DE60039762D1 - Verfahren und vorrichtung für die induktive messung der dimension eines objektes - Google Patents

Verfahren und vorrichtung für die induktive messung der dimension eines objektes

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Publication number
DE60039762D1
DE60039762D1 DE60039762T DE60039762T DE60039762D1 DE 60039762 D1 DE60039762 D1 DE 60039762D1 DE 60039762 T DE60039762 T DE 60039762T DE 60039762 T DE60039762 T DE 60039762T DE 60039762 D1 DE60039762 D1 DE 60039762D1
Authority
DE
Germany
Prior art keywords
magnetic field
time
field
receiving coil
transmitter coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60039762T
Other languages
English (en)
Inventor
Sten Linder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB AB
Original Assignee
ABB AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB AB filed Critical ABB AB
Application granted granted Critical
Publication of DE60039762D1 publication Critical patent/DE60039762D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/12—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Magnetic Variables (AREA)
DE60039762T 1999-06-30 2000-06-22 Verfahren und vorrichtung für die induktive messung der dimension eines objektes Expired - Lifetime DE60039762D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9902477A SE517293C2 (sv) 1999-06-30 1999-06-30 Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält
PCT/SE2000/001328 WO2001001065A1 (en) 1999-06-30 2000-06-22 Method for inductive measurement of a dimension of an object

Publications (1)

Publication Number Publication Date
DE60039762D1 true DE60039762D1 (de) 2008-09-18

Family

ID=20416297

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60039762T Expired - Lifetime DE60039762D1 (de) 1999-06-30 2000-06-22 Verfahren und vorrichtung für die induktive messung der dimension eines objektes

Country Status (9)

Country Link
US (1) US6661224B1 (de)
EP (1) EP1196737B1 (de)
JP (1) JP4563633B2 (de)
CN (1) CN1149384C (de)
AT (1) ATE403844T1 (de)
AU (1) AU6035600A (de)
DE (1) DE60039762D1 (de)
SE (1) SE517293C2 (de)
WO (1) WO2001001065A1 (de)

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SE525078C2 (sv) * 2001-06-29 2004-11-23 Abb Ab Metod samt induktiv mätanordning för detektering av mittpunkten hos ett elektriskt ledande material
US7205166B2 (en) * 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7128803B2 (en) * 2002-06-28 2006-10-31 Lam Research Corporation Integration of sensor based metrology into semiconductor processing tools
US7049810B1 (en) * 2003-07-18 2006-05-23 Lincoln Global, Inc. Apparatus to measure fill
US7042207B1 (en) * 2003-11-07 2006-05-09 National Semiconductor Corporation Inductive measurement system and method
SE527091C2 (sv) * 2003-12-31 2005-12-20 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek och elektriska ledningsförmåga hos ett mätobjekt
SE527125C2 (sv) * 2003-12-31 2005-12-27 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek eller ledningsförmåga med elektromagnetisk induktion
JP2007093518A (ja) * 2005-09-30 2007-04-12 Marktec Corp 肉厚測定装置
CN100449254C (zh) * 2005-12-27 2009-01-07 林俊明 一种非金属材料厚度的电磁检测方法
ATE500487T1 (de) * 2006-11-23 2011-03-15 Abb Ab SIGNALVERARBEITUNGSVERFAHREN UND EINHEIT FÜR EIN GRÖßENMESSSYSTEM
KR101618354B1 (ko) * 2008-05-08 2016-05-04 어플라이드 머티어리얼스, 인코포레이티드 Cmp 패드 두께 및 프로파일 모니터링 시스템
KR101140823B1 (ko) * 2009-02-25 2012-05-03 현대제철 주식회사 압연 스탠드의 스트립 속도 측정 장치
JP5106704B2 (ja) * 2009-03-17 2012-12-26 エービービー エービー 金属製の物体に設けられた金属層の厚さを測定するための方法および装置
JP2013525126A (ja) 2010-04-20 2013-06-20 アプライド マテリアルズ インコーポレイテッド 改善された研磨パッドプロファイルのための閉ループ制御
ES2465999T3 (es) 2011-09-29 2014-06-09 Abb Technology Ag Método y dispositivo para la detección de fisuras en un material metálico
CN105983480A (zh) * 2015-02-27 2016-10-05 丹东东方测控技术股份有限公司 一种实时测量磁力脱水槽精矿层位置的方法
ITUB20153029A1 (it) * 2015-08-10 2017-02-10 Danieli Automation Spa Metodo per la misura a caldo, durante la laminazione, di una dimensione di profili metallici
ITUB20153041A1 (it) * 2015-08-10 2017-02-10 Danieli Automation Spa Dispositivo per la misura a caldo, durante la laminazione, di una dimensione di profili metallici
RU2610878C1 (ru) * 2015-11-05 2017-02-17 федеральное государственное автономное образовательное учреждение высшего образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Способ бесконтактного измерения электромагнитных параметров материалов
RU2687504C1 (ru) * 2018-05-24 2019-05-14 Федеральное государственное автономное образовательное учреждение высшего образования "Балтийский федеральный университет имени Иммануила Канта" (БФУ им. И. Канта) Способ и устройство для бесконтактного определения удельного электросопротивления металлов в области высоких температур
US11143495B2 (en) * 2018-09-24 2021-10-12 Honeywell International Inc. Thickness measurement with inductive and optical displacement sensors
CN110260778B (zh) * 2019-07-19 2024-05-17 华中科技大学无锡研究院 基于电磁原理的倒角测量方法及装置
US11794305B2 (en) 2020-09-28 2023-10-24 Applied Materials, Inc. Platen surface modification and high-performance pad conditioning to improve CMP performance
EP4012326B1 (de) 2020-12-11 2024-08-07 ABB Schweiz AG Gepulstes wirbelstromsystem
EP4053494B1 (de) 2021-03-02 2024-08-28 ABB Schweiz AG Dickenmessung unter verwendung eines gepulsten wirbelstromsystems
EP4116666B1 (de) 2021-07-07 2024-01-31 Abb Schweiz Ag Empfänger für ein gepulstes wirbelstromsystem
CN115808115B (zh) * 2023-01-13 2023-05-23 昆山尚瑞智能科技有限公司 一种用于小直径孔槽的汽车零件测量设备

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Publication number Priority date Publication date Assignee Title
FR2398999A1 (fr) * 1977-07-27 1979-02-23 Measurex Corp Comparateur d'epaisseur de matieres en feuille
JPS6166104A (ja) * 1984-09-07 1986-04-04 Anelva Corp 金属薄膜膜厚測定方法
SE451886B (sv) * 1986-10-10 1987-11-02 Sten Linder Sett och anordning for beroringsfri metning av storheter hos eller i anslutning till elektriskt ledande material
US5498958A (en) 1990-12-21 1996-03-12 Detra Sa Inductive proximity sensor with periodic switching for sensing the presence of objects
EP0492029B1 (de) * 1990-12-21 1992-11-11 Detra Sa Induktiver Näherungssensor
GB9217451D0 (en) * 1992-08-17 1992-09-30 Case Icc Limited Method and apparatus for coin discrimination
DE4227735C2 (de) * 1992-08-21 1995-10-12 Leybold Ag Anordnung zum berührungslosen Messen der Dicke von Schichten
DE4327712C2 (de) * 1993-08-18 1997-07-10 Micro Epsilon Messtechnik Sensoranordnung und Verfahren zum Erfassen von Eigenschaften der Oberflächenschicht eines metallischen Targets
US5541510A (en) 1995-04-06 1996-07-30 Kaman Instrumentation Corporation Multi-Parameter eddy current measuring system with parameter compensation technical field
US5552705A (en) * 1995-06-01 1996-09-03 Keller; George V. Non-obtrusive weapon detection system and method for discriminating between a concealed weapon and other metal objects
SE505763C2 (sv) * 1995-10-13 1997-10-06 Asea Brown Boveri Induktiv anordning för bestämning av mått och läge hos mätobjekt av elektriskt ledande material
JP2911828B2 (ja) * 1996-07-30 1999-06-23 カーマン・インスツルメンテーション・コーポレーション パラメータ補償付き複数パラメータうず電流計測システム

Also Published As

Publication number Publication date
JP2003503683A (ja) 2003-01-28
CN1149384C (zh) 2004-05-12
ATE403844T1 (de) 2008-08-15
JP4563633B2 (ja) 2010-10-13
EP1196737B1 (de) 2008-08-06
SE9902477L (sv) 2001-02-27
EP1196737A1 (de) 2002-04-17
US6661224B1 (en) 2003-12-09
WO2001001065A1 (en) 2001-01-04
CN1372628A (zh) 2002-10-02
AU6035600A (en) 2001-01-31
SE517293C2 (sv) 2002-05-21
SE9902477D0 (sv) 1999-06-30

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