DE60128229D1 - Spule für Vakuum-Plasmabehandlungsvorrichtung - Google Patents
Spule für Vakuum-PlasmabehandlungsvorrichtungInfo
- Publication number
- DE60128229D1 DE60128229D1 DE60128229T DE60128229T DE60128229D1 DE 60128229 D1 DE60128229 D1 DE 60128229D1 DE 60128229 T DE60128229 T DE 60128229T DE 60128229 T DE60128229 T DE 60128229T DE 60128229 D1 DE60128229 D1 DE 60128229D1
- Authority
- DE
- Germany
- Prior art keywords
- coil
- treatment device
- plasma treatment
- vacuum plasma
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009832 plasma treatment Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US607326 | 1984-05-04 | ||
US09/607,326 US6531029B1 (en) | 2000-06-30 | 2000-06-30 | Vacuum plasma processor apparatus and method |
PCT/US2001/020263 WO2002003763A2 (en) | 2000-06-30 | 2001-06-26 | Vacuum plasma processor apparatus and method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60128229D1 true DE60128229D1 (de) | 2007-06-14 |
DE60128229T2 DE60128229T2 (de) | 2007-08-30 |
Family
ID=24431792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60128229T Expired - Lifetime DE60128229T2 (de) | 2000-06-30 | 2001-06-26 | Spule für Vakuum-Plasmabehandlungsvorrichtung |
Country Status (8)
Country | Link |
---|---|
US (2) | US6531029B1 (de) |
EP (1) | EP1300057B1 (de) |
JP (2) | JP5116203B2 (de) |
KR (2) | KR100881882B1 (de) |
AU (1) | AU2001270163A1 (de) |
DE (1) | DE60128229T2 (de) |
TW (1) | TW515005B (de) |
WO (1) | WO2002003763A2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7571697B2 (en) * | 2001-09-14 | 2009-08-11 | Lam Research Corporation | Plasma processor coil |
US6876155B2 (en) * | 2002-12-31 | 2005-04-05 | Lam Research Corporation | Plasma processor apparatus and method, and antenna |
KR100964398B1 (ko) * | 2003-01-03 | 2010-06-17 | 삼성전자주식회사 | 유도결합형 안테나 및 이를 채용한 플라즈마 처리장치 |
US20040261718A1 (en) * | 2003-06-26 | 2004-12-30 | Kim Nam Hun | Plasma source coil for generating plasma and plasma chamber using the same |
US7713432B2 (en) * | 2004-10-04 | 2010-05-11 | David Johnson | Method and apparatus to improve plasma etch uniformity |
US20080003377A1 (en) * | 2006-06-30 | 2008-01-03 | The Board Of Regents Of The Nevada System Of Higher Ed. On Behalf Of The Unlv | Transparent vacuum system |
DE102008024014A1 (de) * | 2008-05-16 | 2010-04-15 | Ofa Bamberg Gmbh | Elektronischer Lebensdauerindikator |
US20120103524A1 (en) * | 2010-10-28 | 2012-05-03 | Applied Materials, Inc. | Plasma processing apparatus with reduced effects of process chamber asymmetry |
US20120152900A1 (en) * | 2010-12-20 | 2012-06-21 | Applied Materials, Inc. | Methods and apparatus for gas delivery into plasma processing chambers |
US10777387B2 (en) * | 2012-09-28 | 2020-09-15 | Semes Co., Ltd. | Apparatus for treating substrate |
CN109036817B (zh) * | 2017-06-08 | 2021-09-17 | 北京北方华创微电子装备有限公司 | 电感耦合线圈和工艺腔室 |
JP6909824B2 (ja) * | 2019-05-17 | 2021-07-28 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法及びプログラム |
KR20220107521A (ko) * | 2021-01-25 | 2022-08-02 | (주) 엔피홀딩스 | 반응기, 이를 포함하는 공정 처리 장치 및 반응기 제조 방법 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4948458A (en) | 1989-08-14 | 1990-08-14 | Lam Research Corporation | Method and apparatus for producing magnetically-coupled planar plasma |
US6077384A (en) | 1994-08-11 | 2000-06-20 | Applied Materials, Inc. | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode |
US5401350A (en) | 1993-03-08 | 1995-03-28 | Lsi Logic Corporation | Coil configurations for improved uniformity in inductively coupled plasma systems |
