DE60039432D1 - Mikrofabrizierte spiegel-vorrichtung - Google Patents

Mikrofabrizierte spiegel-vorrichtung

Info

Publication number
DE60039432D1
DE60039432D1 DE60039432T DE60039432T DE60039432D1 DE 60039432 D1 DE60039432 D1 DE 60039432D1 DE 60039432 T DE60039432 T DE 60039432T DE 60039432 T DE60039432 T DE 60039432T DE 60039432 D1 DE60039432 D1 DE 60039432D1
Authority
DE
Germany
Prior art keywords
mirror
micro machined
mirror device
travel stops
limit motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60039432T
Other languages
German (de)
English (en)
Inventor
Duli Yu
Lianzhong Yu
Howard D Goldberg
Martin A Schmidt
Robert P Ried
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Geophysical Corp
Original Assignee
Ion Geophysical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Geophysical Corp filed Critical Ion Geophysical Corp
Application granted granted Critical
Publication of DE60039432D1 publication Critical patent/DE60039432D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Sliding-Contact Bearings (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE60039432T 1999-07-13 2000-07-13 Mikrofabrizierte spiegel-vorrichtung Expired - Lifetime DE60039432D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/352,835 US6315423B1 (en) 1999-07-13 1999-07-13 Micro machined mirror
PCT/US2000/018998 WO2001004680A1 (en) 1999-07-13 2000-07-13 Micro-machined mirror device

Publications (1)

Publication Number Publication Date
DE60039432D1 true DE60039432D1 (de) 2008-08-21

Family

ID=23386711

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60039432T Expired - Lifetime DE60039432D1 (de) 1999-07-13 2000-07-13 Mikrofabrizierte spiegel-vorrichtung

Country Status (9)

