DE60036301D1 - Gassensor und sein herstellungsverfahren - Google Patents

Gassensor und sein herstellungsverfahren

Info

Publication number
DE60036301D1
DE60036301D1 DE60036301T DE60036301T DE60036301D1 DE 60036301 D1 DE60036301 D1 DE 60036301D1 DE 60036301 T DE60036301 T DE 60036301T DE 60036301 T DE60036301 T DE 60036301T DE 60036301 D1 DE60036301 D1 DE 60036301D1
Authority
DE
Germany
Prior art keywords
gas sensor
recess
manufacturing process
silicon substrate
patterned layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60036301T
Other languages
English (en)
Inventor
Won-Bae Lee
Ho-Jun Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seju Engineering Co Ltd
Original Assignee
Seju Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seju Engineering Co Ltd filed Critical Seju Engineering Co Ltd
Application granted granted Critical
Publication of DE60036301D1 publication Critical patent/DE60036301D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE60036301T 1999-10-19 2000-10-17 Gassensor und sein herstellungsverfahren Expired - Lifetime DE60036301D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019990045306A KR20010037655A (ko) 1999-10-19 1999-10-19 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법
PCT/KR2000/001161 WO2001028915A1 (en) 1999-10-19 2000-10-17 Gas sensor and fabrication method thereof

Publications (1)

Publication Number Publication Date
DE60036301D1 true DE60036301D1 (de) 2007-10-18

Family

ID=19615914

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60036301T Expired - Lifetime DE60036301D1 (de) 1999-10-19 2000-10-17 Gassensor und sein herstellungsverfahren

Country Status (10)

Country Link
US (1) US6997040B1 (de)
EP (1) EP1226090B1 (de)
JP (1) JP3682603B2 (de)
KR (2) KR20010037655A (de)
CN (1) CN1272235C (de)
AT (1) ATE372297T1 (de)
AU (1) AU7967500A (de)
DE (1) DE60036301D1 (de)
TW (1) TW506942B (de)
WO (1) WO2001028915A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10144343A1 (de) * 2001-09-10 2003-03-27 Perkinelmer Optoelectronics Sensor zum berührugslosen Messen einer Temperatur
CN101031795B (zh) * 2004-01-27 2014-11-05 H2Scan公司 用于气体传感器的热隔离的方法和装置
CN1938588B (zh) * 2004-01-27 2011-11-09 H2Scan公司 隔离的气体传感器结构
KR20050081691A (ko) * 2004-02-16 2005-08-19 세주엔지니어링주식회사 접촉연소식 소형 가스센서 제조방법 및 접촉연소식 소형가스센서를 이용한 가스센서
KR100773025B1 (ko) * 2004-02-27 2007-11-05 이엠씨마이크로시스템 주식회사 반도체식 가스센서, 그 구동방법 및 제조방법
KR101119756B1 (ko) * 2005-04-20 2012-03-23 매그나칩 반도체 유한회사 반도체소자
JP5144090B2 (ja) * 2007-02-26 2013-02-13 シチズンホールディングス株式会社 接触燃焼式ガスセンサ及び接触燃焼式ガスセンサの製造方法
KR100942439B1 (ko) * 2007-12-28 2010-02-17 전자부품연구원 마이크로 가스센서 및 제조방법
JP5202007B2 (ja) * 2008-01-29 2013-06-05 日立オートモティブシステムズ株式会社 熱式流体流量センサ
TWI434037B (zh) 2010-12-03 2014-04-11 Ind Tech Res Inst 氣體感測器及其製造方法
KR101774757B1 (ko) * 2011-10-13 2017-09-07 한국전자통신연구원 가스 센서, 그의 제조 및 사용 방법
KR101431471B1 (ko) * 2013-05-10 2014-08-21 한국과학기술원 저 소비 전력형 가스 센서
KR101532557B1 (ko) 2014-05-09 2015-06-30 부경대학교 산학협력단 하이브리드 센서를 가지는 ＬＥＤ ｃｈｉｐ과 그 제작방법
KR101666572B1 (ko) * 2014-11-03 2016-10-17 한국과학기술원 고온 센서 패키지
KR20160061842A (ko) * 2014-11-24 2016-06-01 엘지이노텍 주식회사 가스 센서 패키지 및 그 제조 방법
CA3034248A1 (en) 2016-08-18 2018-02-22 Carrier Corporation Isolated sensor and method of isolating a sensor
CN107782767B (zh) * 2016-08-26 2022-01-07 深迪半导体(绍兴)有限公司 一种气体传感器加热盘及加工方法
KR102359236B1 (ko) * 2016-08-31 2022-02-07 엘지이노텍 주식회사 가스 센싱 모듈 및 이를 포함하는 센싱 장치
KR102519644B1 (ko) * 2016-09-22 2023-04-10 엘지이노텍 주식회사 가스 센싱 모듈 및 이를 포함하는 가스 센싱 장치
CN107089638A (zh) * 2017-04-24 2017-08-25 广东美的制冷设备有限公司 微型加热器及其加工方法
CN108918599B (zh) * 2018-05-08 2022-01-11 中芯集成电路（宁波）有限公司 一种气敏传感器及其形成方法
CN113330303B (zh) * 2019-05-21 2024-04-19 松下知识产权经营株式会社 气体传感器
US11353381B1 (en) * 2020-06-09 2022-06-07 Applied Materials, Inc. Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
KR102468714B1 (ko) * 2020-08-07 2022-11-21 울산과학기술원 공중 부유형 나노 구조물 기반 초 저전력 가스센서 및 그 제조 방법
DE102020122923A1 (de) 2020-09-02 2022-03-03 Tdk Electronics Ag Sensorelement und Verfahren zur Herstellung eines Sensorelements

