置
JP3179963B2 (ja) * 1994-04-26 2001-06-25 松下電器産業株式会社 レーザ加工装置とレーザ加工方法
JP2682475B2 (ja) * 1994-11-17 1997-11-26 日本電気株式会社 ビームスキャン式レーザマーキング方法および装置
JP3235389B2 (ja) 1995-01-31 2001-12-04 三菱電機株式会社 レーザ加工装置および加工方法
US5923418A (en) * 1995-02-21 1999-07-13 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
KR100446052B1 (ko) * 1997-05-15 2004-10-14 스미도모쥬기가이고교 가부시키가이샤 다수의갈바노스캐너를사용한레이저빔가공장치
JP4049459B2 (ja) * 1998-10-09 2008-02-20 松下電器産業株式会社 レーザ加工方法
US6222870B1 (en) * 1999-02-22 2001-04-24 Presstek, Inc. Pumped laser diode assembly with optically coupled heat sink
JP4205282B2 (ja) * 2000-03-03 2009-01-07 住友重機械工業株式会社 レーザ加工方法及び加工装置
JP2002040356A (ja) * 2000-07-28 2002-02-06 Sumitomo Heavy Ind Ltd ガルバノ制御方法及び制御装置

Also Published As

Publication number Publication date
JP3407715B2 (ja) 2003-05-19
US6721343B2 (en) 2004-04-13
NO20012759L (no) 2001-12-07
TW492901B (en) 2002-07-01
EP1162025B8 (de) 2008-12-31
CN1327898A (zh) 2001-12-26
EP1162025B1 (de) 2008-10-22
JP2001347385A (ja) 2001-12-18
EP1162025A2 (de) 2001-12-12
CN1179818C (zh) 2004-12-15
EP1162025A3 (de) 2003-01-15
US20010048701A1 (en) 2001-12-06
KR20010110322A (ko) 2001-12-13
NO20012759D0 (no) 2001-06-05
KR100796078B1 (ko) 2008-01-21
NO320136B1 (no) 2005-10-31
ATE411872T1 (de) 2008-11-15

Similar Documents

Publication Publication Date Title
DE60136246D1 (de) Laserbearbeitungsvorrichtung
SE0102950D0 (sv) Mobile robot and course adjusting method thereof
DE60140440D1 (de) Lasergesteuerte baumaschine
DE60136453D1 (de) Dreidimensionaler bildprojektor
HK1043559A1 (zh) 激光加工裝置及其加工方法
DE60119072D1 (de) Laserschweissverfahren und Laserschweissvorrichtung
EP1834796A3 (de) Bildverarbeitungsverfahren und Bildverarbeitungsvorrichtung
HK1151105A1 (en) Exposure apparatus, method for producing device, and method for controlling exposure apparatus
TW200631303A (en) An optical image stabilizer and a method of controlling the optical image stabilizer
DE60045131D1 (de) Verstellungseinheit für geschwindigkeit
ATE319510T1 (de) Lichtgesteuertes bewegliches spielzeug
KR950024025A (ko) 투사 노출 장치 및 디바이스 제조방법
KR930702111A (ko) 레이저 가공방법 및 그의 장치
AU2001286170A1 (en) High-peak-power laser device and application to the generation of light in the extreme ultraviolet
JP2003053561A (ja) レーザ加工装置
FR2821995B1 (fr) Procede pour generer des impulsions de commande pour des semi-conducteurs de puissance
EP1044755A3 (de) Laserbearbeitungsvorrichtung
HK1055349A1 (en) Method and apparatus for recording data on opticalrecording medium
TW200719101A (en) Laser beam exposure apparatus and method therefor
AU2003244225A1 (en) Illuminating optical system, exposure system and exposure method
DK0473971T3 (da) Apparat til at bære og bevæge et hoved til fokusering af en laserstråle
JP2003025080A5 (ja) レーザ加工装置及びレーザ加工方法
FI980151A (fi) Menetelmä toimilaitteen asemoimiseksi
EP1205925A3 (de) Aufzeichnungsvorrichtung eines optischen Aufzeichnungsmediums und Aufzeichnungsverfahren
RU2002122970A (ru) Способ скоростной лазерной маркировки и установка для его реализации

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)