Country Link
US (2) US6315423B1 (https=)
EP (1) EP1200865B1 (https=)
JP (1) JP2003527621A (https=)
AT (1) ATE400831T1 (https=)
AU (1) AU6091100A (https=)
CA (1) CA2378736C (https=)
DE (1) DE60039432D1 (https=)
NO (1) NO326146B1 (https=)
WO (1) WO2001004680A1 (https=)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6720682B2 (en) * 2001-06-14 2004-04-13 Lightbay Networks Corporation Actuator assembly for tilting a mirror or like object
JP2003022414A (ja) * 2001-07-06 2003-01-24 Sony Corp バーコードリーダ
US6844952B2 (en) * 2001-09-18 2005-01-18 Vitesse Semiconductor Corporation Actuator-controlled mirror with Z-stop mechanism
EP1890181B1 (en) 2001-10-19 2012-07-04 ION Geophysical Corporation Digital optical switch apparatus and process for manufacturing same
ATE393409T1 (de) * 2001-10-19 2008-05-15 Ion Geophysical Corp Digitale optische schaltvorrichtung und prozess zu ihrer herstellung
US7400432B2 (en) * 2002-05-17 2008-07-15 Microvision, Inc. Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method
CA2429508C (en) * 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
US7110637B2 (en) * 2002-05-28 2006-09-19 Jds Uniphase Inc. Two-step electrode for MEMs micromirrors
US7167613B2 (en) * 2002-05-28 2007-01-23 Jds Uniphase Inc. Interlaced array of piano MEMs micromirrors
US7302131B2 (en) * 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
US6641273B1 (en) 2002-06-28 2003-11-04 Glimmerglass Networks, Inc. MEMS structure with mechanical overdeflection limiter
US7019434B2 (en) 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
US20040160118A1 (en) 2002-11-08 2004-08-19 Knollenberg Clifford F. Actuator apparatus and method for improved deflection characteristics
US7095546B2 (en) * 2003-04-24 2006-08-22 Metconnex Canada Inc. Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
EP2218677A1 (en) 2003-05-23 2010-08-18 JDS Uniphase, Inc Electrode configuration for pivotable MEMS micromirror
US7089666B2 (en) * 2003-06-06 2006-08-15 The Regents Of The University Of California Microfabricated vertical comb actuator using plastic deformation
US20080197748A1 (en) * 2003-07-28 2008-08-21 Technion Research And Development Foundation Ltd. Vertical Comb Drive and Uses Thereof
US20050093818A1 (en) * 2003-11-05 2005-05-05 Lightbay Networks Corporation Dynamic laser projection display
US7751694B2 (en) * 2004-02-13 2010-07-06 Angstrom, Inc. Three-dimensional endoscope imaging and display system
US7330297B2 (en) 2005-03-04 2008-02-12 Angstrom, Inc Fine control of rotation and translation of discretely controlled micromirror
US7382516B2 (en) * 2004-06-18 2008-06-03 Angstrom, Inc. Discretely controlled micromirror with multi-level positions
US7474454B2 (en) * 2004-06-18 2009-01-06 Angstrom, Inc. Programmable micromirror motion control system
US8537204B2 (en) * 2004-07-08 2013-09-17 Gyoung Il Cho 3D television broadcasting system
US7350922B2 (en) * 2004-02-13 2008-04-01 Angstrom, Inc. Three-dimensional display using variable focal length micromirror array lens
US7580178B2 (en) * 2004-02-13 2009-08-25 Angstrom, Inc. Image-guided microsurgery system and method
US7898144B2 (en) * 2006-02-04 2011-03-01 Angstrom, Inc. Multi-step microactuator providing multi-step displacement to a controlled object
US7339746B2 (en) * 2004-03-22 2008-03-04 Angstrom, Inc. Small and fast zoom system using micromirror array lens
US7410266B2 (en) * 2004-03-22 2008-08-12 Angstrom, Inc. Three-dimensional imaging system for robot vision
US7768571B2 (en) * 2004-03-22 2010-08-03 Angstrom, Inc. Optical tracking system using variable focal length lens
US20070115261A1 (en) * 2005-11-23 2007-05-24 Stereo Display, Inc. Virtual Keyboard input system using three-dimensional motion detection by variable focal length lens
US20070040924A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Cellular phone camera with three-dimensional imaging function
US7742232B2 (en) * 2004-04-12 2010-06-22 Angstrom, Inc. Three-dimensional imaging system
US8049776B2 (en) * 2004-04-12 2011-11-01 Angstrom, Inc. Three-dimensional camcorder
US7619614B2 (en) * 2004-04-12 2009-11-17 Angstrom, Inc. Three-dimensional optical mouse system
US7667896B2 (en) 2004-05-27 2010-02-23 Angstrom, Inc. DVD recording and reproducing system
US7777959B2 (en) * 2004-05-27 2010-08-17 Angstrom, Inc. Micromirror array lens with fixed focal length
US7354167B2 (en) 2004-05-27 2008-04-08 Angstrom, Inc. Beam focusing and scanning system using micromirror array lens
US7619807B2 (en) 2004-11-08 2009-11-17 Angstrom, Inc. Micromirror array lens with optical surface profiles
US7489434B2 (en) 2007-05-02 2009-02-10 Angstrom, Inc. Hybrid micromirror array lens for reducing chromatic aberration
US7232701B2 (en) * 2005-01-04 2007-06-19 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
EP2461200A1 (en) 2005-01-05 2012-06-06 Nippon Telegraph And Telephone Corporation Mirror device
US7432629B2 (en) * 2005-02-16 2008-10-07 Jds Uniphase Corporation Articulated MEMs structures
US20060198011A1 (en) * 2005-03-04 2006-09-07 Stereo Display, Inc. Volumetric three-dimensional device using two-dimensional scanning device
US20060203117A1 (en) * 2005-03-10 2006-09-14 Stereo Display, Inc. Video monitoring system using variable focal length lens
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US20070041077A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Pocket-sized two-dimensional image projection system
US7616372B2 (en) * 2006-04-06 2009-11-10 Jds Uniphase Corporation Piano MEMS with hidden hinge
US9736346B2 (en) 2006-05-09 2017-08-15 Stereo Display, Inc Imaging system improving image resolution of the system with low resolution image sensor
US7784933B2 (en) * 2006-06-29 2010-08-31 Lexmark International, Inc. Smart projector guides for handprinters
US20080022771A1 (en) * 2006-07-28 2008-01-31 Alexander Wolter Micromechanical component
CN101121498B (zh) * 2006-08-07 2011-01-26 探微科技股份有限公司 制作微扭转轴的方法
US7365899B2 (en) * 2006-08-10 2008-04-29 Angstrom, Inc. Micromirror with multi-axis rotation and translation
US7589884B2 (en) * 2006-09-22 2009-09-15 Angstrom, Inc. Micromirror array lens with encapsulation of reflective metal layer and method of making the same
US7589885B2 (en) * 2006-09-22 2009-09-15 Angstrom, Inc. Micromirror array device comprising encapsulated reflective metal layer and method of making the same
JP4919750B2 (ja) 2006-09-27 2012-04-18 富士通株式会社 マイクロ構造体製造方法およびマイクロ構造体
US7488082B2 (en) 2006-12-12 2009-02-10 Angstrom, Inc. Discretely controlled micromirror array device with segmented electrodes
DE102007002725A1 (de) 2007-01-18 2008-07-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente
US7535618B2 (en) * 2007-03-12 2009-05-19 Angstrom, Inc. Discretely controlled micromirror device having multiple motions
US9505606B2 (en) 2007-06-13 2016-11-29 Angstrom, Inc. MEMS actuator with discretely controlled multiple motions
US7605988B2 (en) 2007-07-23 2009-10-20 Angstrom, Inc. Compact image taking lens system with a lens-surfaced prism
US7589916B2 (en) 2007-08-10 2009-09-15 Angstrom, Inc. Micromirror array with iris function
US20090185067A1 (en) * 2007-12-21 2009-07-23 Stereo Display, Inc. Compact automatic focusing camera
US8810908B2 (en) 2008-03-18 2014-08-19 Stereo Display, Inc. Binoculars with micromirror array lenses
US8622557B2 (en) 2008-05-20 2014-01-07 Stereo Display, Inc. Micromirror array lens with self-tilted micromirrors
US20090303569A1 (en) * 2008-05-20 2009-12-10 Stereo Didplay, Inc. Self-tilted micromirror device
DE09770219T8 (de) * 2008-06-25 2013-04-25 Panasonic Electric Works Co., Ltd. Bewegliche struktur und lichtabtastspiegel damit
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
JP5577742B2 (ja) 2010-02-23 2014-08-27 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
ITTO20130031A1 (it) 2013-01-14 2014-07-15 St Microelectronics Srl Struttura micromeccanica di specchio e relativo procedimento di fabbricazione
JP6343994B2 (ja) * 2014-03-25 2018-06-20 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
DE102017206252A1 (de) * 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
JPS644091Y2 (https=) * 1981-05-18 1989-02-02
US5245464A (en) * 1988-08-12 1993-09-14 Laser Scan Vision Aps Deflecting instrument, controllable reflecting device herefor and use hereof
JPH03287222A (ja) * 1990-04-03 1991-12-17 Ricoh Co Ltd トラッキングミラーアクチュエータ装置
US5966230A (en) 1990-05-29 1999-10-12 Symbol Technologies, Inc. Integrated scanner on a common substrate
US6044705A (en) 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6059188A (en) 1993-10-25 2000-05-09 Symbol Technologies Packaged mirror including mirror travel stops
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
JP3636742B2 (ja) * 1993-12-22 2005-04-06 オムロン株式会社 光スキャナ及び光走査装置並びに当該光走査装置を用いた符号情報読み取り装置及びｐｏｓシステム
JPH08211320A (ja) * 1994-11-10 1996-08-20 Toshiba Corp ガルバノミラー及びそれを用いた光ディスク装置
JP3698794B2 (ja) * 1995-02-27 2005-09-21 オリンパス株式会社 光学スキャナ
JP3427564B2 (ja) * 1995-04-25 2003-07-22 オムロン株式会社 光走査装置
JPH1062709A (ja) * 1996-08-13 1998-03-06 Toshiba Corp ガルバノミラー装置およびこれを用いた光ディスク装置
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5999303A (en) * 1997-03-24 1999-12-07 Seagate Technology Inc. Micro-machined mirror using tethered elements
US6128122A (en) * 1998-09-18 2000-10-03 Seagate Technology, Inc. Micromachined mirror with stretchable restoring force member
EP1012890A1 (en) * 1997-04-01 2000-06-28 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators
US6617098B1 (en) * 1999-07-13 2003-09-09 Input/Output, Inc. Merged-mask micro-machining process

Also Published As

Publication number Publication date
NO20020140L (no) 2002-03-12
NO326146B1 (no) 2008-10-06
JP2003527621A (ja) 2003-09-16
WO2001004680A1 (en) 2001-01-18
CA2378736A1 (en) 2001-01-18
AU6091100A (en) 2001-01-30
ATE400831T1 (de) 2008-07-15
US6454421B2 (en) 2002-09-24
EP1200865A1 (en) 2002-05-02
EP1200865A4 (en) 2004-04-28
US20020012180A1 (en) 2002-01-31
US6315423B1 (en) 2001-11-13
EP1200865B1 (en) 2008-07-09
NO20020140D0 (no) 2002-01-11
CA2378736C (en) 2010-03-23

Similar Documents

Publication Publication Date Title
ATE400831T1 (de) Mikrofabrizierte spiegel-vorrichtung
ATE261038T1 (de) Fussbodenleiste
NO860763L (no) Stabilisert, flytende toeyvaskemiddel.
FI872653A0 (fi) Fiberhaltig soetsakskomposition med mjuk textur.
CL2008002867A1 (es) Uso de (s,s)-reboxetina en la preparacion de un medicamento util en el tratamiento de un trastorno de ajuste o adaptacion, anorexia nerviosa, bulimia nerviosa, trastorno sistemico, trastorno de intoxicacion, trastorno compulsivos obsesivos, trastorno de desarrollo especifico, trastorno tic, entre otras (sol. div. 1765-00).
FI901956A0 (fi) Nya naftalenylalkyl-3h-1,2,3,5 -oxatiadiazol-2-oxider anvaendbara som antihyperglykemiska medel.
DK0491664T3 (da) Indolderivater som serotonin-antagonister
FI963786A0 (fi) Uusia 1,4-disubstituoituja piperidiinijohdannaisia, jotka ovat käyttökelpoisia glutamaattireseptoriin vaikuttavina lääkeaineina
DE68907589D1 (de) Flasche und kappe-verschluss-konstruktion.
ES2011598A4 (es) Base plegable de carro.
IT8621578A0 (it) Mobile da riposo con talaio oscillante.
DE58903477D1 (de) Fluessige, strahlenhaertbare ueberzugsmasse fuer die beschichtung von glasoberflaechen.
DK275087D0 (da) Middel til bekaempelse af skadelige organismer paa basis af aminopyrimidin-derivater, dets fremstilling og anvendelse samt hidtil ukendte aminopyrimidin-forbindelser
DE59902018D1 (de) Klappdeckelverschluss
DE69526166D1 (de) Aufschraubbare Kappe
FI864716L (fi) Nya kefalosporiner, deras framstaellningsfoerfarande samt deras anvaendning som laekemedel.
IT1183386B (it) Ruenetto con dispositivo di fermo per il corpo di azionamento , particolarmente per bombolo di gas liquido
FI900661A0 (fi) Nya formbara sammansaettningar som haerdas i vaerme.
DE69009192D1 (de) Pfeileraufbau.
IT8623408V0 (it) Struttura di coperchio versatore, particolarment estudiata per vernici, smalti e simili.
DE3764140D1 (de) Verschlussdeckel fuer flasche.
KR900000717U (ko) 병마개의 밀착 고정 시킴을 겸한 오프너
FI901955A0 (fi) Nya naftalenyl-3h-1,2,3,5-oxatiadiazol -2-oxider anvaendbara som, antihyperglykemiska medel.
ES291476Y (es) Aparato atomizador de liquidos,mejorado
ES1024844Y (es) Biberon con vasito anti-goteo.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KUDLEK & GRUNERT PATENTANWAELTE PARTNERSCHAFT, 803