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1216330A (en) * 1983-02-07 1987-01-06 Junji Manaka Low power gas detector
DE3479053D1 (en) * 1983-10-28 1989-08-24 Ngk Spark Plug Co Gas sensor with ceramics substrate and method for producing the same
JPS63259459A (ja) * 1987-04-17 1988-10-26 Toshiba Corp 限界電流式ガスセンサ
JPH01299452A (ja) * 1988-05-27 1989-12-04 Ricoh Co Ltd ４端子検出型ガス検出装置
JPH01313751A (ja) * 1988-06-13 1989-12-19 Figaro Eng Inc ガスセンサ
US4953387A (en) * 1989-07-31 1990-09-04 The Regents Of The University Of Michigan Ultrathin-film gas detector
US5763782A (en) * 1992-03-16 1998-06-09 British Technology Group Limited Micromechanical sensor
US5387329A (en) * 1993-04-09 1995-02-07 Ciba Corning Diagnostics Corp. Extended use planar sensors
JP3201881B2 (ja) * 1993-06-04 2001-08-27 株式会社トクヤマ ガスセンサ
EP0722565B1 (de) * 1993-10-08 1999-05-19 Microchip (Proprietary) Limited Katalytischer gassensor
DE4423289C1 (de) * 1994-07-02 1995-11-02 Karlsruhe Forschzent Gassensor für reduzierende oder oxidierende Gase
US5565084A (en) 1994-10-11 1996-10-15 Qnix Computer Co., Ltd. Electropolishing methods for etching substrate in self alignment
FR2736205B1 (fr) * 1995-06-30 1997-09-19 Motorola Semiconducteurs Dispositif detecteur a semiconducteur et son procede de formation
JP3570644B2 (ja) 1995-11-14 2004-09-29 フィガロ技研株式会社 ガスセンサ
JPH11166942A (ja) * 1997-09-30 1999-06-22 Honda Motor Co Ltd ガスレートセンサ
JP3472865B2 (ja) * 1998-03-09 2003-12-02 本田技研工業株式会社 ガスレートセンサの製造方法

Also Published As

Publication number Publication date
CN1272235C (zh) 2006-08-30
KR20010037655A (ko) 2001-05-15
KR20020060694A (ko) 2002-07-18
EP1226090A1 (de) 2002-07-31
CN1379731A (zh) 2002-11-13
JP2003512606A (ja) 2003-04-02
JP3682603B2 (ja) 2005-08-10
US6997040B1 (en) 2006-02-14
WO2001028915A1 (en) 2001-04-26
EP1226090B1 (de) 2007-09-05
TW506942B (en) 2002-10-21
ATE372297T1 (de) 2007-09-15
AU7967500A (en) 2001-04-30
EP1226090A4 (de) 2003-07-16
KR100438190B1 (ko) 2004-07-02

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