DE60119642D1 - Inertial-Drehratensensor und -verfahren mit verbessertem Takten - Google Patents

Inertial-Drehratensensor und -verfahren mit verbessertem Takten

Info

Publication number
DE60119642D1
DE60119642D1 DE60119642T DE60119642T DE60119642D1 DE 60119642 D1 DE60119642 D1 DE 60119642D1 DE 60119642 T DE60119642 T DE 60119642T DE 60119642 T DE60119642 T DE 60119642T DE 60119642 D1 DE60119642 D1 DE 60119642D1
Authority
DE
Germany
Prior art keywords
gyroscope sensor
inertial gyroscope
improved clocking
clocking
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60119642T
Other languages
English (en)
Other versions
DE60119642T2 (de
Inventor
Larry P Hobbs
Richard G Newell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Custom Sensors and Technologies Inc
Original Assignee
BEI Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEI Technologies Inc filed Critical BEI Technologies Inc
Application granted granted Critical
Publication of DE60119642D1 publication Critical patent/DE60119642D1/de
Publication of DE60119642T2 publication Critical patent/DE60119642T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE60119642T 2000-09-15 2001-08-17 Inertial-Drehratensensor und -verfahren mit verbessertem Takten Expired - Fee Related DE60119642T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/663,741 US6553835B1 (en) 2000-09-15 2000-09-15 Inertial rate sensor and method with improved clocking
US663741 2000-09-15

Publications (2)

Publication Number Publication Date
DE60119642D1 true DE60119642D1 (de) 2006-06-22
DE60119642T2 DE60119642T2 (de) 2006-10-26

Family

ID=24663090

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1189024T Pending DE1189024T1 (de) 2000-09-15 2001-08-17 Inertial-Drehratensensor und -verfahren mit verbessertem Takten
DE60119642T Expired - Fee Related DE60119642T2 (de) 2000-09-15 2001-08-17 Inertial-Drehratensensor und -verfahren mit verbessertem Takten

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE1189024T Pending DE1189024T1 (de) 2000-09-15 2001-08-17 Inertial-Drehratensensor und -verfahren mit verbessertem Takten

Country Status (4)

Country Link
US (1) US6553835B1 (de)
EP (1) EP1189024B1 (de)
JP (1) JP4001221B2 (de)
DE (2) DE1189024T1 (de)

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JP5136016B2 (ja) * 2006-11-27 2013-02-06 セイコーエプソン株式会社 駆動装置、物理量測定装置及び電子機器
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US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
KR101871865B1 (ko) 2010-09-18 2018-08-02 페어차일드 세미컨덕터 코포레이션 멀티-다이 ｍｅｍｓ 패키지
CN103221779B (zh) 2010-09-18 2017-05-31 快捷半导体公司 微机械整体式六轴惯性传感器
DE112011103124T5 (de) 2010-09-18 2013-12-19 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
CN103221778B (zh) 2010-09-18 2016-03-30 快捷半导体公司 具有单驱动的微机械单片式三轴陀螺仪
US20130247668A1 (en) * 2010-09-20 2013-09-26 Fairchild Semiconductor Corporation Inertial sensor mode tuning circuit
US10065851B2 (en) 2010-09-20 2018-09-04 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
WO2012040245A2 (en) 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Through silicon via with reduced shunt capacitance
JP5752441B2 (ja) * 2011-02-25 2015-07-22 セイコーエプソン株式会社 駆動回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
JP5638419B2 (ja) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
US8659211B1 (en) * 2011-09-26 2014-02-25 Image Acoustics, Inc. Quad and dual cantilever transduction apparatus
CN102497166B (zh) * 2011-11-14 2014-04-02 北京理工大学 一种钟形振子的激励电路
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US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
KR101999745B1 (ko) 2012-04-12 2019-10-01 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템 구동기
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9146109B2 (en) * 2012-11-26 2015-09-29 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with improved start-up phase, system including the microelectromechanical gyroscope, and method for speeding-up the start up phase
CN104995483B (zh) * 2013-02-08 2017-11-03 松下知识产权经营株式会社 惯性传感器
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Also Published As

Publication number Publication date
DE60119642T2 (de) 2006-10-26
EP1189024A3 (de) 2004-05-06
EP1189024B1 (de) 2006-05-17
JP2002188925A (ja) 2002-07-05
EP1189024A2 (de) 2002-03-20
DE1189024T1 (de) 2003-05-28
US6553835B1 (en) 2003-04-29
JP4001221B2 (ja) 2007-10-31

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee