DE60136246D1 - Laserbearbeitungsvorrichtung - Google Patents

Laserbearbeitungsvorrichtung

Info

Publication number
DE60136246D1
DE60136246D1 DE60136246T DE60136246T DE60136246D1 DE 60136246 D1 DE60136246 D1 DE 60136246D1 DE 60136246 T DE60136246 T DE 60136246T DE 60136246 T DE60136246 T DE 60136246T DE 60136246 D1 DE60136246 D1 DE 60136246D1
Authority
DE
Germany
Prior art keywords
control method
laser
controlling
positioning unit
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60136246T
Other languages
English (en)
Inventor
Kenji Kawazoe
Katsuichi Ukita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60136246D1 publication Critical patent/DE60136246D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/416Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/45Nc applications
    • G05B2219/45035Printed circuit boards, also holes to be drilled in a plate
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/45Nc applications
    • G05B2219/45139Laser drilling
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0008Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0026Etching of the substrate by chemical or physical means by laser ablation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Laser Beam Processing (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Lasers (AREA)
  • Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
  • Surgical Instruments (AREA)
  • Laser Surgery Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
DE60136246T 2000-06-06 2001-06-06 Laserbearbeitungsvorrichtung Expired - Lifetime DE60136246D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000168539A JP3407715B2 (ja) 2000-06-06 2000-06-06 レーザ加工装置

Publications (1)

Publication Number Publication Date
DE60136246D1 true DE60136246D1 (de) 2008-12-04

Family

ID=18671529

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60136246T Expired - Lifetime DE60136246D1 (de) 2000-06-06 2001-06-06 Laserbearbeitungsvorrichtung

Country Status (9)

Country Link
US (1) US6721343B2 (de)
EP (1) EP1162025B8 (de)
JP (1) JP3407715B2 (de)
KR (1) KR100796078B1 (de)
CN (1) CN1179818C (de)
AT (1) ATE411872T1 (de)
DE (1) DE60136246D1 (de)
NO (1) NO320136B1 (de)
TW (1) TW492901B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666435B2 (ja) * 2001-09-28 2005-06-29 松下電器産業株式会社 光照射装置と光加工装置およびその加工方法
AU2003212424A1 (en) * 2002-07-25 2004-02-16 Matsushita Electric Industrial Co., Ltd. System and method of laser drilling using a continuously optimized depth of focus
WO2005113183A1 (ja) * 2004-05-20 2005-12-01 Komatsu Industries Corporation 切断機及び切断ヘッドの移動方法
CN101142052B (zh) * 2006-01-06 2010-08-25 三菱电机株式会社 激光加工装置、程序生成装置以及激光加工方法
JP4630853B2 (ja) 2006-03-30 2011-02-09 日立ビアメカニクス株式会社 移動体の位置決め制御装置及びレーザ加工装置
JP5405244B2 (ja) * 2009-09-07 2014-02-05 株式会社キーエンス レーザ加工装置
JP5460420B2 (ja) * 2010-03-30 2014-04-02 三菱電機株式会社 加工制御装置およびレーザ加工装置
JP5459255B2 (ja) * 2011-04-08 2014-04-02 株式会社安川電機 ロボットシステム
CN103163828B (zh) * 2011-12-15 2016-03-16 大族激光科技产业集团股份有限公司 一种pwm信号控制方法、系统及数控激光加工机床
JP5943627B2 (ja) * 2012-02-14 2016-07-05 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
TW201544222A (zh) * 2014-02-21 2015-12-01 Panasonic Ip Man Co Ltd 雷射加工裝置
JP5941108B2 (ja) * 2014-08-27 2016-06-29 ファナック株式会社 高速位置決め機能を有するレーザ加工装置
CN105676790B (zh) * 2016-03-28 2019-01-25 大族激光科技产业集团股份有限公司 激光加工控制方法和装置
CN106041335B (zh) * 2016-07-22 2018-01-23 深圳市德堡数控技术有限公司 一种激光切割机和激光切割多层复合材料的能量控制系统
US20180207748A1 (en) * 2017-01-23 2018-07-26 Lumentum Operations Llc Machining processes using a random trigger feature for an ultrashort pulse laser

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161123A (ja) 1984-08-31 1986-03-28 Fuji Photo Film Co Ltd ガルバノメ−タミラ−駆動装置
US5450202A (en) * 1988-11-17 1995-09-12 Tisue; James G. Adaptive resonant positioner having random access capability
US5168454A (en) 1989-10-30 1992-12-01 International Business Machines Corporation Formation of high quality patterns for substrates and apparatus therefor
US5302798A (en) 1991-04-01 1994-04-12 Canon Kabushiki Kaisha Method of forming a hole with a laser and an apparatus for forming a hole with a laser
JPH07112287A (ja) 1993-10-15 1995-05-02 Fanuc Ltd Ncレーザ装置
JP3179963B2 (ja) * 1994-04-26 2001-06-25 松下電器産業株式会社 レーザ加工装置とレーザ加工方法
JP2682475B2 (ja) * 1994-11-17 1997-11-26 日本電気株式会社 ビームスキャン式レーザマーキング方法および装置
JP3235389B2 (ja) 1995-01-31 2001-12-04 三菱電機株式会社 レーザ加工装置および加工方法
US5923418A (en) * 1995-02-21 1999-07-13 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
KR100446052B1 (ko) * 1997-05-15 2004-10-14 스미도모쥬기가이고교 가부시키가이샤 다수의갈바노스캐너를사용한레이저빔가공장치
JP4049459B2 (ja) 1998-10-09 2008-02-20 松下電器産業株式会社 レーザ加工方法
US6222870B1 (en) * 1999-02-22 2001-04-24 Presstek, Inc. Pumped laser diode assembly with optically coupled heat sink
JP4205282B2 (ja) * 2000-03-03 2009-01-07 住友重機械工業株式会社 レーザ加工方法及び加工装置
JP2002040356A (ja) * 2000-07-28 2002-02-06 Sumitomo Heavy Ind Ltd ガルバノ制御方法及び制御装置

Also Published As

Publication number Publication date
JP3407715B2 (ja) 2003-05-19
KR100796078B1 (ko) 2008-01-21
EP1162025B8 (de) 2008-12-31
NO320136B1 (no) 2005-10-31
NO20012759D0 (no) 2001-06-05
EP1162025A3 (de) 2003-01-15
JP2001347385A (ja) 2001-12-18
CN1327898A (zh) 2001-12-26
TW492901B (en) 2002-07-01
US6721343B2 (en) 2004-04-13
US20010048701A1 (en) 2001-12-06
EP1162025A2 (de) 2001-12-12
KR20010110322A (ko) 2001-12-13
CN1179818C (zh) 2004-12-15
ATE411872T1 (de) 2008-11-15
EP1162025B1 (de) 2008-10-22
NO20012759L (no) 2001-12-07

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)