SE517293C2 - Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält - Google Patents

Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält

Info

Publication number
SE517293C2
SE517293C2 SE9902477A SE9902477A SE517293C2 SE 517293 C2 SE517293 C2 SE 517293C2 SE 9902477 A SE9902477 A SE 9902477A SE 9902477 A SE9902477 A SE 9902477A SE 517293 C2 SE517293 C2 SE 517293C2
Authority
SE
Sweden
Prior art keywords
time
signal
coils
decay
magnetic field
Prior art date
Application number
SE9902477A
Other languages
English (en)
Swedish (sv)
Other versions
SE9902477L (sv
SE9902477D0 (sv
Inventor
Sten Linder
Original Assignee
Abb Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Ab filed Critical Abb Ab
Priority to SE9902477A priority Critical patent/SE517293C2/sv
Publication of SE9902477D0 publication Critical patent/SE9902477D0/xx
Priority to JP2001506437A priority patent/JP4563633B2/ja
Priority to DE60039762T priority patent/DE60039762D1/de
Priority to EP00946626A priority patent/EP1196737B1/de
Priority to AU60356/00A priority patent/AU6035600A/en
Priority to US10/019,441 priority patent/US6661224B1/en
Priority to AT00946626T priority patent/ATE403844T1/de
Priority to PCT/SE2000/001328 priority patent/WO2001001065A1/en
Priority to CNB008123063A priority patent/CN1149384C/zh
Publication of SE9902477L publication Critical patent/SE9902477L/
Publication of SE517293C2 publication Critical patent/SE517293C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/12—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Magnetic Variables (AREA)
SE9902477A 1999-06-30 1999-06-30 Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält SE517293C2 (sv)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE9902477A SE517293C2 (sv) 1999-06-30 1999-06-30 Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält
CNB008123063A CN1149384C (zh) 1999-06-30 2000-06-22 物体尺寸的感应测量方法
AU60356/00A AU6035600A (en) 1999-06-30 2000-06-22 Method for inductive measurement of a dimension of an object
DE60039762T DE60039762D1 (de) 1999-06-30 2000-06-22 Verfahren und vorrichtung für die induktive messung der dimension eines objektes
EP00946626A EP1196737B1 (de) 1999-06-30 2000-06-22 Verfahren und vorrichtung für die induktive messung der dimension eines objektes
JP2001506437A JP4563633B2 (ja) 1999-06-30 2000-06-22 対象物の誘導測定法
US10/019,441 US6661224B1 (en) 1999-06-30 2000-06-22 Method for inductive measurement of a dimension of an object
AT00946626T ATE403844T1 (de) 1999-06-30 2000-06-22 Verfahren und vorrichtung für die induktive messung der dimension eines objektes
PCT/SE2000/001328 WO2001001065A1 (en) 1999-06-30 2000-06-22 Method for inductive measurement of a dimension of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9902477A SE517293C2 (sv) 1999-06-30 1999-06-30 Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält

Publications (3)

Publication Number Publication Date
SE9902477D0 SE9902477D0 (sv) 1999-06-30
SE9902477L SE9902477L (sv) 2001-02-27
SE517293C2 true SE517293C2 (sv) 2002-05-21

Family

ID=20416297

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9902477A SE517293C2 (sv) 1999-06-30 1999-06-30 Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält

Country Status (9)

Country Link
US (1) US6661224B1 (de)
EP (1) EP1196737B1 (de)
JP (1) JP4563633B2 (de)
CN (1) CN1149384C (de)
AT (1) ATE403844T1 (de)
AU (1) AU6035600A (de)
DE (1) DE60039762D1 (de)
SE (1) SE517293C2 (de)
WO (1) WO2001001065A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE525078C2 (sv) * 2001-06-29 2004-11-23 Abb Ab Metod samt induktiv mätanordning för detektering av mittpunkten hos ett elektriskt ledande material
US7205166B2 (en) * 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7128803B2 (en) * 2002-06-28 2006-10-31 Lam Research Corporation Integration of sensor based metrology into semiconductor processing tools
US7049810B1 (en) * 2003-07-18 2006-05-23 Lincoln Global, Inc. Apparatus to measure fill
US7042207B1 (en) * 2003-11-07 2006-05-09 National Semiconductor Corporation Inductive measurement system and method
SE527091C2 (sv) * 2003-12-31 2005-12-20 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek och elektriska ledningsförmåga hos ett mätobjekt
SE527125C2 (sv) * 2003-12-31 2005-12-27 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek eller ledningsförmåga med elektromagnetisk induktion
JP2007093518A (ja) * 2005-09-30 2007-04-12 Marktec Corp 肉厚測定装置
CN100449254C (zh) * 2005-12-27 2009-01-07 林俊明 一种非金属材料厚度的电磁检测方法
ATE500487T1 (de) * 2006-11-23 2011-03-15 Abb Ab SIGNALVERARBEITUNGSVERFAHREN UND EINHEIT FÜR EIN GRÖßENMESSSYSTEM
KR101618354B1 (ko) * 2008-05-08 2016-05-04 어플라이드 머티어리얼스, 인코포레이티드 Cmp 패드 두께 및 프로파일 모니터링 시스템
KR101140823B1 (ko) * 2009-02-25 2012-05-03 현대제철 주식회사 압연 스탠드의 스트립 속도 측정 장치
JP5106704B2 (ja) * 2009-03-17 2012-12-26 エービービー エービー 金属製の物体に設けられた金属層の厚さを測定するための方法および装置
JP2013525126A (ja) 2010-04-20 2013-06-20 アプライド マテリアルズ インコーポレイテッド 改善された研磨パッドプロファイルのための閉ループ制御
ES2465999T3 (es) 2011-09-29 2014-06-09 Abb Technology Ag Método y dispositivo para la detección de fisuras en un material metálico
CN105983480A (zh) * 2015-02-27 2016-10-05 丹东东方测控技术股份有限公司 一种实时测量磁力脱水槽精矿层位置的方法
ITUB20153029A1 (it) * 2015-08-10 2017-02-10 Danieli Automation Spa Metodo per la misura a caldo, durante la laminazione, di una dimensione di profili metallici
ITUB20153041A1 (it) * 2015-08-10 2017-02-10 Danieli Automation Spa Dispositivo per la misura a caldo, durante la laminazione, di una dimensione di profili metallici
RU2610878C1 (ru) * 2015-11-05 2017-02-17 федеральное государственное автономное образовательное учреждение высшего образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Способ бесконтактного измерения электромагнитных параметров материалов
RU2687504C1 (ru) * 2018-05-24 2019-05-14 Федеральное государственное автономное образовательное учреждение высшего образования "Балтийский федеральный университет имени Иммануила Канта" (БФУ им. И. Канта) Способ и устройство для бесконтактного определения удельного электросопротивления металлов в области высоких температур
US11143495B2 (en) * 2018-09-24 2021-10-12 Honeywell International Inc. Thickness measurement with inductive and optical displacement sensors
CN110260778B (zh) * 2019-07-19 2024-05-17 华中科技大学无锡研究院 基于电磁原理的倒角测量方法及装置
US11794305B2 (en) 2020-09-28 2023-10-24 Applied Materials, Inc. Platen surface modification and high-performance pad conditioning to improve CMP performance
EP4012326B1 (de) 2020-12-11 2024-08-07 ABB Schweiz AG Gepulstes wirbelstromsystem
EP4053494B1 (de) 2021-03-02 2024-08-28 ABB Schweiz AG Dickenmessung unter verwendung eines gepulsten wirbelstromsystems
EP4116666B1 (de) 2021-07-07 2024-01-31 Abb Schweiz Ag Empfänger für ein gepulstes wirbelstromsystem
CN115808115B (zh) * 2023-01-13 2023-05-23 昆山尚瑞智能科技有限公司 一种用于小直径孔槽的汽车零件测量设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2398999A1 (fr) * 1977-07-27 1979-02-23 Measurex Corp Comparateur d'epaisseur de matieres en feuille
JPS6166104A (ja) * 1984-09-07 1986-04-04 Anelva Corp 金属薄膜膜厚測定方法
SE451886B (sv) * 1986-10-10 1987-11-02 Sten Linder Sett och anordning for beroringsfri metning av storheter hos eller i anslutning till elektriskt ledande material
US5498958A (en) 1990-12-21 1996-03-12 Detra Sa Inductive proximity sensor with periodic switching for sensing the presence of objects
EP0492029B1 (de) * 1990-12-21 1992-11-11 Detra Sa Induktiver Näherungssensor
GB9217451D0 (en) * 1992-08-17 1992-09-30 Case Icc Limited Method and apparatus for coin discrimination
DE4227735C2 (de) * 1992-08-21 1995-10-12 Leybold Ag Anordnung zum berührungslosen Messen der Dicke von Schichten
DE4327712C2 (de) * 1993-08-18 1997-07-10 Micro Epsilon Messtechnik Sensoranordnung und Verfahren zum Erfassen von Eigenschaften der Oberflächenschicht eines metallischen Targets
US5541510A (en) 1995-04-06 1996-07-30 Kaman Instrumentation Corporation Multi-Parameter eddy current measuring system with parameter compensation technical field
US5552705A (en) * 1995-06-01 1996-09-03 Keller; George V. Non-obtrusive weapon detection system and method for discriminating between a concealed weapon and other metal objects
SE505763C2 (sv) * 1995-10-13 1997-10-06 Asea Brown Boveri Induktiv anordning för bestämning av mått och läge hos mätobjekt av elektriskt ledande material
JP2911828B2 (ja) * 1996-07-30 1999-06-23 カーマン・インスツルメンテーション・コーポレーション パラメータ補償付き複数パラメータうず電流計測システム

Also Published As

Publication number Publication date
JP2003503683A (ja) 2003-01-28
CN1149384C (zh) 2004-05-12
ATE403844T1 (de) 2008-08-15
JP4563633B2 (ja) 2010-10-13
EP1196737B1 (de) 2008-08-06
DE60039762D1 (de) 2008-09-18
SE9902477L (sv) 2001-02-27
EP1196737A1 (de) 2002-04-17
US6661224B1 (en) 2003-12-09
WO2001001065A1 (en) 2001-01-04
CN1372628A (zh) 2002-10-02
AU6035600A (en) 2001-01-31
SE9902477D0 (sv) 1999-06-30

Similar Documents

Publication Publication Date Title
SE517293C2 (sv) Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält
US5059902A (en) Electromagnetic method and system using voltage induced by a decaying magnetic field to determine characteristics, including distance, dimensions, conductivity and temperature, of an electrically conductive material
US8718964B2 (en) Method and system for calibrating current sensors
EP1660842B1 (de) Positionssensoren
JP2911828B2 (ja) パラメータ補償付き複数パラメータうず電流計測システム
KR20050084281A (ko) 두개의 와전류 센서 헤드 사이에서 테스트 물체의 두께를측정하는 방법 및 장치
US4164146A (en) Apparatus and method for monitoring the presence of a conductive media
EP1709390B1 (de) Verfahren und einrichtung zur messung der dicke und elektrischen leitfähigkeit eines messobjekts
US20150025772A1 (en) Position Indicator Device
JP2002535686A (ja) 磁場測定装置及び磁場測定方法
JP4559436B2 (ja) 厚さ及び電気伝導度の電磁気学的測定ための方法及びデバイス
JP2007139498A (ja) 比抵抗測定装置
CN107939813A (zh) 转轴和对转轴进行轴向位移检测的方法
US20040075430A1 (en) Magnetic differential field sensor using hysteresis field in AMR films
WO2021254969A2 (en) Method and arrangement for crack detection at an edge in a metallic material
SE456606B (sv) Anordning for metning och/eller provning av dimension och/eller form via avstandsmetning
JPS5633521A (en) Device for measuring stress
JPS56145305A (en) Detecting device for uneven thickness of covered wire material
KR100462386B1 (ko) 자기장 변화에 따른 비자성체의 열팽창계수 측정장치
JP2500364B2 (ja) 超電導コイルのクエンチ検出装置
JPS5841507Y2 (ja) 金属探知器
SU864105A1 (ru) Способ измерени параметров электропровод щих тел
RU1768940C (ru) Способ контрол поперечной разнотолщинности металлической трубы
JP6292998B2 (ja) パイプロケーティング方法
JP2005214934A (ja) 物体の位置測定方法および温度測定方法