US5919382A (en) * | 1994-10-31 | 1999-07-06 | Applied Materials, Inc. | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor |
US5838111A (en) | 1996-02-27 | 1998-11-17 | Matsushita Electric Industrial Co., Ltd. | Plasma generator with antennas attached to top electrodes |
CA2207154A1 (en) | 1996-06-10 | 1997-12-10 | Lam Research Corporation | Inductively coupled source for deriving substantially uniform plasma flux |
US5800619A (en) | 1996-06-10 | 1998-09-01 | Lam Research Corporation | Vacuum plasma processor having coil with minimum magnetic field in its center |
US5759280A (en) | 1996-06-10 | 1998-06-02 | Lam Research Corporation | Inductively coupled source for deriving substantially uniform plasma flux |
US6268700B1 (en) * | 1996-06-10 | 2001-07-31 | Lam Research Corporation | Vacuum plasma processor having coil with intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil |
JP3658922B2 (ja) | 1997-05-22 | 2005-06-15 | 松下電器産業株式会社 | プラズマ処理方法及び装置 |
US6077385A (en) | 1997-04-08 | 2000-06-20 | Ebara Corporation | Polishing apparatus |
US6028285A (en) | 1997-11-19 | 2000-02-22 | Board Of Regents, The University Of Texas System | High density plasma source for semiconductor processing |
JP2972707B1 (ja) * | 1998-02-26 | 1999-11-08 | 松下電子工業株式会社 | プラズマエッチング装置及びプラズマエッチング方法 |
US6146508A (en) * | 1998-04-22 | 2000-11-14 | Applied Materials, Inc. | Sputtering method and apparatus with small diameter RF coil |
US6164241A (en) * | 1998-06-30 | 2000-12-26 | Lam Research Corporation | Multiple coil antenna for inductively-coupled plasma generation systems |
KR100291898B1 (ko) * | 1999-04-09 | 2001-06-01 | 윤종용 | 스파터 오염원을 감소시키고 플라즈마에 유도 결합을 향상시키기위한 차폐판의 제조방법 및 플라즈마 식각장치 |
US6319355B1 (en) * | 1999-06-30 | 2001-11-20 | Lam Research Corporation | Plasma processor with coil responsive to variable amplitude rf envelope |
US6143144A (en) * | 1999-07-30 | 2000-11-07 | Tokyo Electronlimited | Method for etch rate enhancement by background oxygen control in a soft etch system |
-
2000
- 2000-06-30 US US09/607,326 patent/US6531029B1/en not_active Expired - Lifetime
-
2001
- 2001-06-26 KR KR1020027017794A patent/KR100881882B1/ko not_active IP Right Cessation
- 2001-06-26 JP JP2002507035A patent/JP5116203B2/ja not_active Expired - Fee Related
- 2001-06-26 KR KR1020077014974A patent/KR100807143B1/ko not_active IP Right Cessation
- 2001-06-26 WO PCT/US2001/020263 patent/WO2002003763A2/en active IP Right Grant
- 2001-06-26 DE DE60128229T patent/DE60128229T2/de not_active Expired - Lifetime
- 2001-06-26 AU AU2001270163A patent/AU2001270163A1/en not_active Abandoned
- 2001-06-26 EP EP01948718A patent/EP1300057B1/de not_active Expired - Lifetime
- 2001-07-11 TW TW090116008A patent/TW515005B/zh not_active IP Right Cessation
-
2003
- 2003-01-21 US US10/347,363 patent/US6897156B2/en not_active Expired - Fee Related
-
2011
- 2011-10-17 JP JP2011227690A patent/JP5538340B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW515005B (en) | 2002-12-21 |
JP2004520704A (ja) | 2004-07-08 |
US6531029B1 (en) | 2003-03-11 |
WO2002003763A3 (en) | 2002-12-27 |
DE60128229T2 (de) | 2007-08-30 |
EP1300057B1 (de) | 2007-05-02 |
JP5538340B2 (ja) | 2014-07-02 |
AU2001270163A1 (en) | 2002-01-14 |
KR20030034108A (ko) | 2003-05-01 |
US6897156B2 (en) | 2005-05-24 |
WO2002003763B1 (en) | 2003-03-13 |
JP2012033958A (ja) | 2012-02-16 |
EP1300057A2 (de) | 2003-04-09 |
JP5116203B2 (ja) | 2013-01-09 |
KR20070074672A (ko) | 2007-07-12 |
KR100881882B1 (ko) | 2009-02-06 |
WO2002003763A8 (en) | 2002-04-04 |
WO2002003763A2 (en) | 2002-01-10 |
KR100807143B1 (ko) | 2008-02-27 |
US20030106645A1 (en) | 2003-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |