DE60138239D1 - Plasmabehandlungsgerät - Google Patents

Plasmabehandlungsgerät

Info

Publication number
DE60138239D1
DE60138239D1 DE60138239T DE60138239T DE60138239D1 DE 60138239 D1 DE60138239 D1 DE 60138239D1 DE 60138239 T DE60138239 T DE 60138239T DE 60138239 T DE60138239 T DE 60138239T DE 60138239 D1 DE60138239 D1 DE 60138239D1
Authority
DE
Germany
Prior art keywords
treatment device
plasma treatment
plasma
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60138239T
Other languages
English (en)
Inventor
Hideyuki Kazumi
Ichiro Sasaki
Kenji Maeda
Tsutomu Tetsuka
Hironobu Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE60138239D1 publication Critical patent/DE60138239D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
DE60138239T 2000-03-17 2001-02-27 Plasmabehandlungsgerät Expired - Lifetime DE60138239D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000081735A JP2001267305A (ja) 2000-03-17 2000-03-17 プラズマ処理装置

Publications (1)

Publication Number Publication Date
DE60138239D1 true DE60138239D1 (de) 2009-05-20

Family

ID=18598629

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138239T Expired - Lifetime DE60138239D1 (de) 2000-03-17 2001-02-27 Plasmabehandlungsgerät

Country Status (6)

Country Link
US (1) US6755935B2 (de)
EP (1) EP1134774B1 (de)
JP (1) JP2001267305A (de)
KR (1) KR20010091903A (de)
DE (1) DE60138239D1 (de)
TW (1) TWI221754B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3591642B2 (ja) * 2001-02-07 2004-11-24 株式会社日立製作所 プラズマ処理装置
JP4753276B2 (ja) * 2002-11-26 2011-08-24 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置
JP2005033055A (ja) * 2003-07-08 2005-02-03 Canon Inc 放射状スロットに円弧状スロットを併設したマルチスロットアンテナを用いた表面波プラズマ処理装置
US7464662B2 (en) * 2004-01-28 2008-12-16 Tokyo Electron Limited Compact, distributed inductive element for large scale inductively-coupled plasma sources
US7318947B1 (en) 2004-08-31 2008-01-15 Western Digital (Fremont), Llc Method and apparatus for controlling magnetostriction in a spin valve sensor
KR100737358B1 (ko) * 2004-12-08 2007-07-09 한국전자통신연구원 음성/비음성 검증 방법 및 이를 이용한 음성 인식 장치
JP4628900B2 (ja) 2005-08-24 2011-02-09 株式会社日立ハイテクノロジーズ プラズマ処理装置
WO2008093389A1 (ja) * 2007-01-29 2008-08-07 Sumitomo Electric Industries, Ltd. マイクロ波プラズマｃｖｄ装置
DE102009015178B4 (de) * 2009-03-19 2012-09-06 Forschungs- Und Applikationslabor Plasmatechnik Gmbh Dresden Vorrichtung und Verfahren für die plasmagestützte Oberflächenmodifizierung von Substraten im Vakuum
KR101255720B1 (ko) * 2009-10-16 2013-04-17 주성엔지니어링(주) 유도 결합 플라즈마 장치
JP5702968B2 (ja) 2010-08-11 2015-04-15 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ制御方法
GB201021865D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021860D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for diamond synthesis
GB201021913D0 (en) 2010-12-23 2011-02-02 Element Six Ltd Microwave plasma reactors and substrates for synthetic diamond manufacture
GB201021855D0 (en) 2010-12-23 2011-02-02 Element Six Ltd Microwave power delivery system for plasma reactors
JP5913362B2 (ja) 2010-12-23 2016-04-27 エレメント シックス リミテッド 合成ダイヤモンド材料のドーピングの制御
GB201021870D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021853D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
US20190244793A1 (en) * 2018-02-05 2019-08-08 Lam Research Corporation Tapered upper electrode for uniformity control in plasma processing

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342901A (en) * 1980-08-11 1982-08-03 Eaton Corporation Plasma etching electrode
US6251792B1 (en) * 1990-07-31 2001-06-26 Applied Materials, Inc. Plasma etch processes
DE4109619C1 (de) * 1991-03-23 1992-08-06 Leybold Ag, 6450 Hanau, De
JP2641390B2 (ja) * 1994-05-12 1997-08-13 日本電気株式会社 プラズマ処理装置
JP3107971B2 (ja) * 1994-05-17 2000-11-13 株式会社半導体エネルギー研究所 気相反応装置
JP3257328B2 (ja) * 1995-03-16 2002-02-18 株式会社日立製作所 プラズマ処理装置及びプラズマ処理方法
US5716451A (en) * 1995-08-17 1998-02-10 Tokyo Electron Limited Plasma processing apparatus
TW312815B (de) 1995-12-15 1997-08-11 Hitachi Ltd
US5683548A (en) * 1996-02-22 1997-11-04 Motorola, Inc. Inductively coupled plasma reactor and process
JPH10134995A (ja) * 1996-10-28 1998-05-22 Toshiba Corp プラズマ処理装置及びプラズマ処理方法
TW403959B (en) * 1996-11-27 2000-09-01 Hitachi Ltd Plasma treatment device
US5824607A (en) * 1997-02-06 1998-10-20 Applied Materials, Inc. Plasma confinement for an inductively coupled plasma reactor
US6035868A (en) * 1997-03-31 2000-03-14 Lam Research Corporation Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
US6028394A (en) * 1998-03-24 2000-02-22 International Business Machines Corporation Cold electron plasma reactive ion etching using a rotating electromagnetic filter
JP2001023959A (ja) * 1999-07-05 2001-01-26 Mitsubishi Electric Corp プラズマ処理装置
JP2002075969A (ja) * 2000-08-25 2002-03-15 Hitachi Ltd プラズマ処理装置

Also Published As

Publication number Publication date
KR20010091903A (ko) 2001-10-23
JP2001267305A (ja) 2001-09-28
US20010023663A1 (en) 2001-09-27
EP1134774B1 (de) 2009-04-08
US6755935B2 (en) 2004-06-29
EP1134774A2 (de) 2001-09-19
EP1134774A3 (de) 2005-01-19
TWI221754B (en) 2004-10-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition