DE60119937T2 - Halleffekt-sensor - Google Patents

Halleffekt-sensor Download PDF

Info

Publication number
DE60119937T2
DE60119937T2 DE60119937T DE60119937T DE60119937T2 DE 60119937 T2 DE60119937 T2 DE 60119937T2 DE 60119937 T DE60119937 T DE 60119937T DE 60119937 T DE60119937 T DE 60119937T DE 60119937 T2 DE60119937 T2 DE 60119937T2
Authority
DE
Germany
Prior art keywords
active layer
layer
probe according
substrate
fourteen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60119937T
Other languages
German (de)
English (en)
Other versions
DE60119937D1 (de
Inventor
Jean-Louis Robert
Julien 250 Route de Mende PERNOT
Jean Camassel
Sylvie Contreras
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE60119937D1 publication Critical patent/DE60119937D1/de
Application granted granted Critical
Publication of DE60119937T2 publication Critical patent/DE60119937T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Window Of Vehicle (AREA)
  • Measuring Magnetic Variables (AREA)
  • Push-Button Switches (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Electrophonic Musical Instruments (AREA)
DE60119937T 2000-08-30 2001-08-30 Halleffekt-sensor Expired - Lifetime DE60119937T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0011087 2000-08-30
FR0011087A FR2813443B1 (fr) 2000-08-30 2000-08-30 Capteur a effet hall
PCT/FR2001/002703 WO2002019442A1 (fr) 2000-08-30 2001-08-30 Capteur a effet hall

Publications (2)

Publication Number Publication Date
DE60119937D1 DE60119937D1 (de) 2006-06-29
DE60119937T2 true DE60119937T2 (de) 2007-01-11

Family

ID=8853827

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60119937T Expired - Lifetime DE60119937T2 (de) 2000-08-30 2001-08-30 Halleffekt-sensor

Country Status (15)

Country Link
US (1) US6734514B2 (https=)
EP (1) EP1314211B1 (https=)
JP (1) JP5049449B2 (https=)
KR (1) KR100837912B1 (https=)
AT (1) ATE327574T1 (https=)
AU (2) AU8779101A (https=)
CA (1) CA2421077C (https=)
CY (1) CY1105327T1 (https=)
DE (1) DE60119937T2 (https=)
DK (1) DK1314211T3 (https=)
ES (1) ES2265440T3 (https=)
FR (1) FR2813443B1 (https=)
PT (1) PT1314211E (https=)
WO (1) WO2002019442A1 (https=)
ZA (1) ZA200301625B (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6879012B2 (en) * 2002-06-21 2005-04-12 The Regents Of The University Of California Giant planar hall effect in epitaxial ferromagnetic semiconductor devices
JP4980052B2 (ja) * 2004-05-17 2012-07-18 エルジー・ケム・リミテッド 電極及びその製造方法
KR100821630B1 (ko) 2004-05-17 2008-04-16 주식회사 엘지화학 전극 및 이의 제조방법
JP2009502583A (ja) * 2005-08-05 2009-01-29 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． 多孔質膜およびそれを含む記録媒体
ATE427156T1 (de) * 2005-08-05 2009-04-15 Fujifilm Mfg Europe Bv Poríse membran und aufzeichnungsmedium sowie herstellungsverfahren dafur
EP1924341A1 (en) * 2005-08-05 2008-05-28 FUJIFILM Manufacturing Europe B.V. Porous membrane and recording medium comprising same
EP1924342A1 (en) * 2005-08-05 2008-05-28 FUJIFILM Manufacturing Europe B.V. Porous membrane and recording medium comprising same
JP2009503227A (ja) * 2005-08-05 2009-01-29 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． 多孔質膜及びそれを用いた記録媒体
JP2009503224A (ja) * 2005-08-05 2009-01-29 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． 多孔質膜とこれを含む記録媒体
US9588134B2 (en) * 2012-05-10 2017-03-07 Infineon Technologies Ag Increased dynamic range sensor
US9362485B2 (en) 2013-03-14 2016-06-07 Robert Bosch Gmbh Vertical hall effect sensor with offset reduction using depletion regions
KR102116147B1 (ko) * 2014-03-06 2020-05-28 매그나칩 반도체 유한회사 매립형 마그네틱 센서
US11605778B2 (en) 2019-02-07 2023-03-14 Lake Shore Cryotronics, Inc. Hall effect sensor with low offset and high level of stability
GB2644272A (en) * 2024-09-17 2026-04-01 Univ Warwick Magnetic field sensor
CN120063335B (zh) * 2025-02-17 2025-10-03 安徽大学 一种基于室温平面霍尔效应的角度传感器件及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572091A (en) * 1978-11-24 1980-05-30 Victor Co Of Japan Ltd Hall element
GB2081934B (en) * 1980-08-08 1984-03-07 Ass Eng Ltd Automatic speed control systems
JP2884707B2 (ja) * 1990-05-21 1999-04-19 住友電気工業株式会社 ホール素子
JP3214505B2 (ja) * 1991-09-13 2001-10-02 株式会社デンソー 半導体装置の製造方法
US5536953A (en) * 1994-03-08 1996-07-16 Kobe Steel Usa Wide bandgap semiconductor device including lightly doped active region

Also Published As

Publication number Publication date
FR2813443A1 (fr) 2002-03-01
FR2813443B1 (fr) 2003-01-03
CA2421077C (fr) 2011-10-04
WO2002019442A1 (fr) 2002-03-07
CA2421077A1 (fr) 2002-03-07
AU8779101A (en) 2002-03-13
KR20030045042A (ko) 2003-06-09
DK1314211T3 (da) 2006-09-25
DE60119937D1 (de) 2006-06-29
JP2004508721A (ja) 2004-03-18
AU2001287791B2 (en) 2006-04-27
ZA200301625B (en) 2004-02-27
CY1105327T1 (el) 2010-03-03
JP5049449B2 (ja) 2012-10-17
ES2265440T3 (es) 2007-02-16
EP1314211A1 (fr) 2003-05-28
US6734514B2 (en) 2004-05-11
PT1314211E (pt) 2006-10-31
EP1314211B1 (fr) 2006-05-24
ATE327574T1 (de) 2006-06-15
KR100837912B1 (ko) 2008-06-13
US20030164530A1 (en) 2003-09-04

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