DE60107184D1 - Vorrichtung und Verfahren zur Regelung des spezifischen Widerstandes von ultra reinem Wasser - Google Patents

Vorrichtung und Verfahren zur Regelung des spezifischen Widerstandes von ultra reinem Wasser

Info

Publication number
DE60107184D1
DE60107184D1 DE60107184T DE60107184T DE60107184D1 DE 60107184 D1 DE60107184 D1 DE 60107184D1 DE 60107184 T DE60107184 T DE 60107184T DE 60107184 T DE60107184 T DE 60107184T DE 60107184 D1 DE60107184 D1 DE 60107184D1
Authority
DE
Germany
Prior art keywords
resistivity
regulating
pure water
ultra pure
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60107184T
Other languages
English (en)
Other versions
DE60107184T2 (de
Inventor
Toshio Kambe
Kazumi Oi
Kazunari Sakai
Koji Kawase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIC Corp
Original Assignee
Dainippon Ink and Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Ink and Chemicals Co Ltd filed Critical Dainippon Ink and Chemicals Co Ltd
Application granted granted Critical
Publication of DE60107184D1 publication Critical patent/DE60107184D1/de
Publication of DE60107184T2 publication Critical patent/DE60107184T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B01F25/313—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced in the centre of the conduit
    • B01F25/3132—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced in the centre of the conduit by using two or more injector devices
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/90—Ultra pure water, e.g. conductivity water

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DE60107184T 2000-09-27 2001-09-26 Vorrichtung und Verfahren zur Regelung des spezifischen Widerstandes von ultra reinem Wasser Expired - Lifetime DE60107184T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000294219 2000-09-27
JP2000294219 2000-09-27

Publications (2)

Publication Number Publication Date
DE60107184D1 true DE60107184D1 (de) 2004-12-23
DE60107184T2 DE60107184T2 (de) 2005-11-10

Family

ID=18776868

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60107184T Expired - Lifetime DE60107184T2 (de) 2000-09-27 2001-09-26 Vorrichtung und Verfahren zur Regelung des spezifischen Widerstandes von ultra reinem Wasser

Country Status (5)

Country Link
US (1) US6884359B2 (de)
EP (1) EP1195189B1 (de)
KR (1) KR100783857B1 (de)
DE (1) DE60107184T2 (de)
TW (1) TW503124B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2859644B1 (fr) * 2003-09-16 2005-10-21 Air Liquide Dispositif de transfert d'eau et de chaleur entre deux flux d'air et application a l'humidification de gaz d'entree de pile a combustible
US20080067700A1 (en) * 2006-06-30 2008-03-20 Konstantin Korytnikov Humidifier device and method of forming the same
CN102036742B (zh) * 2008-05-19 2015-02-11 恩特格里公司 用于制备气体在液体中的无气泡溶液的气化系统和方法
US9808757B2 (en) * 2012-06-04 2017-11-07 The Southern Company Systems and methods for sequestering CO2
JP6453724B2 (ja) * 2014-08-26 2019-01-16 東京エレクトロン株式会社 基板液処理方法及び基板液処理装置
US10294132B2 (en) 2014-11-19 2019-05-21 Veeco Precision Surface Processing Llc Apparatus and method to reduce and control resistivity of deionized water
KR102084511B1 (ko) * 2015-04-13 2020-03-05 디아이씨 가부시끼가이샤 비저항값 조정 장치
JP6887722B2 (ja) * 2016-10-25 2021-06-16 株式会社ディスコ ウェーハの加工方法及び切削装置
JP7086068B2 (ja) 2016-11-11 2022-06-17 エムケイエス インストゥルメンツ， インコーポレイテッド アンモニアガスをその中に溶解した脱イオン水を含む導電性液体を生成するためのシステム及び方法
JP6602334B2 (ja) 2017-03-30 2019-11-06 栗田工業株式会社 規定濃度水の供給方法及び装置
KR102066790B1 (ko) 2018-05-18 2020-01-15 주식회사 웨코 나노 버블을 이용한 세정액 제조장치 및 제조방법
EP3814284A4 (de) * 2018-08-29 2022-03-23 MKS Instruments, Inc. System zur abgabe von ozoniertem wasser und verfahren zur verwendung
CN113613803B (zh) 2019-04-08 2024-02-02 Mks仪器有限公司 用于供应清洗液体的系统和方法
US20240189780A1 (en) * 2021-12-14 2024-06-13 Mks Instruments, Inc. Dissolved ammonia delivery system and methods of use

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173184A (ja) 1983-03-23 1984-10-01 Kurita Water Ind Ltd 超純水の比抵抗制御装置
JPS59196706A (ja) 1983-04-22 1984-11-08 Dainippon Ink & Chem Inc 不均質膜およびその製造方法
JPS59229320A (ja) 1983-05-23 1984-12-22 Dainippon Ink & Chem Inc 溶融・延伸法による不均質膜の製造方法
JPS6027603A (ja) 1983-07-25 1985-02-12 Arubatsuku Service Kk 超純水の比抵抗調整法
JPS61101206A (ja) 1984-10-23 1986-05-20 Dainippon Ink & Chem Inc 膜の製造方法
JPS61101227A (ja) 1984-10-23 1986-05-20 Dainippon Ink & Chem Inc 膜およびその製造方法
US5188257A (en) * 1987-10-15 1993-02-23 The Coca-Cola Company Supply of controlled, medium-pressure carbon dioxide gas in simple, convenient disposable packaging
JPH06210146A (ja) 1993-01-19 1994-08-02 Dainippon Ink & Chem Inc 中空糸不均質膜及びその製法
JPH0760082A (ja) 1993-08-31 1995-03-07 Mitsubishi Rayon Co Ltd 超純水の比抵抗調整方法及び装置
JP3631870B2 (ja) * 1997-01-21 2005-03-23 日本碍子株式会社 疎水性透過膜の透過性能維持方法
JP3814357B2 (ja) 1997-01-29 2006-08-30 日本碍子株式会社 超純水の比抵抗調整方法および比抵抗調整装置
JPH10324502A (ja) 1997-05-21 1998-12-08 Dainippon Ink & Chem Inc 超純水の炭酸ガス付加装置及び付加方法
JPH11139804A (ja) 1997-11-11 1999-05-25 Dainippon Ink & Chem Inc 超純水の比抵抗調整装置及び調整方法
JP3690569B2 (ja) 1998-11-20 2005-08-31 大日本インキ化学工業株式会社 超純水の比抵抗調整装置及び調整方法

Also Published As

Publication number Publication date
KR100783857B1 (ko) 2007-12-10
DE60107184T2 (de) 2005-11-10
TW503124B (en) 2002-09-21
US20020063345A1 (en) 2002-05-30
EP1195189B1 (de) 2004-11-17
US6884359B2 (en) 2005-04-26
EP1195189A1 (de) 2002-04-10
KR20020025047A (ko) 2002-04-03

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